The invention discloses an NBTI degradation model obtaining method based on nonuniform distribution interface traps. The method comprises the steps that 1, interface trap distributions in different zone of an MOS device are divided to obtain total distribution frame of the interface traps; 2, according to geometric construction, the interface trap distribution density in each zone is calculated, and the total density of the nonuniform distribution interface traps is obtained; 3, threshold voltage deviation caused by NBTI is obtained according to the deltaNIT total density, and an NBTI degradation model based on geometric construction analysis is obtained. The actual distribution situation of the interface traps produced by an NBTI effect is incorporated in the model, accordingly the total density of interface trap charges produced in the MOS device can be accurately calculated, thus a threshold voltage degradation model is obtained, few fitting parameters are required, the applicability is wide, and the model provides more accurate precision for device reliability.