The invention discloses a
wave aberration detection device of an objective lens imaging
system. The
wave aberration detection device comprises a
light source, a collimating mirror, a spectroscope, a focusing mirror, a standard spherical reflector, a
data processing unit, a wave-front sensor, a first accurate adjustment table and a second accurate adjustment table, wherein the collimating mirror, the spectroscope, the focusing mirror and the standard spherical reflector are sequentially placed in the light emitting direction of the
light source, and the wave-front sensor, the first accurate adjustment table and the second accurate adjustment table are connected with the
data processing unit. In the
wave aberration detection device, the measurement processes and the
system error calibration process are switched by changing the position of the standard spherical reflector 5; in the two measurement processes, the standard spherical reflector 5 has the same adjustment accuracy, and therefore the calibration, measurement and correction of device and
system errors can be effectively completed, and the wave aberration measurement accuracy is improved. No high-precision standard
light source is needed, and cost is reduced; A
system error calibration method of the wave aberration detection device is simple and compact in structure and has the advantages of being easy to obtain and the like, and the wave aberration detection of the objective lens imaging system to be detected can be completed through the simple system.