272results about How to "Reduced installation accuracy" patented technology

A wireless IC device includes a radiation plate, a feeding circuit substrate on which a feeding circuit including a resonant circuit including an inductance element is provided, the feeding circuit being electromagnetically coupled to the radiation plate, and a wireless IC chip including a connection electrode, the wireless IC chip being disposed on the feeding circuit substrate. A mounting electrode is provided on the feeding circuit substrate. The frequency of signals sent and received using the radiation plate substantially corresponds to the resonant frequency of the resonant circuit. The wireless IC chip is electromagnetically coupled to the mounting electrode.

The present invention enhances the mounting accuracy of a drive circuit chip on a substrate thus realizing a display of high quality. Bumps (for example, gold bumps) on the drive circuit chip are used for alignment. Here, to enhance the recognition property of the alignment bumps, a plane shape of a conductive layer which is formed between a semiconductor substrate (Si substrate) of the drive circuit chip and the alignment bump is set to be included within a profile of a plane shape of the alignment bump. That is, by preventing the conductive layer from being observed in a periphery of the alignment bump, it is possible to prevent a photographed pattern of the bump taken by a camera or the like from be influenced by the conductive layer.

The invention discloses an installation method of a double-faced guide rail used for an ultra-large type container ship transverse bulkhead block. The block comprises a first section, a second section, a third section and a fourth section. The installation method comprises the following steps that the transverse bulkhead block central line and the hatch coaming top plate line are surveyed and marked on an overall assembly platform; a set of docking block positioning central lines and a set of guide rail rack positioning central lines are surveyed and marked in the ship width direction; a set of first waterlines and a block lower edge line are marked in the ship height direction; a plurality of cement docking blocks are arranged according to the hatch coaming top plate line, the first waterlines and the docking block positioning central lines, and a guide rail rack embedded jig frame is installed in a forklift groove between every two adjacent cement docking blocks; a guide rail rack is hoisted into the guide rail rack embedded jig frames; the first section, the second section, the third section and the fourth section are hoisted onto the multiple cement docking blocks and welded; and the guide rail rack is positioned and installed. By the adoption of the installation method, deformation caused by turning-over of the block can be reduced, and the installation accuracy is high.

The invention discloses a circular-disc-shaped underwater glider and a working method thereof. The glider comprises a circular-disc-shaped shell, a pressure-resisting shell, a control system, a communication navigation system, a driving system, a sensor system, an energy source system and an external port. The circular-disc-shaped shell made of a buoyancy material covers the pressure-resisting shell and greater buoyancy is provided for the circular-disc-shaped underwater glider, so that effective load is improved. The pressure-resisting shell structure design scheme combining the pressure-resisting shell and a pressure-resisting hollow ring is adopted so that the utilization rate of the inner space of the circular-disc-shaped underwater glider is improved; meanwhile, the quantity of sealing nodes of internal equipment is greatly reduced, more equipment is prevented from being exposed in a deep sea complicated underwater environment, and thus the whole reliability is improved. A gravity center adjusting system is arranged in the pressure-resisting hollow ring, and a force arm and a moment, generated by a slide block, are relatively great; and the posture control efficiency is improved and the inner space of the circular-disc-shaped underwater glider is sufficiently utilized.

The invention discloses a sliding-plate parallel clamping auto tire carrier which comprises at least two mutually connected chassis, wherein traveling mechanisms and positioning devices are arranged on the chassis; a clamping mechanism is arranged on each chassis and comprises a pair of sliding plates and a sliding plate driving mechanism, and the sliding plates are connected with the chassis in a sliding way; clamping arms are movably connected with the sliding plates; and a left guiding groove plate and a right guiding groove plate are fixed on each chassis. Through the interaction and cooperation of the sliding plates, L-shaped guiding grooves in the guiding groove plates and the clamping arms, the siding plates perform linear motion under the guidance of the L-shaped guiding grooves so as to force the clamping arms to perform rotary and linear motion, so that the rotating, unfolding and folding motion of the clamping arms is realized, and then the effect that working arms parallelly clamp tires to carry an auto is realized through the linear motion; a clamping arm driving motor is omitted, the system structure is simplified, and the reliability is improved; the clamping arms parallelly and oppositely push the clamped tires so as to avoid damaging the auto; and meanwhile, the sliding-plate parallel clamping auto tire carrier is simple in structure, convenient to mount, low in cost and high in reliability.

The invention discloses a building fire rescue system and method. The building fire rescue system comprises a cabin, a suspension arm system, a guiding system, a fire extinguishing system and a walking system, wherein the suspension arm system is arranged on the roof of a building and capable of driving the cabin to ascend and descend outside the building, the guiding system is used for guiding the cabin, and the walking system is used for driving the cabin to move around the building; the suspension arm system comprises a base, a suspension arm and a first winch, wherein one end of the suspension arm is connected with the base, and the other end of the suspension arm extends out of the building, and a first steel cable of the first winch is connected with the cabin and drives the cabin to lift; the guide system comprises more than two guide sleeves, an anchoring trolley and more than two second winches, wherein the more than two guide sleeves are arranged on the cabin, the anchoring trolley is arranged on the ground, and the more than two second winches are arranged on the roof of the building, and a second steel cable can penetrate through the guide sleeves and is connected with the anchoring trolley; and the walking system comprises an annular track and a walking mechanism, wherein the annular track is arranged on the roof of the building, the walking mechanism is arranged on the base, and the walking mechanism can walk on the annular track. The building fire rescue system has the advantages of high rescue efficiency and high safety and reliability.

The invention discloses a fingerprint input module group which comprises a light emitting unit, an imaging unit and an image sampling unit. The light emitting unit comprises a plane light source for emitting lights and a light harvesting punch hole. The imaging unit comprises a transparent substrate which is septal to the plane light source and at least one micro-prism element which is arranged on the substrate; the image sampling unit and the imaging unit are respectively arranged at the two opposite sides of the emitting unit. Lights are collected by the light harvesting punch hole and are converted into an image signal. By the septal between the plane light source and the substrate and due to the fact that the image sampling unit and the imaging unit are respectively arranged at the two opposite sides of the emitting unit, the image sampling unit can obtain clearly demarcated bright and dark fingerprint images. Therefore, the required installation precision of the units which are mutually overlapped can be lowered greatly, and the yield rate can be improved.

A refrigerating machine jacket structure for a superconduction magnet and an installation and disassembly method of the refrigerating machine jacket structure relate to the technical field of low-temperature engineering and superconduction magnets. The refrigerating machine jacket structure sequentially comprises a refrigerating machine flange seat (3), a primary corrugated pipe (11), a primary flange seat (12), a secondary corrugated pipe (21) and a secondary flange seat (22) from top to bottom, wherein thermal connection is formed between a cold screen and the primary flange seat 12), thermal connection is formed between a superconduction coil and the secondary flange seat (22), the refrigerating machine flange seat (3) and the primary flange seat (12) are connected by the primary corrugated pipe (11), and the primary flange seat (12) and the secondary flange seat (22) are connected by the secondary corrugated pipe (21). The refrigerating machine jacket structure has the characteristics of low conduction thermal leakage, high vacuum tightness, high thermal connection efficiency and long lifetime of a refrigerating machine.

The invention belongs to the technical field of building construction, and provides a steel structure joint, a prefabricated column, a manufacturing method thereof and an assembling method of a columnbeam. The steel structure joint is reliable in stress and convenient to produce and manufacture; the prefabricated column with the steel structure joint is easy to transport and store, the installingprocess of a steel beam and the prefabricated column on site is easy and convenient, operation is convenient, no formwork erection is needed on site, supporting is easy, no operation space limit is caused, dry type construction is performed, the installing precision is easy to control, the later corrosion resistance and fireproof treating area is small, the full-life-cycle maintenance cost is low, the advantages of a fabricated building is sufficiently reflected, the construction efficiency and the construction quality are improved, and waste and building waste are reduced.

The invention discloses a lifting drive system of a parking device and belongs to the technical field of parking devices. Two steel wire ropes drive upper-layer sweeping boards and lower-layer sweeping boards to move up and down, and one steel wire rope installed on a winding drum is wound around a three-direction pulley block, corresponding fixed pulleys on upper-layer sweeping boards, the three-connection pulley block and corresponding fixed pulleys on underground sweeping boards sequentially and then is fixedly installed on a back cross beam of a top floor; the other installed on the winding drum is wound around the three-connection pulley block, a two-connection pulley block, corresponding fixed pulleys on the upper-layer sweeping boards, the two-connection pulley block and corresponding fixed pulleys on underground sweeping boards sequentially and then is fixedly installed on the back cross beam of the top floor; and balance chains are arranged on two sides of the upper-layer sweeping boards and the lower-layer sweeping boards respectively. The invention further discloses a two-forward one-negative lift-sliding parking device. The lift-sliding parking device comprises a plurality of lifting drive systems of the parking device. According to the lifting drive system and the lift-sliding parking device, upper-layer sweeping boards and the underground sweeping boards are integrated into one lifting drive system, so that 50% of lifting system materials are saved, and manufacturing costs are reduced.

The invention discloses a turnover device for thin plate subsections of a luxury cruise ship. The turnover device is characterized by consisting of bases and supporting tubes, wherein each base consists of two supporting plates which are arranged in parallel, and a top plate, the top plate and the supporting plates are arranged in the form of a T, the two supporting plates are welded by a plurality of connecting plates, the supporting plates are equipped with lifting holes, the two ends of each supporting tube are supported and inserted into supporting tube hole rings of the bases; and a supporting tube return plate is fixedly connected with the two bases to form a turnover base of a framework structure. Compared with the prior art, the turnover device is simple in structure, is convenient in use, avoids deformation, in a turnover process, of the thin plate subsections very well, is high in reliability, is good in safety performance and effectively controls mounting precision of the thin plate subsections, and especially meets operation needs of hoisting and turning over the thin plate subsections of the luxury cruise ship as well as upper-layer building subsections of other ships.

An ink-jet recording device is capable of correcting a recording position due to a leaning of a printing head and correcting of driving timing between multiple printing heads. Each nozzle row of a printing head is classified into multiple nozzle groups, and the driving timing of the nozzle groups other than the nozzle group serving as a reference of correction of the multiple nozzle groups is adjustable to correct for any leaning of the printing head. Moreover, in the event of performing the driving timing between printing heads, the driving timing of a non-reference printing head is adjustable relative to a reference printing head employed for leaning correction of multiple printing heads.

The invention discloses a side tilting three-wheel motor vehicle. The motor vehicle comprises a frame and left and right front wheels, wherein the frame is connected with the left and right front wheels through a suspension mechanism respectively; the suspension mechanism is arranged on the upper side of the left and right front wheels and is connected with the wheels through a steering arm component; the frame is provided with a rocker arm and a rocker rod; the rocker rod is arranged on the frame in a rotating manner; the rocker rod is fixedly provided with a guy wire mounting block; the guy wire mounting block is connected with a side tilting guy wire; the side tilting guy wire is guided by a guy wire roller to change direction and then is connected with a side tilting slide block; the side tilting slide block sleeves a side tilting guide column; the side tilting guide column is provided with a guide column mounting plate and a side tilting lock spring; a side tilting stop block is also connected to one side of the side tilting slide block; an end head of the side tilting stop block is clamped with the suspension mechanism when the side tilting slide block is pulled by the side tilting guy wire. According to the vehicle, the wheel distance between the front wheels is shortened, miniaturization of the motor vehicle is realized, the side tilting control is more flexible, and the vehicle also has a wheel locking function.

The invention belongs to the field of stereo garages, and particularly relates to an intelligent lifting carrier of a stereo garage. The intelligent lifting carrier comprises a carrying frame and at least one transition plate, wherein the carrying frame comprises two longitudinal beams, and the transition plates are driven by a power device to move along the two longitudinal beams. The lower sides of the two ends of each transition plate are respectively provided with a guide base, a holding rod used for holding a vehicle tire is fixedly installed at the outer end of each guide base on the side away from the longitudinal beams, the transition plates drive the holding rods to move longitudinally along the longitudinal beams by driving the guide bases to move longitudinally, the transition plates hinder the inner ends of the guide bases on one side close to the longitudinal beams from moving longitudinally and enable the outer ends of the guide bases to rotate by driving the guide bases to ascend and descend, and the outer ends of the guide bases rotate to drive the holding rods to rotate. A running track is simplified, machining difficulty is reduced, and installation precision is improved; through ingenious lifting, motion of front guide pillars is limited, and rear guide pillars are made to rotate, so that the holding rods are unfolded or folded.

The invention relates to a rope guider for a mining puffer. The rope guider comprises a support, a guiding movement actuating mechanism, a wire rope deflection detection mechanism, a hydraulic motor and a three-position four-way hydraulic valve for controlling operation of the hydraulic motor, wherein the guiding movement actuating mechanism comprises a trapezoidal lead screw, a self-centering lead screw nut in threaded connection with the trapezoidal lead screw, a dual-axis integral guide rail and a guide rail slide block matched with the dual-axis integral guide rail, and the trapezoidal lead screw and the dual-axis integral guide rail are transversely arranged on the support; the wire rope deflection detection mechanism comprises a rope pressing roller mechanism, a rope swinging roller mechanism, a driven spindle and a shift fork, and the rope pressing roller mechanism is connected with a second link rod of the rope swinging roller mechanism through a first link rod, a first bearing and the driven spindle; and the self-centering lead screw nut can lower the mounting precision and the processing and manufacturing difficulties and costs. The rope guider enables wire ropes of the mining puffer to be tidily and smoothly arranged, thereby prolonging the service life of the wire ropes and improving the production security.

The invention belongs to the field of civil engineering and relates to an adjustable locating device for a steel structural support joint supported onto a concrete structure. The adjustable locating device comprises a locating device and an adjusting device, wherein the locating device comprises a support, an anchoring plate and an adjusting ring plate; the support, the anchoring plate and the adjusting ring plate are formed into a whole in the manner of welding; the anchoring plate is evenly provided with mounting holes along the centerline; and anchor bolts or anchor bars pass through the mounting holes, and then, are welded all around at the positions on the anchor bolts or anchor bars, which are contacted with the anchoring plate. The adjusting device comprises adjusting anchor bolts, adjusting nuts, gaskets, adjusting holes and the adjusting ring plate, wherein the adjusting anchor bolts are connected with the concrete structure; and the adjusting anchor bolts respectively pass through mounting holes at the centers of the gaskets and are fixed with the gaskets through screwing down the adjusting nuts and the adjusting anchor bolts. The locating device can be used for performing multidirectional adjustable location, and thereby, the installation accuracy can be conveniently controlled. The adjustable locating device is wide in applicability and simple in construction operation, can meet the safety requirements on connection in joint areas, and is arranged in a concrete member to double as a support.

The invention discloses a corridor stairlift which comprises a track and a cross-shaft chain, and further comprises a gear rack, two sets of driving mechanisms, two copper bars, at least two sets of power supply devices and a lifting seat, wherein the track is mounted below a stairhead plate by the aid of a suspension device; the cross-shaft chain is mounted in the track; the extending direction of the track is the same as that of a stair railing; the gear rack is mounted above the track; the two sets of driving mechanisms are mounted at the two ends of the cross-shaft chain by the aid of chain plates; the two copper bars are fixedly mounted below the track; the at least two sets of power supply devices are mounted at the middle of the cross-shaft chain; the lifting seat is suspended at the tail end of the cross-shaft chain; both the gear rack and the copper bars are parallel to the track; the driving devices are meshed with the gear rack, and used for driving the cross-shaft chain to move along the track; and the power supply devices are used for being electrically connected with the two copper bars and supplying power to the driving mechanisms. The corridor stairlift has the advantages that the cross-shaft chain is adopted as a drawing device, and the driving mechanisms and the gear rack are matched to serve as a power unit, so that a suspension rod and the lifting seat can be smoothly drawn to freely rise and fall along the track with the same extending direction of the stair railing; the structure is simplified; and the construction is convenient.

The invention belongs to the technical field of radar antennas, and particularly discloses a method for an electrode of a satellite-borne electrostatic forming membrane reflector unfolding antenna. According to the method, the characteristics of systematic manufacturing and installing of the electrode are sufficiently considered, and clipping and lofting are carried out on a flexible cable and the membrane electrode in a separated mode. Due to the fact that tension of the flexible cable is easily measured, it is emphasized that flexible cable clipping is carried out in the tensioning state, and the flexible cable clipping accuracy is controlled. The hook face unfolding and stress releasing principle can not be easily used when tension of a membrane is measured, the membrane is clipped in the plane stress-free state, and the manufacturing clipping accuracy of the membrane can be effectively controlled. Then the flexible cable is connected with the membrane electrode through a positioning template in the tensioning state, and the installation accuracy of the electrode can be effectively controlled. The method is reliable in principle and easy and convenient to operate, and the method for effectively controlling manufacturing and installing of the high-voltage electrode of the electrostatic forming membrane reflector unfolding antenna is provided.

The invention relates to an air spring with stiffness adjusted by filler and pressure and step-pressure buffer. The air spring is of the utmost importance to enhance the smoothness and the comfort of a vehicle, protect roads and freight and limit overfreight. For the type-matching of the static stiffness of the air spring, people neglect that the static stiffness adjustment is needed because difference exists between stiffness of a selectable standard series airbag and required stiffness of a particular vehicle. Difficulty in the dynamic stiffness adjustment of the air spring is frequently resulted from the mismatch of the static stiffness for the airbag. In a passive type air suspension system, the mismatch of the static stiffness of the airbag is the important reason which results in severe lateral motion in vehicle operation. The traditional dynamic stiffness adjustment is realized by connecting a primary air chamber with a secondary air chamber, and adjusting a throttling port on a passage between the primary air chamber and the secondary air chamber to change the pressure difference when air flows between the primary air chamber and the secondary air chamber. The stiffness adjustment system does not change the volume of the air chambers in an adjustment process, thus the difficulty for adjust the stiffness is big. Aiming at the problems, the invention develops the novel air spring. The air spring provided by the invention has the advantages of adjustability for static / dynamic stiffness, simple structure, low cost and convenience and practicality.

The invention relates to a detection adjusting device for thin sheet assembly fixture, comprising a flexible mounting device (100) and an on-line real-time detection adjusting mechanism (200) that is installed on the flexible mounting device (100) via pins and bolts; the invention further relates to a detection adjusting method for thin sheet assembly fixture. In the invention, the detection device can be positioned at any dimensional orientation according to production requirement so as to meet the requirements of mounting spare parts of thin sheets at spatial location. The device has big flexibility, simple and convenient installation, small volume and simple structure, which can detect workpieces in real time when thin sheets are assembled; therefore, the device is convenient to adjust and quick to rebuild.

The invention relates to a building construction method, in particular to a construction method for a large steel plate embedded part of a wall. The technological processes comprise the steps that the large steel plate embedded part is machined and manufactured in a factory; paying off and positioning are conducted; the steel plate embedded part is hoisted in place; a triangle steel bar bracket is welded, and a steel plate is fixed; a wall steel bar around the steel plate is bound, a formwork is erected, and wall concrete is poured; after formwork removing, the mounting precision of the embedded part is measured for a second time; and a finished product is protected. According to the construction method, construction of the mounting quality and precision of the large steel plate embedded part is effectively controlled through control over all links in the construction process, the whole construction technology is simple and convenient in process, the working efficiency is high, the large steel plate embedded part of the wall is constructed by using the construction method, the construction progress is accelerated, meanwhile, materials are saved, cost is saved, the technical and economic effects are obvious, and the construction method is worth popularizing.

The invention discloses a rope transmission device, which is characterized in that a rope is arranged on circumferential edge parts of a driving wheel and a driven wheel in a tension way, the friction force between the rope and each wheel body is increased by additionally arranging a plurality of driving auxiliary wheels and driven auxiliary wheels, and the rope can be taken up and paid off on each wheel body along the rotation of each wheel body, so that the power transmission between the driving wheel and the driven wheel is realized. Compared with the belt transmission or the chain transmission adopted in the prior art, the rope transmission device has a simple structure, low installation precision, low cost and smaller size of the device; and compared with a method that the friction is increased by winding multiple circles of rope on each wheel body, the rope transmission device is free from causing the seizure of the rope being squeezed and wound in the axial direction when the wheel bodies rotate. The rope transmission device has good application performance and is more suitable for the remote transmission which does not need the large power.

A light source device includes a first semiconductor laser element that oscillates a first laser beam having a visible-region wavelength, a second semiconductor laser element that oscillates a second laser beam having a visible-region wavelength, and a light-scattering body that is irradiated with first laser beam and second laser beam to scatter first laser beam and second laser beam without changing the wavelengths. Because the wavelengths are not converted, first laser beam and second laser beam oscillated from first semiconductor laser element and second semiconductor laser element are emitted without generating energy losses of first laser beam and second laser beam.

The invention provides a laser transmitting and receiving scanning device and a laser radar system, relates to the technical field of laser radars, and aims to solve the problems that the size is difficult to reduce under the condition that the resolution is ensured, and the optical adjustment difficulty is high and the cost is high in the prior art. The laser receiving and transmitting scanning device comprises a receiving and transmitting optical fiber, the receiving and transmitting optical fiber is fixed by the fixing clamp and connected with a light beam shaping and collimating system, a one-dimensional galvanometer and a one-dimensional rotating mirror are arranged at an outlet of the light beam shaping and collimating system, and the one-dimensional galvanometer is used for receiving laser emitted by the light beam shaping and collimating system and reflecting the laser to the one-dimensional rotating mirror. According to the laser transmitting and receiving scanning device and the laser radar system provided by the invention, the size and the cost of the laser scanning device can be obviously reduced under the condition of ensuring the resolution, and the application range of the laser radar system is expanded; and in addition, the installation and adjustment difficulty can be reduced.

The invention discloses a main cable strand dispersing structure for a suspension bridge. The main cable strand dispersing structure comprises a lower saddle body, an upper saddle cover, a clamping cover and a base plate. A plurality of partition plates are arranged in guide slot ways in a rear saddle body of the lower saddle body and used for separating main cable strands in different columns. The upper saddle cover and the rear saddle body form a cable strand dispersing section, and the main cable strands are vertically arranged. The upper saddle cover and a middle saddle body form a cavity section. The shape that the main cable is in circular transition in a clamping section and the cable strands in the cable strand dispersing section are vertically arranged is ensured. The clamping cover and a front saddle body form the clamping section, and clamping force and anti-slid frictional resistance are provided. The base plate is fixed to the lower portion of the lower saddle body and used for fixing the whole main cable strand dispersing structure. The main cable strand dispersing structure has the advantages of both a splay saddle and a splay sleeve. A single space cable strand can be dispersed at different angles in the transverse and vertical directions, and cable strands on the same column in the main cable can be anchored on a stiffening beam anchorage face in the same row, so that the vertical size of the anchorage face is reduced, anchorage is achieved by means of bridge transverse width so that the height of the stiffening beam can be reduced, main cable strands in the cable saddle can be easily and conveniently constructed, the installation precision of the cable strands can be controlled, and the main cable strand dispersing structure can be applicable to the large-span anchorage type suspension bridge and has high economic benefits.

The invention discloses a main cable splay saddle for a self-anchorage suspension bridge. The main cable splay saddle comprises a lower saddle body, an upper saddle cover, a clamping cover and a base plate. A plurality of partition plates are arranged in guide slot ways in a rear saddle body of the lower saddle body and used for separating main cable strands in different columns. The upper saddle cover and the rear saddle body form a cable strand dispersing section, and the main cable strands are vertically arranged. The upper saddle cover and a middle saddle body form a cavity section. The shape that the main cable is in circular transition in a clamping section and the cable strands in the cable strand dispersing section are vertically arranged is ensured. The clamping cover and a front saddle body form the clamping section, and clamping force and anti-slid frictional resistance are provided. The base plate is fixed to the lower portion of the lower saddle body and used for fixing the whole main cable strand dispersing structure. The main cable strand dispersing structure has the advantages of both the splay saddle and a splay sleeve. A single space cable strand can be dispersed at different angles in the transverse and vertical directions, and the cable strands on the same column in the main cable can be anchored on a stiffening beam anchorage face in the same row, so that the vertical size of the anchorage face is reduced, anchorage is achieved by means of bridge transverse width so that the height of the stiffening beam can be reduced, main cable strands in the cable saddle can be easily and conveniently constructed, the installation precision of the cable strands can be controlled, and the main cable splay saddle can be applicable to the large-span anchorage type suspension bridge and has high economic benefits.

The invention provides a wafer calibration device and semiconductor processing equipment. The wafer calibration device comprises a vacuum chamber, a load bearing member, a rotating mechanism, a light source and a light receiving and processing device, wherein the load bearing member is arranged in the vacuum chamber, and comprises a load bearing surface used for bearing a wafer; the rotating mechanism is used for driving the load bearing member to rotate; the light source is arranged above the load bearing member and used for transmitting light towards the edge of the load bearing surface; the light receiving and processing device comprises a light receiving assembly, and is used for receiving the light, converting the light into electric signals and sending out the electric signals; and the light receiving assembly is arranged below the load bearing surface in the vacuum chamber, and is located close to the position of the load bearing surface. The wafer calibration device provided by the invention can shorten the length of a transition area, thereby not only being capable of reducing the implementation difficulty of software and the hardware cost, but also being capable of reducing requirements for the installation accuracy and the calibration accuracy, and thus being capable of reducing the production cost.