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103 results about "Micromonas micros" patented technology

Micromonas (Peptostreptococcus) micros is frequently associated with periodontal disease as well as respiratory, gastrointestinal and female genitourinary tract infections, but only rarely has been reported as a pathogenic agent of prosthetic joint infections.

Miniature microphone with balanced termination

The present invention provides a miniature MEMS microphone comprising a single-ended transducer element connected to an amplifier providing a differential electrical output at terminals arranged at a substantially plane exterior surface. The differential or balanced output signal provides a miniature microphone exhibiting a high dynamic range and a reduced susceptibility to EMI. The microphone is adapted for surface mounting thus the extra output terminal required is still suitable for low cost mass production. In preferred embodiments the transducer element and amplifier are silicon-based. The microphone may have a plurality of separate single-ended transducer elements connected to separate amplifiers providing separate differential outputs. The microphones according to the invention are advantageous for applications within for example hearing aids and mobile equipment.
Owner:TDK CORPARATION

Cellular communication device with integral headset retraction assembly

A cellular communication phone with integral headset retraction device is provided. The headset retraction device is integrally molded to a lower portion of the rear side of the phone. The headset retraction device includes a housing which serves to store a cable reel having a cable retracting mechanism and an electrical conducting cable. The electrical conducting cable includes a micro-sized microphone connected between an audio receiver earpiece and an auxiliary plug connector. An auxiliary plug storage receptacle is provided in order to prevent free suspension of the auxiliary plug connector. A cable guidance column is provided to aid in directing the electrical conducting cable into the retraction housing when being wound therein. An earpiece retention jacket is disclosed for supporting the audio receiver earpiece.
Owner:TAYLOR CHAD DYLAN

Elastomeric shield for miniature microphones

An elastic shield comprising an acoustic channel having a sound inlet and a sound outlet, and a hollow portion being adapted to at least partly surround a miniature microphone, or alternatively, arranged to follow an outer contour of a miniature microphone. The present invention further relates to a miniature microphone assembly comprising a miniature microphone having a sound inlet, and an elastic shield comprising an acoustic channel having a sound inlet and a sound outlet, the elastic shield further comprising a hollow portion housing at least part of the miniature microphone in a manner so that the sound outlet of the acoustic channel is aligned with the sound inlet of the miniature microphone.
Owner:TDK CORPARATION

Wearable computer system and modes of operating the system

A wearable computer system has a user interface with at least an audio-only mode of operating, and that is natural in appearance and facilitates natural interactions with the system and the user's surroundings. The wearable computer system may retrieve information from the user's voice or surroundings using a passive user interface. The audio-only user interface for the wearable computer system may include two audio receivers and a single output device, such as a speaker, that provides audio data directly to the user. The two audio receivers may be miniature microphones that collaborate to input audio signals from the user's surroundings while also accurately inputting voice commands from the user. Additionally, the user may enter natural voice commands to the wearable computer system in a manner that blends in with the natural phrases and terminology spoken by the user.
Owner:ACCENTURE GLOBAL SERVICES LTD

Capacitor micro microphone chip

The invention discloses a microphone chip of a capacitor micro-microphone, the capacitor micro-microphone is obtained by orderly defining and forming a disengaging layer, a first electrode layer, a diaphragm layer and a sacrifice layer on a substrate by a semiconductor manufacturing process and a micro-electromechanics technology, then continuing defining a second electrode layer and a strengthening layer, etching and caverning the sacrifice layer through using sound hole images formed correspondingly to the second electrode layer and the strengthening layer to form air gaps, forming the capacitor micro-microphone connected with a substrate, and finally etching and removing the disengaging layer by a disengaging technology so that the capacitor micro-microphone is disengaged from the substrate. Because the method adopts the semiconductor manufacturing process and the micro-electromechanics technology, the capacitor micro-microphone is manufactured without a cutting process, the volume of the capacitor micro-microphone can be accurately reduced, the good rate of the manufacturing process is increased, and the substrate can be reclaimed and reused so as to reduce material cost.
Owner:TAIWAN CAROL ELECTRONICS

Microfabricated microphone

The present invention provides a microfabricated microphone that can mitigate negative effects caused by residual stress in its sensing diaphragm. In particular, a center-supported diaphragm is provided to allow residual stress to relax through the radial expansion or contraction of the diaphragm. The diaphragm is suspended by an anchor that is attached to a supporting beam. The supporting beam is situated in between one or more sections of a back-plate electrode. The supporting beam is mechanically and electrically separated from the back-plate electrode. Various mechanical dimensions of the aforementioned components are also disclosed to optimize performance of a microfabricated microphone in different operational conditions. Further, a method and system for fabricating a microfabricated microphone with a center-supported diaphragm is also disclosed.
Owner:CASE WESTERN RESERVE UNIV

Device and method for detecting concentration of human respiration marking gas on line by laser absorption spectroscopy technology

InactiveCN104198433ADoes not bring detectabilityNo embarrassmentColor/spectral properties measurementsData acquisitionBottle
The invention discloses a device and a method for detecting the concentration of human respiration marking gas on line by a laser absorption spectroscopy technology. The device is characterized in that a laser temperature control plate and a laser current control plate are used for controlling a DFB (distributed feedback) laser device; a signal generator is used for generating sawtooth waves and sine waves; laser with the specific absorption wavelength is output by the laser device and collimated by an optical fiber collimator, enters a light-sound gas pool, and is reflected for multiple times by two high-reflectivity concave mirrors to interact with gas to be detected; a light-sound signal detected by a microphone is transmitted to a front amplifier, enters a phase-lock amplifier and is finally acquired and processed by a computer and a data acquisition card. The method is characterized in that a tester blows air into a vapor drying bottle through a respiration air nozzle to remove vapor and the air enters the light-sound gas pool, and an air pressure control pump, a temperature detection meter and a pressure detection meter are used for controlling the pressure in the pool and acquiring the temperature and the pressure for inverse concentration calibration. The device is unique in design and novel in structure; the in-situ online detection is performed, the complexity of other detection technologies is avoided, and the detection precision is improved.
Owner:HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI

Frequency following response signal test system

ActiveCN102973277AImprove the efficiency of extracting FFR signalImprove signal-to-noise ratioAudiometeringSensorsData acquisitionEngineering
The invention relates to a frequency following response signal test system. The system is characterized by comprising a computer, a data acquisition (D / A) card, a multichannel A / D acquisition card, a miniature speaker, a miniature microphone, a pre-amplifier, body surface optical disk electrodes, a high input-impedance stage, a bioelectricity amplifier and earplugs. An acoustic meatus sound pressure monitoring module and a frequency following response signal extraction testing module are arranged inside the computer. The acoustic meatus sound pressure monitoring module is used for collecting and recording sound pressure signals inside acoustic meatuses, and off-line analyzing and processing collected sound pressure signals, namely comparing the collected sound pressure signals with the preset judging criteria, and getting rid of signal sections which disagree with acoustic meatus normal sound pressure. A frequency following response signal test platform is used for collecting FFR signals and off-line analyzing and processing collected FFR signals, namely pre-screening and processing the FFR signals which correspond to acoustic meatus normal sound pressure signal segments, and extracting and displaying the FFR signals of a tester are finished. The frequency following response signal test system can be widely applied to the detection of the FFR signals.
Owner:TSINGHUA UNIV

Comb sense microphone

There is provided a rigid hinged substrate, which forms a diaphragm for miniature microphones. A series of fingers disposed radially around the perimeter of the diaphragm interacts with mating fingers disposed adjacent the diaphragm with a small gap in between. The fingers are interdigitated. The movement of the diaphragm fingers relative to the fixed fingers varies the capacitance, thereby allowing creation of an electrical signal responsive to varying sound pressure at the diaphragm. Because the fingers may be formed with great stiffness, the classic problem in typical capacitive microphones of attraction of the diaphragm to the back plate is effectively overcome. The multiple fingers allow the creation of a microphone having a high output voltage relative to conventional microphones. This yields a very low noise microphone. The diaphragm may be readily formed using well known silicon microfabrication techniques so as to reduce manufacturing costs.
Owner:RES FOUND OF THE STATE THE

Miniature microphone having shielding construction and manufacturing method for circuit board frame

The invention discloses a minitype microphone with a shielding structure, which takes breadboard material as protection frame and arranges a metal shielding layer inside the breadboard frame, an insulation layer is arranged on the surface of the metal shielding layer, a plane extending part is arranged at one end or two of the metal shielding layer, and the end surface of the insulation layer is at least partly covered by the extending part. With simple manufacture and fine product performance, the plane extending part which is arranged at one end or two of the metal shielding layer can ensure the insulating layer not to easily fall off, and ensure the product reliability. In addition, the minitype microphone of the invention also provides a low cost and simple preparing method for the breadboard frame of the minitype microphone with the shielding structure.
Owner:WEIFANG GOERTEK MICROELECTRONICS CO LTD

Pretreatment system for strengthening directional voice at front end of electronic cochlear implant

InactiveCN101807404AMeet the needs of small volumeEasy to useSpeech analysisBandpass filteringTreatment field
The invention relates to a directional voice strengthening system at the front end of an electronic cochlear implant, belonging to the human physiological signal treatment field. The invention is characterized in that the directional voice strengthening system at the front end of an electronic cochlear implant comprises a microphone array, an A / D circuit, a power supply circuit and a ripple steady voltage conditioning circuit, wherein the microphone array consists of two TP type mini-sized microphone modules; the A / D circuit consists of a preamplifier circuit, a band-pass filter circuit, a back stage amplifying circuit and a USB external sound card; and the power supply circuit respectively supplies power for the whole system chip and the microphones. The invention uses the closely-spaced TP mini-sized microphone modules simultaneously comprising omnidirectional and directional collection to strengthen the voice at the front end of the electronic cochlear implant and be used for researching algorithms of improving speech discrimination score.
Owner:TSINGHUA UNIV

Method for gradient flow source localization and signal separation

A method of separating and localizing sources of traveling waves, by obtaining linearly independent time-differentiated instantaneous observations of the sources, from spatial derivatives of the traveling wave acquired using a distributed sensor or a sensor array. The sources are blindly separated by direct application of (static) independent component analysis on the time-differentiated observations, yielding both the sources and their direction cosines relative to the sensor geometry. The method is suited for arrays of small aperture, with dimensions shorter than the coherence length of the waves. In one preferred embodiment, three sources are separated and localized from differential observations on four coplanar sensors positioned on the corners of a square. Applications include miniature microphone arrays for intelligent hearing aids with adaptive suppression of interfering signals and nonstationary noise, and integrated RF arrays for resolving or localizing multiple users or channels from a base station or mobile unit.
Owner:THE JOHN HOPKINS UNIV SCHOOL OF MEDICINE

Intelligent bullet-proof helmet for sensing multiple parameters

The invention discloses an intelligent bullet-proof helmet for sensing multiple parameters, and the intelligent bullet-proof helmet comprises a bullet-proof helmet, a positioning module, a communication processing module, a noxious gas detection sensor, a micro display, an earphone, a microphone and a rechargeable battery, wherein the positioning module is provided with a main processor, a positioning chip, a tri-axial accelerometer, a three-axis gyroscope, a magnetic sensor and a pressure sensor; the probe of the noxious gas detection sensor is arranged outside the front part of the bullet-proof helmet, the microphone is arranged below the left side or the right side of the brim of the bullet-proof helmet through a flexible pipe, the micro display is arranged along the lower side of the front part of the brim of the bullet-proof helmet through the flexible pipe, and the earphone and the bullet-proof helmet are connected by wires. The intelligent bullet-proof helmet is precisely tracked and positioned to detect at any time whether noxious gas on the site and real-time data timely uploaded exist, besides the intelligent bullet-proof helmet can in real time contact with teammates to timely obtain instructions and helps from a command center, and effectively protect the user's head.
Owner:WUHAN FINEMEMS

Miniature microphone manufacturing method based on Si-Si bonding process

The invention relates to a miniature microphone manufacturing method based on an Si-Si bonding process, which comprises the following steps that: a. a connecting plate and a back plate are provided; b. the back plate and the connecting plate are bonded and fixed; c. the back plate is thinned; d. an insulating bonding layer is grown on the thinned back plate; e. a substrate is provided; f. an insulating supporting layer is grown on the substrate; g. a vibrating diaphragm is precipitated on the substrate; h. the vibrating diaphragm which is arranged in a groove is obtained; i. the back plate and the substrate are bonded and fixed; j. the connecting plate and an oxidization layer above the substrate are etched; k. a lower electrode hole is obtained on the back plate; l. an electrode layer isprecipitated on the back plate; m. electrodes on the back plate and the vibrating diaphragm are obtained; n. a plurality of sound holes on the back plate are obtained; and o. the other end of the substrate which corresponds to the back plate is etched to obtain a vocal cavity below the vibrating diaphragm. The miniature microphone manufacturing method based on the Si-Si bonding process has the advantages of high sensitivity, low cost, wide frequency band, high finished product rate and simple manufacturing process.
Owner:无锡芯感智半导体有限公司

Remote monitoring system and remote monitoring method with door alarm and real-time voice response functions

The invention relates to a remote monitoring system and a remote monitoring method with door alarm and real-time voice response functions. The remote monitoring system and the remote monitoring method are technically characterized in that after an abnormal condition of an attending field is discovered, alarm information is transmitted, and one of voice record groups is played in real time to respond to the abnormal condition according to different environment and time conditions. The remote monitoring system comprises a field attending end, a wireless router and a remote attending end, the field attending end comprises a single chip microcomputer, a power module, a vibration sensor, a voice sensor, a miniature camera, a miniature microphone, an electronic doorbell, a wireless communication module, a memory and a real-time response module. The remote monitoring method includes that the field attending end detects an abnormal condition of a door; the remote attending end controls functions of the field attending end; and the real-time voice response function is started to respond to the abnormal condition after the abnormal condition occurs, so that precious time is obtained for the remote attending end to intervene in the field to process the abnormal condition. The remote monitoring system and the remote monitoring method can be widely used for places such as houses, shops, small enterprises and storehouses which need to be remotely monitored in an unattended manner.
Owner:秦方

Advertising machine

InactiveCN106023863AFacilitate artificial intelligence servicesAI service developmentAdvertisingDisplay deviceLoudspeaker
The invention provides an advertising machine. The advertising machine at least comprises a tiny microphone, a voice recognition module, a displayer, a loudspeaker, a decibel detector and a volume adaptive module; the voice recognition module is connected with the tiny microphone and the displayer, and the volume adaptive module is connected with the decibel detector and the loudspeaker. According to the advertising machine, a displayed page of the advertising machine is played adaptively by sensing keywords of the surroundings, and therefore development of an artificial intelligent service of the advertising machine can be promoted. In addition, the advertising machine adaptively and automatically changes the volume of displaying of the advertising machine by sensing the decibels of sounds of the surroundings, and development of the artificial intelligent service of the advertising machine is further promoted.
Owner:李大宁

Sound intensity estimation sound source orientation method applicable for minitype microphone array

The invention discloses a sound intensity estimation sound source orientation method applicable for a minitype microphone array. The method comprises steps of estimating time-frequency graphs of construction directions of all time-frequency points according to sparse characteristics of voice signals and performing local standard deviation evaluation for constant direction estimation values corresponding to selected time sequence blocks by use of sliding windows; then performing tow-value masking processing for the time sequence points according to set local standard deviation threshold parameter values; then, performing re-arrangement for the filtered time sequence points and performing secondary local standard deviation estimation and threshold judgment; and at last, carrying out summation average for constant sound intensity in all directions corresponding to time sequence points satisfying conditions and obtaining estimation values of azimuth angles. Compared to the prior art, the method is provided higher robustness for reverberation and noise and estimation precision of the azimuth angles are higher.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Auditory sensitivity detection system based on stimulus frequency otoacoustic emission

The invention relates to an auditory sensitivity detection system based on stimulus frequency otoacoustic emission. The detection system comprises an audio card, an acoustic sensor, a computer and a signal feedback device; an input end of a micro loudspeaker is connected with the audio card, an output end of a micro microphone is connected with the audio card, and the signal feedback device is connected with the computer; an auditory sensitivity comprehensive detection system is arranged in the computer, a test execution system comprises an intensity sensitivity detection module based on SFOAEs and a frequency sensitivity detection module based on SFOAEs, and the intensity sensitivity detection module based on SFOAEs is used for determining auditory intensity threshold values correspondingto corresponding frequency points by detecting stimulus frequency otoacoustic emission detection data at all the frequency points; the frequency sensitivity detection module based on SFOAEs is used for extracting a stimulus frequency otoacoustic emission inhibition tuning curve at a designated frequency point and determining the frequency sensitivity at the designated frequency point.
Owner:TSINGHUA UNIV

Miniature microphone testing device

The invention provides a miniature microphone testing device, which comprises a testing probe group, a power supply, a channel selection switch, a current detection device and an embedded control unit, wherein the testing probe group comprises at least one peripheral probe used for being connected with a shell of a miniature microphone and a plurality of inner ring probes used for being connected with a circuit board of the miniature microphone, and the channel selection switch is connected with the inner ring probes and is used for being communicated with one of the inner ring probes according to a control instruction of the embedded control unit to form a testing circuit; the current detection device is used for detecting the current of the testing circuit; and the embedded control unit is used for setting bias voltage, controlling the channel selection switch to be communicated with the testing circuit and analyzing the current of the testing circuit. With the device, the miniature microphone can be effectively tested automatically, and the testing efficiency and accuracy can be improved.
Owner:GOERTEK INC

Sound source directional sensing device with deep sub-wavelength size

ActiveCN105158729AOrientation is precise and sensitiveNo distractionDirection findersSound sourcesRigid core
The invention discloses a sound source directional sensing device with deep sub-wavelength size. The sensing device is of a core-shell structure, the core is a rigid core, the shell is an acoustic super surface, a microphone is installed at the core-shell interface, the acoustic super surface comprises a plurality of folding slots distributed uniformly on the circumference, the folding slots are opened at one end away from the core and closed at the other end close to the core, and a ray defined by the center of the core and the center of the microphone penetrates through one of the openings by using the center of the core as a starting point. A bipolar morphology echo wall resonance mode formed under the interaction of the closed acoustic super surface and the incident plane wave intensity is skillfully utilized in the sound source directional sensing device with deep sub-wavelength size, so that a far-field sound source can be accurately and sensitively directed, and the sensing device does not produce obvious interference to the measured sound field and can form effective concealed protection.
Owner:NANJING UNIV

Miniature stylish noise and wind canceling microphone housing, providing enchanced speech recognition performance for wirless headsets

A miniature microphone enclosure is provided for use with a wireless headset. The microphone enclosure provides superior noise and wind cancellation without any circuitry. Two sound ports and wind suppression material help minimize any noise attributable to wind or air. Moreover the microphone enclosure has a directivity such that the microphone does not have to be placed directly in front of a user's mouth.
Owner:ANDREA DOUGLAS +2

Miniature microphone capacitance test method

ActiveCN103888885AEliminate the effects ofEliminate product quality misjudgmentsElectrical apparatusCapacitanceMicromonas micros
The invention discloses a miniature microphone capacitance test method. The method comprises the steps that in the process of conducting quality detecting to a target miniature microphone, and the contact situation of a positive probe which is connected with a positive bonding pad in a contacted mode is determined through a current test loop; according to the specific contact situation of the positive probe, capacitance value of the target miniature microphone is acquired through a capacitance test loop, the quality situation is judged through comparing the capacitance value with the corresponding acceptable range value of the capacitance under the positive probe contact situation, various situations possibly occurring in the miniature microphone testing process are detailed, influence of wire to wire capacitance on the capacitance test result can be eliminated, the product quality misjudgment made by an embedded control module to the target miniature microphone caused by the wire to wire capacitance is eliminated, and measurement accuracy is improved.
Owner:WEIFANG GOERTEK MICROELECTRONICS CO LTD

Sound source direction identification method based on mini microphone array

InactiveCN106886010AImprove robustnessHigh azimuth recognition accuracyPosition fixationFeature vectorSound sources
The invention discloses a sound source direction identification method based on a mini microphone array. Firstly, based on a four-array element difference array, the sound intensity of each time frequency point of each direction component is calculated, and the sound intensity of each time frequency point is subjected to phase transformation weighting. Then, the time frequency points of each direction component are subjected to sum-average operation and weighted characteristic vectors are subjected to normalization processing. Then according to the sound intensity characteristics of a three-array element orthogonal array, the sound intensity is calculated through sub-arrays, and proper characteristic vectors are constructed. Finally, a least square support vector is used for performing training and testing to obtain a sound source azimuth identification result. Compared with the prior art, the method can extract characteristic vectors with better robustness in high reverberation environments, is free of influences of speech characteristics, and is higher in error-tolerant rate and higher in orientation identification precision.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Hand-held portable hearing screening apparatus utilized otoacoustic emissions

InactiveCN1827040ASimple hardware circuitConvenience and Simplification of ControlEar treatmentAudiometeringLiquid crystallineHand held
There is a handholding portable acoustic emission screening examination appearance, which belongs to medical service appearance field. It contains a micro probe composed of a micro loudspeaker that is used to broadcast stimulation sound, a micro microphone that is used to distill acoustic emission signal and a electronic label that is used to probe information and protect product property through key management; A simulation manipulation part composed of micro loudspeaker volume regulating circuit, signal filtering treating circuit and signal multiple-stage enlargement circuit; A data processing part composed of digital-to-analog conversion circuit that is used to sample the distilled acoustic emission signal, high-speed data processing CMOS chip that is used to engender stimulation sound and control management menu, acoustic data storage, program storage and liquid crystalline display storage, RS232 asynchronous expansion serial port, USB interface, JTAG interface, etc. externally input / output and conjunction interfaces; And a keyboard used to display liquid crystalline display screen and input information. This invention is convenient to use, it has small bulk and is facilitating to take.
Owner:SHANGHAI JIAO TONG UNIV

Miniature non-directional microphone

A miniature microphone comprising a diaphragm compliantly suspended over an enclosed air volume having a vent port is provided, wherein an effective stiffness of the diaphragm with respect to displacement by acoustic vibrations is controlled principally by the enclosed air volume and the port. The microphone may be formed using silicon microfabrication techniques and has sensitivity to sound pressure substantially unrelated to the size of the diaphragm over a broad range of realistic sizes. The diaphragm is rotatively suspend for movement through an arc in response to acoustic vibrations, for example by beams or tabs, and has a surrounding perimeter slit separating the diaphragm from its support structure. The air volume behind the diaphragm provides a restoring spring force for the diaphragm. The microphone's sensitivity is related to the air volume, perimeter slit, and stiffness of the diaphragm and its mechanical supports, and not the area of the diaphragm.
Owner:THE RES FOUND OF STATE UNIV OF NEW YORK

Automobile scratch monitoring device based on vibration

The invention discloses an automobile scratch monitoring device based on vibration. The automobile scratch monitoring device comprises a vibration sensor, a control unit, a camera, a storage medium and a battery pack, wherein the vibration sensor is installed on an automobile and used for detecting the vibration condition of the surface of the automobile, the control unit is arranged in the automobile, the camera is installed in the automobile and used for taking pictures when the surface of the automobile is scratched, the storage medium is connected with the camera and used for storing the pictures taken by the camera, and the battery pack is connected with the control unit and supplies power to the control unit. The vibration sensor is connected with the input end of the control unit. The output end of the control unit is connected with the camera and controls work of the camera. The control unit and the storage medium are installed in the automobile. The vibration sensor is a miniature microphone. The automobile scratch monitoring device is simple in structure, reasonable in design, good in use effect, capable of effectively solving the problem that automobile owners do not know when the automobile is scratched in the prior art, small in size, light in weight, high in precision and capable of monitoring the time of occurrence of scratching.
Owner:XIAN JINHE OPTICAL TECH

Intelligent door lock control system

The invention discloses an intelligent door lock control system, belongs to the technical field for control of door lock.The intelligent door lock control system comprises intelligent controller and intelligent door lock system. The intelligent controller is connected with intelligent door lock system through wireless connection. The intelligent door lock system comprises wireless communication module, miniature infrared camera, internal sensor module, data processing module, RF card reader, electronic numeric keyboard, actuating mechanism, locking mechanism, microphone and micro-speaker. The internal sensor module comprises magnetic door switch, key inserting sensor, electric quantity sensor and human body inductive sensor. The actuating mechanism comprises lock cylinder and motor. The data processing module is used for receiving password input orders sent by intelligent controller, miniature infrared camera, RF card reader, electronic numeric keyboard. The invention is convenient to operate,safe. By applying combined setting unlocking method and type of notice,different security levels can be set for the door lock, thus guarantee the security of the intelligent door lock.
Owner:重庆物联利浪科技有限公司

Microfabricated microphone

The present invention provides a microfabricated microphone that can mitigate negative effects caused by residual stress in its sensing diaphragm. In particular, a center-supported diaphragm is provided to allow residual stress to relax through the radial expansion or contraction of the diaphragm. The diaphragm is suspended by an anchor that is attached to a supporting beam. The supporting beam is situated in between one or more sections of a back-plate electrode. The supporting beam is mechanically and electrically separated from the back-plate electrode. Various mechanical dimensions of the aforementioned components are also disclosed to optimize performance of a microfabricated microphone in different operational conditions. Further, a method and system for fabricating a microfabricated microphone with a center-supported diaphragm is also disclosed.
Owner:CASE WESTERN RESERVE UNIV
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