This invention belongs to the technical field of thin film
drying equipment, and relates to a thin film
drying device and method. The thin film
drying device includes a substrate conveying
assembly and an air-knife film drying
assembly. The substrate conveying
assembly conveys the substrate, and the air-knife film drying assembly dries the wet film on the
substrate surface. The air-knife film drying assembly includes an inlet / outlet section, a control section, an air outlet section, an
air velocity sensing system, and an
air velocity control system. The control section has a control duct and multiple control components. Each control component includes an air valve and a drive component. The air valve is disposed within the control duct, and the drive component controls the rotation of the air valve to adjust the
airflow angle and
air velocity at the inlet / outlet. The air velocity
sensing system and the air velocity
control system are interconnected to monitor the air velocity at the air outlet. The air velocity
control system controls the control components based on the monitoring
signal from the air velocity
sensing system to adjust the rotation angle of the air valve within the control duct. This invention reduces the
impact of
airflow on wet film formation, reduces film formation defects, and improves film quality.