The invention provides a
laser interference
processing optimization method and
system for improving the performance of a micro-nano structure, and relates to the technical field of
laser micro-
nano machining.The method comprises the steps that firstly, micro-nano structure
sample processing parameters are extracted, a sensitive
tracking model is constructed to analyze parameter sensitivity, and a lifting-retaining parameter set is obtained; according to the
simulation modeling,
processing and lifting a dynamic model diagram, analyzing the period consistency of the dynamic model diagram and a
reference design diagram through foreground and background maximum flow
cutting, and determining a structure period; if the local photoetching model diagram is of a periodic structure, projecting the actual local photoetching model diagram to a local photoetching model diagram of one type in a sine manner, analyzing the curve slope, and optimizing a periodic interference angle and a
light beam wavelength; and if the structure is a non-periodic structure, interpolating a gradient
processing chromaticity layout for the second-class local photoetching model diagram according to a
chromaticity tradeoff criterion, and analyzing and optimizing a dynamic phase in real time. According to the method, high-precision optimization of the processing parameters of the micro-nano structure with consistency in different periods is realized, and the overall performance and stability of the micro-nano structure are effectively improved.