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31 results about "Threshold voltage degradation" patented technology

Bias voltage temperature instability detection circuit and detection method

The invention provides bias voltage temperature instability detection circuit and detection method. The bias voltage temperature instability detection circuit comprises an odd number of fundamental oscillation units. Each fundamental oscillation unit comprises a first transistor, a second transistor, a first control transistor, a second control transistor, an input end and an output end. The detection circuit further comprises third transistors which are located between adjacent fundamental oscillation units. The fundamental oscillation units and the third transistors are connected in series to form an annular oscillator. According to the embodiment of the invention, the bias voltage temperature instability detection circuit can respectively detect the degree of threshold voltage degradation, which is caused by negative bias voltage temperature instability, of a PMOS transistor and the degree of threshold voltage degradation, which is caused by positive bias voltage temperature instability, of an NMOS transistor; by using the third transistors, the degree of threshold voltage degradation, which is caused by bias voltage temperature instability, of an MOS transistor can be amplified; and the final detection result is sensitive and the detection precision is high.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Threshold voltage degradation measuring circuit

The invention relates to the technical field of integrated circuits and provides a threshold voltage degradation measuring circuit. The circuit comprises two MOS (Metal Oxide Semiconductor) tubes which are connected in series, wherein the first MOS tube is a detected tube; a grid electrode of the first MOS tube is connected with first direct-current voltage, a source electrode and a substrate of the first MOS tube are simultaneously connected with source electrode voltage, and a drain electrode of the first MOS tube is connected with an output end; a grid electrode and a drain electrode of the second MOS tube are simultaneously connected with second direct-current voltage, and a source electrode and a substrate of the second MOS tube are simultaneously connected with the output end. According to the scheme disclosed by the invention, the threshold voltage degradation measuring circuit with a simple structure is provided; the circuit only comprises the two MOS tubes which are connected in series and the threshold voltage degradation condition of the tube to be detected can be directly measured by only measuring the voltage change of the output end; and the circuit only relates to the obtaining of one physical amount and does not need to carry out secondary process and analysis, so that the technical scheme has the advantages of simple structure, convenience for operation, time-saving property, accurate and direct results and easiness in implementation.
Owner:PEKING UNIV

Threshold voltage degradation measuring circuit

The invention relates to the technical field of integrated circuits and provides a threshold voltage degradation measuring circuit. The circuit comprises two MOS (Metal Oxide Semiconductor) tubes which are connected in series, wherein the first MOS tube is a detected tube; a grid electrode of the first MOS tube is connected with first direct-current voltage, a source electrode and a substrate of the first MOS tube are simultaneously connected with source electrode voltage, and a drain electrode of the first MOS tube is connected with an output end; a grid electrode and a drain electrode of the second MOS tube are simultaneously connected with second direct-current voltage, and a source electrode and a substrate of the second MOS tube are simultaneously connected with the output end. According to the scheme disclosed by the invention, the threshold voltage degradation measuring circuit with a simple structure is provided; the circuit only comprises the two MOS tubes which are connected in series and the threshold voltage degradation condition of the tube to be detected can be directly measured by only measuring the voltage change of the output end; and the circuit only relates to the obtaining of one physical amount and does not need to carry out secondary process and analysis, so that the technical scheme has the advantages of simple structure, convenience for operation, time-saving property, accurate and direct results and easiness in implementation.
Owner:PEKING UNIV

Method for forming NMOS (N-channel Metal Oxide Semiconductor) transistor

The invention provides a method for forming an NMOS (N-channel Metal Oxide Semiconductor) transistor. The method comprises the following steps of: providing a substrate and a grid structure located on the substrate; taking the grid structure as a mask to carry out ion implantation on the substrate, and forming a source area and a drain area in the substrate at the both sides of the grid structure; forming a stopping layer on the exposed surfaces of the substrate and the grid structure; forming a stress layer on the stopping layer, wherein the stopping layer is used for preventing hydrogen elements used in the forming environment of the stress layer from entering the source area and the drain area; carrying out heat treatment on the source area and the drain area; and removing the stopping layer and the strain layer. According to the method disclosed by the invention, the compact stopping layer is formed on the surfaces of the substrate and the grid structure before the stress layer is formed, so as to prevent the hydrogen elements used in the forming environment of the stress layer from entering the source area / drain area in the substrate. Therefore, the problem of descending of threshold voltage, caused when the diffusion of doped ions in the source area / drain area is enhanced by the hydrogen elements, is solved, the reliability of the threshold voltage is improved, and the property reliability of the NMOS transistor is further improved.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP

Manufacturing method of STI (shallow trench insulation)

The invention provides a manufacturing method of STI (shallow trench insulation). The method comprises the following steps: firstly growing an LO (lining oxide) on the surface of a shallow trench which is formed in a substrate through etching, and then carrying out primary boron element doping and secondary nitrogen element doping on the LO; forming a first barrier layer with boron ion concentration which is 1-2 orders of magnitude higher than a P well at the part, adjacent to the substrate region, of the LO; forming a second barrier layer above the first barrier layer; and finally, depositing silicon oxide in the shallow trench, carrying out CMP(chemical mechanical polishing) and STI annealing, thus forming the STI. The manufacturing method provided by the invention utilizes the second barrier layer to block boron ions in the first barrier layer so as to keep the concentration of the boron ions in the first barrier layer; the concentration of the boron ions in the first barrier layer is higher than the P well, in a follow-up P well annealing process, and the first barrier layer can be used for effectively preventing the boron ions in the P well from passing through the LO so as to diffuse into the STI; and the concentration of the boron ions injected into the P well is kept, and the performance of an NMOS (N-channel mental-oxide-semiconductor) device is prevented from being influenced by the degression of a threshold voltage caused by the reduction of the concentration of the boron ions.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1

Manufacturing method of NROM and device thereof

The invention discloses a manufacturing method of an NROM and a device thereof. The method comprises the following steps of: forming a source electrode and a drain electrode below a working surface of a semiconductor substrate; etching a chute on the semiconductor substrate between the source electrode and the drain electrode, and infusing silicon ion on the chute section of the semiconductor substrate so as to ensure non-crystallization of the semiconductor substrate on the surface of the chute; forming an ONO insulation layer on the surfaces of the semiconductor substrate, the source electrode and the drain electrode, wherein the ONO insulation layer is projected corresponding to the section of the chute and is inlayed in the chute of the semiconductor substrate; and forming a control grid on the surface of the ONO insulation layer between the source electrode and the drain electrode. Compared with the NROM device with reduced size in equal proportion, the NROM device during operation relatively lengthens the effective chute and solves all kinds of problems resulting from reducing the length of the chute, such as declination of the threshold voltage of the device, higher leakage current and interference generated between two locations.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Manufacturing method of NROM and device thereof

The invention discloses a manufacturing method of an NROM and a device thereof. The method comprises the following steps of: forming a source electrode and a drain electrode below a working surface of a semiconductor substrate; etching a chute on the semiconductor substrate between the source electrode and the drain electrode, and infusing silicon ion on the chute section of the semiconductor substrate so as to ensure non-crystallization of the semiconductor substrate on the surface of the chute; forming an ONO insulation layer on the surfaces of the semiconductor substrate, the source electrode and the drain electrode, wherein the ONO insulation layer is projected corresponding to the section of the chute and is inlayed in the chute of the semiconductor substrate; and forming a control grid on the surface of the ONO insulation layer between the source electrode and the drain electrode. Compared with the NROM device with reduced size in equal proportion, the NROM device during operation relatively lengthens the effective chute and solves all kinds of problems resulting from reducing the length of the chute, such as declination of the threshold voltage of the device, higher leakagecurrent and interference generated between two locations.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Thin film transistor, preparation method thereof, array substrate, display panel and device

The invention belongs to the technical field of display and discloses a thin film transistor, a preparation method thereof, an array substrate, a display panel and a display device. The thin film transistor comprises a substrate, as well as an active layer and a source-drain electrode which are sequentially stacked on the substrate; and the projection of a source electrode in the source-drain electrode on the substrate is overlapped with the projection of part of the edge of the active layer on the substrate. According to the thin film transistor, the illumination-receiving area of the activelayer is small, so that the generation of holes can be effectively reduced, the concentration of photon-generated carriers under an illumination condition is reduced, and therefore, the defect statessuch as hole capture probability increase and threshold voltage reduction, of the TFT working in a high-temperature illumination environment are avoided, and the performance of the TFT device in the high-temperature illumination environment is improved. When the thin film transistor is applied to the display panel, the working performance of the display product in a high-temperature environment can be improved, and the reliability of the display product is enhanced.
Owner:HEFEI XINSHENG OPTOELECTRONICS TECH CO LTD +1
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