The invention provides a multi-type MEMS Fabry-Perot filter
chip closed-loop
feedback control circuit and method, and relates to the technical field of intelligent optical electromechanical
system control, a Fabry-Perot filter
chip is installed on a circuit board, the Fabry-Perot filter
chip comprises a substrate, a fixed mirror and a movable mirror which are stacked in sequence, and a Fabry-Perot cavity is formed between the fixed mirror and the movable mirror; the movable mirror is provided with a driving
electrode and at least one feedback
electrode, and the closed-loop
feedback control circuit comprises a
microprocessor module, a communication module, a
capacitance detection module and a driving module which are arranged on a circuit board. A
microprocessor module is used for controlling a driving module to output adjustable driving
voltage to a driving
electrode to drive a movable mirror to move, cavity length changes are obtained in real time through
capacitance detection, the driving
voltage is dynamically adjusted in combination with a control model, driving control and
capacitance feedback detection are deeply fused, accurate tuning of the center
wavelength is achieved, and the purpose of accurate tuning of the center
wavelength is achieved. The cavity parallelism is monitored and adjusted, and the modulation precision, stability and environmental adaptability of spectrum output are effectively improved.