The invention discloses an n-
SiC substrate AlGaN group vertical structure
resonant cavity ultraviolet LED
chip and a production method thereof, and belongs to the
semiconductor light-emitting device field. The n-
SiC substrate AlGaN group vertical structure
resonant cavity ultraviolet LED
chip is respectively constituted by a lower
electrode layer, an n-
SiC substrate, an n-Alx0Gal-x0N conductive buffer layer, an n-AlGaN group DBR lower reflecting layer, an n-Alx1Ga1-x1N current expanding layer, an AlGaN base induced
tunnel junction, a p-Alx2Gal-x2N
hole injection layer, an AlGaN group
quantum well active region, an n-Alx3Gal-x3N
electron injection layer, an n-AlGaN group DBR upper reflecting layer, and an upper
electrode layer, and in addition, x0, x1,x2,x3 are greater than or equal to 0.1, and smaller than or equal to 0.9. By adopting the SiC substrate, which is matched with the AlGaN lattice in a better way, the AlGaN quality is improved, and internal
quantum efficiency is improved; by adopting the
resonant cavity structure, TE mode polarized light is enhanced, and light extracting efficiency of a device is improved; structure inversion is realized by the
tunnel junction, and influence of polarization
electric field is reduced; composite light-emitting efficiency of charge carriers in the
quantum well is improved. The application range of the
semiconductor ultraviolet light-emitting device is further extended.