A method for adapting depth structure model data to coherence
tomography measurement data of a sample having a plurality of
layers composed of layer materials in a layer construction in a
depth direction. A plurality of
layers having layer thicknesses and a plurality of layer transitions upstream of the respective
layers in the
depth direction are derived from the depth structure. Furthermore, model
reflectivity coefficients are adapted to the respective layer-transition-specific, spectrally resolved
reflectivity coefficients by way of a value that optimizes the
adaptation being calculated in each case for the at least one parameter of one of the model layer transitions. On the basis of the value calculated for the at least one parameter, depth structure model data can be obtained, the resolution of which in the
depth direction goes beyond the resolution predefined by a CT measurement on which the spectral
complex field reflectivity is based.