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Terahertz defect detection device based on multiple-input multiple-output array

The invention discloses a terahertz defect detection device based on a multiple-input-multiple-output array, and relates to the technical field of testing. The device comprises a portal frame, a transmission table, a defect detection array front end, a microwave signal generation module and a data acquisition and control module, the defect detection array front end is fixed on the portal frame, is connected with the microwave signal generation module and is used for detecting defects of a sample to be detected, and the data acquisition and control module is connected with the transmission table. Comprising a terahertz signal generating array, a terahertz signal receiving array and a transmitting and receiving antenna module, and array elements in the terahertz signal generating array and the terahertz signal receiving array are arranged at equal intervals in a staggered mode; the transmission table is positioned below the front end of the defect detection array and is used for placing a sample to be detected, and the portal frame, the transmission table, the front end of the defect detection array and the microwave signal generation module are respectively connected with the data acquisition and control module. The device disclosed by the invention is high in integration level, high in stability and high in imaging efficiency, and realizes rapid, efficient and nondestructive detection on the defects of the non-metallic material.
Owner:CHINA ELECTRONIS TECH INSTR CO LTD