A method for producing a
thin film transistor substrate includes the steps of: (i) depositing an amorphous
semiconductor film on a transparent insulating substrate; (ii) patterning the amorphous
semiconductor film so as to form insular amorphous
semiconductor films, the step (ii) including a process (I) for forming, in respective stripe areas each of which is elongate in a first direction in a display area, a plurality of insular semiconductor films whose channel length is in line with the first direction, and a process (II) for forming, in an area including extended portions of the striped areas in a
peripheral circuit area, a plurality of insular semiconductor films; (iii) polycrystallizing the insular semiconductor films in the
peripheral circuit area so that the insular semiconductor films have high mobility in a second direction and polycrystallizing the insular semiconductor films in the display area so that the insular semiconductor films have high mobility in the first direction; and (iv) forming TFTs by using polycrystalline insular semiconductor films. In at least one
peripheral circuit, a channel of a high speed TFT is positioned on a portion other than the extended portions of the stripe areas.