The invention provides a pre-diffusion sheet for a passivation contact structure. The pre-diffusion sheet comprises a passivation contact matrix and a doping pre-diffusion layer, wherein the doping pre-diffusion layer is combined with a surface of the passivation contact matrix, a part of doing substance of the doping pre-diffusion layer is diffused and enters different depths in the surface of the passivation contact matrix, and the square resistance of the passivation contact structure with the doping pre-diffusion layer is larger than 90 ohms per square. By pre-diffusion, certain surface doping is formed on the surface of the passivation contact matrix, an energy band is bent on the surface to a certain extent, the carrier selectivity and the transmission capability are improved, the contact resistance is reduced, the thickness requirement of tunneling amorphous silicon, tunneling silicon oxide or other passivation tunneling layers is also reduced, meanwhile, the doping concentration dependence on doping amorphous silicon is also reduced, the excessive dependence on a work function of a new material is reduced, and the battery yield is improved.