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135results about How to "Speed up gas flow" patented technology

Substrate support system for reduced autodoping and backside deposition

A substrate support system comprises a relatively thin circular substrate holder having a plurality of passages extending between top and bottom surfaces thereof. The substrate holder includes a single substrate support ledge or a plurality of substrate support spacer vanes configured to support a peripheral portion of the substrate backside so that a thin gap is formed between the substrate and the substrate holder. The vanes can be angled to resist backside deposition of reactant gases as the substrate holder is rotated. A hollow support member provides support to an underside of the substrate holder. The hollow support member is configured to convey gas (e.g., inert gas or cleaning gas) upward into one or more of the passages of the substrate holder. The upwardly conveyed gas flows into the gap between the substrate and the substrate holder. Depending upon the embodiment of the invention, the gas in the gap can then flow either (1) outward and upward around the substrate edge or (2) downward through passages of the substrate holder, if any, that do not lead back into the hollow support member. The gas that flows outward and upward around the substrate edge inhibits backside deposition of reactant gases above the substrate. The gas that flows downward through the passages that do not lead back to the support member advantageously inhibits autodoping by sweeping out-diffused dopant atoms away from the substrate front side. In one embodiment, the support member comprises a hollow multi-armed support spider that conveys gas into selected ones of the passages. In another embodiment, the support member comprises a bowl- or cup-shaped structure that conveys gas upward into all of the passages. In yet another embodiment, the support member comprises a bowl- or cup-shaped structure that conveys gas upward into all but one or more of the passages.
Owner:ASM IP HLDG BV

Apparatus for producing graphene and other 2D materials

A 2D material such as graphene is produced on a forming sheet disposed on a carrier and exposed to a donor gas within a furnace. A first furnace surface is disposed immediately adjacent to and spaced apart from the forming sheet to define a volume. A purge gas is used to purge the volume of undesirable molecules, such as oxygen, and then a donor gas is introduced into the volume to supply an element or molecule necessary for the formation of a 2D material. Multiple carriers and forming sheets are moved in a train into the furnace during the presence of the donor gas, and each forming sheet is heated to a temperature sufficient to form 2D material on the sheet. The furnace is constructed of a nonreactive material, such as quartz, and the first furnace surface is provided by a quartz plate. Gas passageways and gas ports are formed in the quartz plate with the ports extending through the first furnace surface. The ports are disposed in patterns that facilitate the production of a smooth nonturbulent laminar flow of gas within the volume. As gases are introduced into the furnace, the gases are constrained but they escape and are collected by a surrounding gas chamber. Undesirable gases are purged and desirable gases are maintained in both the furnace and the gas chamber.
Owner:GENERAL GRAPHENE CORP

Garbage drying and pyrolyzing method

The invention discloses a garbage drying and pyrolyzing method. The method comprises the following steps that pyrolytic garbage is poured into a feeding hopper, the garbage enters an extrusion cylinder, a driving motor is started to drive an extrusion rotating shaft to rotate, the garbage moves rightwards under the action of a spiral blade, the garbage is extruded through the inner wall of the extrusion cylinder to discharge water, sewage drips into a sewage tank and is discharged from a sewage outlet, and the garbage enters a crushing box from a first discharging opening; a crushing motor isstarted to drive a first crushing shaft and a second crushing shaft to rotate, crushing blades on the crushing shafts crush the garbage, and the crushed garbage enters a drying box; and a first heating plate, a second heating plate and a fan are started to dry the garbage in the drying box, generated gas enters a dust removal water tank from an exhaust pipe, an electric valve at the bottom of thedrying box is opened, and the dried garbage is discharged into a pyrolyzing furnace. According to the method, the moisture content in the garbage is greatly reduced, the pyrolysis speed of the garbagein the pyrolyzing furnace is increased, residues are reduced, and generated gas does not contain a large amount of incineration particles.
Owner:济南鸿泰华丰机械有限公司
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