The utility model discloses a flow regulation type
gas supply device, which belongs to the technical field of chemical equipment and comprises a cabinet. A main
pipe is fixedly mounted at the top of the cabinet, a plurality of
branch pipes are fixedly mounted on the bottom side of the main
pipe, a flow valve is arranged on each
branch pipe, and a flow meter is arranged at the discharging end of the main pipe; a bracket is fixedly mounted at the bottom in the cabinet; a plurality of self-calibration fixing mechanisms are arranged on the bracket; and a plurality of anti-leakage automatic connecting mechanisms are arranged at the inner top of the cabinet. The gas cylinders are limited and fixed through the self-calibration fixing mechanisms, the leakage-proof automatic connecting mechanisms are started to be connected with the gas cylinders, the gas cylinders can supply
fluorine to the main pipe through the
branch pipes, and the gas cylinders can be connected with the main pipe in parallel through the leakage-proof automatic connecting mechanisms to achieve synchronous supply of
fluorine. The
fluorine flow of a single
gas cylinder is controlled through a flow valve; when fluorine of a single
gas cylinder is completely consumed and needs to be replaced, the reading of the flowmeter is kept stable by adjusting the fluorine flow of other gas cylinders.