The application discloses a high-entropy AlCrNbSiTi composite hard
coating with high
toughness and a preparation method thereof. The composite hard
coating has a gradient layer structure and is composed of an
adhesion barrier layer and a tough layer which are sequentially deposited on a substrate by an arc
ion plating method. The
adhesion barrier layer is a pure Cr layer, and the tough layer is an AlCrNbSiTi layer. The AlCrNbSiTi layer has a
composite structure in which nanocrystals and amorphous phases coexist. The AlCrNbSiTi composite hard
coating with high
hardness, high
toughness, excellent high-temperature stability and high film-substrate adhesion can be flexibly designed and prepared according to requirements, so as to meet the required performance of
cutting tools, precision molds and wear-resistant parts. The prepared coating has good adhesion and high
deposition rate, the performance and production efficiency of the coating are improved, the production cost is reduced, and it is also possible to prepare a relatively thick functional coating.