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41results about How to "Increase chance of shooting" patented technology

Flip-chip LED chip structure and manufacturing method thereof

The invention discloses a flip-chip LED chip structure and a manufacturing method thereof. The LED chip comprises an epitaxial layer taking sapphire as substrate and an electrode layer taking SiO2 / Si as substrate; holes of periodical structure are etched on the front surface of the sapphire substrate, and random patterns are etched on the back surface; a growth buffer layer, an n type GaN layer (n-GaN), an MQWs (multi quantum wells) layer and a p type GaN layer (p-GaN) are successively grown on the sapphire substrate etched with holes as the epitaxial layer; one or more negative electrode grooves are etched on the p type GaN layer (p-GaN); a p type contact layer is sputtered on the p type GaN layer (p-GaN); an n type ohmic contact layer is electroplated on the n type GaN layer (n-GaN) exposed after etching; titanium (Ti), platinum (Pt) and aurum (Au) are successively deposited on the SiO2 / Si substrate as an electrode layer; the electrode distribution on the electrode layer is coincident with that on the etched epitaxial layer; and the LED chip is formed by bonding the epitaxial layer on the front surface of the sapphire substrate and the electrode layer on the SiO2 / Si substrate with Au solder. The structure has the advantages of stable performance, high utilization rate of electric energy and long service life.
Owner:CHONGQING UNIV

LED flip chip and manufacturing method thereof

The invention discloses an LED flip chip. The LED flip chip sequentially comprises a sapphire substrate, an epitaxial layer, a conductive reflecting layer, a metal protective layer, a Vias and SiO2 insulating layer and metal electrodes from bottom to top, wherein the sapphire substrate is a sapphire substrate, obtained after inductive coupling plasma etching, with a graphical back side, an antireflection film is further arranged on the back side of the sapphire substrate, the antireflection film is an antireflection film, manufactured with an evaporation method, with silicon dioxide layers and titanium dioxide layers alternately arranged, the sum of the number of the silicon dioxide layers in the antireflection film and the number of the titanium dioxide layers in the antireflection film ranges from 6 to 15, and the thickness of the silicon dioxide layers in the antireflection film and the thickness of the titanium dioxide layers in the antireflection film range from 20 nm to 300 nm. The invention further provides a manufacturing method of the LED flip chip. The emitting angle of light at the bottom of the LED flip chip is increased through a graphical sapphire substrate technology, the light outgoing probability is increased, brightness is improved, and the brightness of white light is improved by 1% to 7%.
Owner:XIANGNENG HUALEI OPTOELECTRONICS

Manufacturing method for GaN-based LED (Light Emitting Diode) chip for coarsening p-GaN layer nanometer bowl-shaped surface

ActiveCN102790153AIncrease chance of shootingIncrease the exit light areaSemiconductor devicesEtchingWater vapor
The invention provides a manufacturing method for a GaN-based LED (Light Emitting Diode) chip for coarsening a p-GaN layer nanometer bowl-shaped surface and relates to the technical field of photoelectric device production. The manufacturing method comprises the following steps: firstly, evaporating a mask cesium chloride film layer for etching on the surface of a P-GaN layer of a GaN epitaxial wafer; filling water vapor into an evaporating platform chamber, thereby forming a plurality of cesium chloride nanometer islands; depositing silicon dioxide layers on the cesium chloride nanometer islands; soaking or ultrasonically treating the epitaxial wafer in deionized water, thereby forming a silicon dioxide nanometer bowl layer; taking the silicon dioxide nanometer bowl layer as an etching mask; after ending the etching, completely removing the silicon dioxide nanometer bowl layer remained on the GaN epitaxial wafer; performing ICP (Inductively Coupled Plasma) etching on one side of the GaN epitaxial wafer, thereby forming a platform; and evaporating an ITO (Indium Tin Oxide) film on the upper surface of the GaN epitaxial wafer. Compared with the conventional GaN-LED, the GaN-LED after being subjected to surface coarsening has the advantage that the luminous power is increased by above 35%.
Owner:YANGZHOU ZHONGKE SEMICON LIGHTING

LED chip manufacturing method of high extraction external quantum efficiency

InactiveCN104851946AIncrease the probability of light exitImprove luminous efficiencySemiconductor devicesQuantum wellLight emission
The invention provides an LED chip manufacturing method of high extraction external quantum efficiency. The method comprises the following steps: a step (1) of growing a GaN layer, an N-GaN layer, a quantum well layer, a P-GaN layer and a deposition ITO layer on a graphical substrate at one time; a step (2) of coating a layer of photoresistive liquid on the surface of the P-GaN layer or the ITO in a suspension manner; a step (3) of performing yellow light technologies such as pattern exposure, development and baking on the photoresistive liquid or adopting a nanometer impression mode to prepare a pattern; and a step (4) of selecting an ICP or wet etching method to transfer the pattern to an epitaxial wafer or the ITO layer. According to the invention, micropores are formed in the P-GaN layer or the ITO layer, so that on one hand, phenomena that light is reflected when passing through interfaces between the P-GaN layer, ITO and SiO2 and the air are prevented, and on the other hand, light absorption of the P-GaN layer and the ITO is lowered, the probability of light emission is effectively increased, and the luminous efficiency is improved. The method provided by the invention is easy to realize, controllable in process, and convenient in industrialized production via the conventional technology.
Owner:合肥彩虹蓝光科技有限公司

Method for preparing nanometer imaging substrate of LED (light emitting diode) chip epitaxial growth

The invention belongs to the field of solid illumination, and in particular relates to a method for preparing a nanometer patterned substrate of LED (light emitting diode) chip epitaxial growth. The method particularly comprises the following steps: dropping silicon oxide nanometer balls which are dispersed uniformly on a sapphire substrate after cleaning treatment, and coating the silicon oxide nanometer balls on the surface of the sapphire substrate uniformly by utilizing a spin coating machine in a single layer mode; carrying out ICP (inductively coupled plasma) etching processing on the sapphire substrate which takes the silicon oxide nanometer balls as masks, and dividing the etching into two groups: firstly, etching the image depth of the nanometer patterned substrate by utilizing BC13 gas; and then etching the image width of the nanometer patterned substrate by utilizing BC13, C12, and Ar gas; and taking the sapphire substrate out after etching, and drying for use after corrosion and cleaning. According to the invention, the dislocation density in the LED chip can be reduced effectively, the occurrence of cracking can be avoided, the crystalline quality and uniformity of epitaxial materials can be improved, the probability of light emission of the light for the LED from the sapphire substrate is increased, and further the light-emitting efficiency of the LED chip can beimproved.
Owner:黄山博蓝特半导体科技有限公司

A kind of LED flip chip and its manufacturing method

The invention discloses an LED flip chip. The LED flip chip sequentially comprises a sapphire substrate, an epitaxial layer, a conductive reflecting layer, a metal protective layer, a Vias and SiO2 insulating layer and metal electrodes from bottom to top, wherein the sapphire substrate is a sapphire substrate, obtained after inductive coupling plasma etching, with a graphical back side, an antireflection film is further arranged on the back side of the sapphire substrate, the antireflection film is an antireflection film, manufactured with an evaporation method, with silicon dioxide layers and titanium dioxide layers alternately arranged, the sum of the number of the silicon dioxide layers in the antireflection film and the number of the titanium dioxide layers in the antireflection film ranges from 6 to 15, and the thickness of the silicon dioxide layers in the antireflection film and the thickness of the titanium dioxide layers in the antireflection film range from 20 nm to 300 nm. The invention further provides a manufacturing method of the LED flip chip. The emitting angle of light at the bottom of the LED flip chip is increased through a graphical sapphire substrate technology, the light outgoing probability is increased, brightness is improved, and the brightness of white light is improved by 1% to 7%.
Owner:XIANGNENG HUALEI OPTOELECTRONICS

Method for preparing nanometer imaging substrate of LED (light emitting diode) chip epitaxial growth

The invention belongs to the field of solid illumination, and in particular relates to a method for preparing a nanometer patterned substrate of LED (light emitting diode) chip epitaxial growth. The method particularly comprises the following steps: dropping silicon oxide nanometer balls which are dispersed uniformly on a sapphire substrate after cleaning treatment, and coating the silicon oxide nanometer balls on the surface of the sapphire substrate uniformly by utilizing a spin coating machine in a single layer mode; carrying out ICP (inductively coupled plasma) etching processing on the sapphire substrate which takes the silicon oxide nanometer balls as masks, and dividing the etching into two groups: firstly, etching the image depth of the nanometer patterned substrate by utilizing BC13 gas; and then etching the image width of the nanometer patterned substrate by utilizing BC13, C12, and Ar gas; and taking the sapphire substrate out after etching, and drying for use after corrosion and cleaning. According to the invention, the dislocation density in the LED chip can be reduced effectively, the occurrence of cracking can be avoided, the crystalline quality and uniformity of epitaxial materials can be improved, the probability of light emission of the light for the LED from the sapphire substrate is increased, and further the light-emitting efficiency of the LED chip can beimproved.
Owner:黄山博蓝特半导体科技有限公司

Quantum dot light emitting diode and manufacturing method

The invention provides a quantum dot light-emitting diode and a manufacturing method thereof. The quantum dot light-emitting diode comprises two structures of a top-emitting quantum dot light-emitting diode and a bottom-emitting quantum dot light-emitting diode. The light path adjusting layer is additionally arranged on the light-emitting side of the top-emitting quantum dot light-emitting diode or the light path adjusting layer is additionally arranged on the light-emitting side of the bottom-emitting quantum dot light-emitting diode, and the light path adjusting layer is additionally arranged, so that the emergent section area of light emitted by the quantum dot light-emitting diode can be increased; and the light path adjusting layer can refract the light emitted by the quantum dot light emitting diode, so that light path adjustment is carried out on the light, and the light emitting probability can be improved and the light emitting uniformity of each angle of the device can be improved through light path adjustment. The light extraction efficiency of the quantum dot light emitting diode can be obviously improved by increasing the light emitting area, improving the light emitting probability and improving the light emitting uniformity of each angle of the device.
Owner:NORTH CHINA ELECTRIC POWER UNIV (BAODING)

Overall wet chemical preparation method for nanoscale patterning sapphire substrate

The invention discloses an overall wet chemical preparation method for a nanoscale patterning sapphire substrate. The method comprises the following steps that: a single-layer colloid crystal film is deposited on the sapphire substrate; after heat treatment, tetraethoxysilane sol is filled into gaps of nano microspheres, and a filling layer is formed on part of the surface of the sapphire substrate after drying; the colloid crystal film is removed; the filling layer serves as an etching mask so as to etch the sapphire substrate through a wet method, and periodicity patterns with the distribution of the nano microspheres are transferred onto the substrate; and the etching mask is removed, so as to obtain sapphire substrate with the nanoscale patterns. The overall wet chemical preparation method has the advantage that the whole process can be completed thoroughly in a common chemical laboratory without adopting any semiconductor process equipment. The nanoscale patterning sapphire substrate can reduce the dislocation density in chips effectively, improve the crystal quality of extension materials and increase the probability of light emitting from the sapphire substrate, so as to improve the light extraction efficiency of an LED (light-emitting diode).
Owner:TSINGHUA UNIV

A device structure suitable for monochromatic LED wafer level packaging

The invention provides a device structure suitable for monochromatic LED wafer-level package. The device structure at least includes a transparent substrate, a light emitting diode chip of a thin-film flip-chip structure bonded to the upper surface of the transparent substrate, and first reflectors and passivation layers which cover the sides of the transparent substrate and the light-emitting diode chip of a thin-film flip-chip structure in turn. The transparent substrate is machined into a trapezoidal structure facilitating light output. The lower surface of the transparent substrate is provided with a structure facilitating light output, such as a micro lens array structure or a V groove structure. The surface of an N-type semiconductor layer of the light emitting diode chip of a thin-film flip-chip structure is provided with a micro tapered coarse structure. The coarse structure is bonded to the upper surface of the transparent substrate, so that light emitted by the LED chip can enter the transparent substrate easily. The first reflectors and a reflector on the surface of a P-type layer of the thin-film flip chip form a trapezoidal reflector cup, which enables monochromatic light emitted by the chip to enter the transparent substrate from the surface of the N-type semiconductor layer completely and then go out to the air from the lower surface with a structure facilitating light output of the transparent substrate. By using a transparent substrate material with moderate refractive index, the total reflection of light directly from gallium nitride to the air is reduced greatly, and the light output efficiency of devices is increased.
Owner:SHANGHAI XINYUANJI SEMICON TECH
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