A modified technology of
spin coating which is named Two-Axis
spin coating is disclosed. The innovative Two-Axis
spin coating apparatus is a rotary device that
spins the substrate horizontally the same as conventional spin coaters while the whole horizontal
spinning system can be rotated vertically. The vertical rotation of the substrate generates a vertical
centrifugal force perpendicular to the surface of the substrate which allows the
coating face with an elevated
artificial gravity acceleration. The elevation of gravity acceleration adjusts and normalizes the local high and low
surface tension stresses on the surface of the coated film. This elevation of gravity also increases the weight of
coating elements artificially and obliges the wavy surface convex regions to flow toward the concave areas. The elevation of gravity also obliges the lighter probable air bubbles inside the layer, immediately before the
coating surface skinning process, move toward the surface and drain out from the layer. The invention provides a method to level the layer's edge beads, level the
coated surface, drain out probable micro sized air bubbles inside the layer and form denser film simultaneously.