The invention provides a method for improving the stability of
coating liquid supply, which shortens the time from starting a pump to reaching the pressure
stable state of the
internal pressure of a liquid supply
system and slowing down the pressure
stable state to normal pressure when the pump is stopped, so as to improve the film thickness uniformity at the
coating starting position and the problems of liquid accumulation at the
coating tail end and liquid dripping at the coating end position. Liquid in the liquid supply container flows into the coating head through the liquid supply pump and the coating head liquid inlet
pipe, a circulation stop valve is arranged at the feeding position of the coating head, the circulation stop valve is immediately opened after coating is finished, so that the liquid is prevented from flowing into the coating head, a liquid return
pipe is further arranged on the upper portion of the circulation stop valve, and the liquid return
pipe is communicated with the circulation stop valve. A
backflow switch valve is arranged at the starting end of the liquid return pipe, the liquid return pipe enables liquid in a liquid inlet pipe of the coating head to flow back into the liquid supply container, a liquid outlet switch valve is further arranged at the liquid inlet end of the circulation stop valve, and the liquid outlet switch valve is used for supplying liquid to the coating head in the open state; the liquid outlet switch valve and the
backflow switch valve are not opened at the same time.