The invention discloses an n-SiC substrate AlGaN group vertical structure resonant cavity ultraviolet LED chip and a production method thereof, and belongs to the semiconductor light-emitting device field. The n-SiC substrate AlGaN group vertical structure resonant cavity ultraviolet LED chip is respectively constituted by a lower electrode layer, an n-SiC substrate, an n-Alx0Gal-x0N conductive buffer layer, an n-AlGaN group DBR lower reflecting layer, an n-Alx1Ga1-x1N current expanding layer, an AlGaN base induced tunnel junction, a p-Alx2Gal-x2N hole injection layer, an AlGaN group quantum well active region, an n-Alx3Gal-x3N electron injection layer, an n-AlGaN group DBR upper reflecting layer, and an upper electrode layer, and in addition, x0, x1,x2,x3 are greater than or equal to 0.1, and smaller than or equal to 0.9. By adopting the SiC substrate, which is matched with the AlGaN lattice in a better way, the AlGaN quality is improved, and internal quantum efficiency is improved; by adopting the resonant cavity structure, TE mode polarized light is enhanced, and light extracting efficiency of a device is improved; structure inversion is realized by the tunnel junction, and influence of polarization electric field is reduced; composite light-emitting efficiency of charge carriers in the quantum well is improved. The application range of the semiconductor ultraviolet light-emitting device is further extended.