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44 results about "Light dose" patented technology

Process and apparatus for the formation of patterns in a photoresist by continuous laser irradiation, application to the production of microtips emissive cathode electron sources and flat display screens

Process and apparatus for the formation of patterns in a photosensitive resin layer or photoresist by continuous laser irradiation, application to the production of microtip emissive cathode electron sources and flat display screens. Formation takes place of non-mutually interfering elementary light beams (41), there is at least one relative translation at constant light power and speed of said beams with respect to the layer in order to irradiate lines thereof, each line receiving a light dose lower than that necessary for the development of the resin, a relative rotation of all the beams with respect to the layer takes place, the translation is recommenced in order to irradiate other lines, each line receiving a light dose complimentary to the preceding dose and the resin is developed.
Owner:COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet Light Dosing

Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
Owner:ASML NETHERLANDS BV

Improvements in and relating to controlling characteristics of photosynthetic organisms

A light dosing system for promoting preferred characteristics in plants, the light dosing system configured to direct light onto a target area upon which the plant resides, the light dosing system including one or more light emitters positioned above the target area, a means for controlling one or more characteristics of the light emitted by the light emitters, a conveyor configured to alter the relative positions of the light emitters and the target area, and a lighting controller configured to read a media having a predefined dosage regime stored thereon for promoting the preferred characteristics of the plant, characterized in that the lighting controller is configured to alter one or more characteristics of the light emitted by the, or each, of the one or more light emitters onto the target area in accordance with the predefined dosage regime.
Owner:BIOLUMIC

Disinfecting conveyor system

A disinfecting conveyor system utilizes ultraviolet light to disinfect a product as it passes through an enclosure on a conveyor. A UV light sensor provides feedback to a control system that can change the amount of UV light exposure, speed of conveyor, and disinfection reaction. A UV light sensor may be a coupled to the conveyor and the UV light intensity and time of exposure within the enclosure may be used to calculate a UV light dose. A user of the system may input a required UV light dose or the type of product to be disinfected and the control system may automatically control the speed of the conveyor and / or the UV light intensity to provide the required UV dose. The system may utilize an air filtration and / or cooling system to provide a flow of clean and cool process air to the enclosure to maintain a temperature that is below a threshold temperature.
Owner:RADIANT IND SOLUTIONS LLC

Lighting dose real-time controlling apparatus in photolithography system

The invention discloses a lighting dose real-time controlling apparatus. The apparatus comprises orderly arranged components along an optical axis, which are: a light source, a lighting system, a mask bench, an object lens, and a workpiece bench. A first light energy detector and a second energy spot sensor are respectively arranged in the lighting system and on the workpiece bench. The apparatus is characterized in that: a third light energy detector is arranged in the light path between the first light energy detector and a second light energy spot sensor. The third light energy detector is used for measuring the lighting dose in real time during exposure. With the apparatus provided by the invention, light intensity between the first light energy detector and a second light energy spot sensor can be measured in real time during exposure, such that a yield is not influenced. The third light energy detector is arranged between the first light energy detector and a second light energy spot sensor, such that an influence of varied optics transmissivities between a first and a third light energy detectors is avoided. Therefore, a complicated transmissivity prediction model is not required. An accurate energy measured on a silicon surface can be obtained through simple reforming. Dose controlling can be carried out upon exposure fields according to the measuring results, such that dose accuracy can be improved.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet Light Dosing

Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
Owner:ASML NETHERLANDS BV

Method of fabricating semiconductor transistor devices with asymmetric extension and/or halo implants

A method of fabricating semiconductor devices begins by providing or fabricating a device structure that includes a semiconductor material and a plurality of gate structures formed overlying the semiconductor material. The method continues by creating light dose extension implants in the semiconductor material by bombarding the device structure with ions at a non-tilted angle relative to an exposed surface of the semiconductor material. During this step, the plurality of gate structures are used as a first implantation mask. The method continues by forming a patterned mask overlying the semiconductor material, the patterned mask being arranged to protect shared drain regions of the semiconductor material and to leave shared source regions of the semiconductor material substantially exposed. Thereafter, the method creates heavy dose extension implants and / or halo implants in the semiconductor material by bombarding the device structure with ions at a tilted angle relative to the exposed surface of the semiconductor material, and toward the plurality of gate structures. During this step, the plurality of gate structures and the patterned mask are used as a second implantation mask.
Owner:ALSEPHINA INNOVATIONS INC

Guided photodynamic therapy

A Photodynamic Therapy (PDT) system with an elongated interventional device (IDV) with a bundle of optical fibers (F1, F2, F3) forming respective light exit ports which can be individually accessed. The bundle has an optical shape sensing fiber (OSS), e.g. including Fiber Bragg Gratings, arranged for sensing position and orientation (P_O) of the light exit ports. A processor executes a control algorithm which generate a light dose signal (LDS) to allow generation of light outputs (LD1, LD2, LD3) to the plurality of optical fibers (F1, F2, F3) accordingly. The control algorithm generates the light dose signal (LDS) in response to the determined position and orientation of the light exit ports (P_O), and three-dimensional body anatomy image information obtained by a first image modality (I1), e.g. X-ray, MRI, CT, ultrasound, or PET-CT. This combination allows precise application of a light dose distribution for PDT treatment of a tumor with a minimal destruction of connective tissue. In embodiments, the control algorithm takes image information regarding distribution of a photo sensitizer in the body tissue (I2) as input. The control algorithm may further take into account image information regarding a concentration of oxygen in the body tissue (I3). Both of such inputs allow a more precise PDT light application.
Owner:KONINKLIJKE PHILIPS ELECTRONICS NV

Pure oxygen- photodynamic composite skin therapeutic instrument

The invention discloses a pure oxygen- photodynamic composite skin therapeutic instrument which comprises a main body, an irradiator and a spiral arm connected between the main body and the irradiator, wherein a light source circuit board is arranged on the irradiator, and a light-emitting element is fixedly arranged on the light source circuit board; and an oxygen spray nozzle unit is further arranged on the irradiator, an oxygen making device is arranged on the main body, and the oxygen spray nozzle unit is connected to the oxygen making device through a pipeline. The tissue oxygen concentration can be increased and the photodynamic therapeutic effect can be significantly improved by adopting a design of the oxygen making device and the oxygen spray nozzle unit; by adopting the design of a light wavelength feedback module and a light dose feedback module, the pure oxygen-photodynamic composite skin therapeutic instrument can ensure that an irradiated region can obtain the same light dose so that the photodynamic therapeutic effect can be improved; and as the light-emitting element is a composite light-emitting diode with three wavelengths, the single wavelength or the two wavelengths or the three wavelengths can be selected for performing combined therapy according to actual needs.
Owner:广州美锐健康产业股份有限公司

Precision photodynamic therapy system

InactiveCN103933671AControl output light intensity distributionMeet light intensity requirementsRadiation therapyTreatment effectSide effect
The invention relates to a precision photodynamic therapy system which comprises an intravenous device use for injecting photosensitizer to the human body and a laser used for the illuminating nevus flammeus lesion portion of the human body. The photodynamic therapy system further comprises a digital micromirror device, a weak light detection system and a computer, wherein the weak light detection system is used for motivating and measuring the fluorescence-emission of the photosensitizer and organization spectrum through ultraviolet, and transmitting the detection information to the computer; the computer is used for calculating the concentration distribution of the photosensitizer in an organization according to the detection information, and generating a control signal for controlling the digital micromirror device; the digital micromirror device is used for adjusting the optical intensity distribution iradiated by the laser on the lesion portion under the control of the computer. By means of the precision photodynamic therapy system, the precision light dose delivery can be achieved, treatment effect is improved, and side effects are reduced.
Owner:TIANJIN UNIV

Photoreactive system and methods for prophylactic treatment of atherosclerosis

The present invention provides a prophylactic light activated treatment method for subjects at risk of a plaque-mediated thrombotic event, such as acute coronary syndromes. In one embodiment, the subject receives a dose of photosensitizer sufficient to result in a concentration of photosensitizer in the neovascularization associated with atherosclerotic disease to permit effective photodynamic therapy. Light of a wavelength that excites the photosensitizer, but that does not to any significant extent penetrate to an adventitial layer of the blood vessel, is applied to the region of the blood vessel. The therapeutic light dose, which may be applied in sequential stages, is sufficient to cause closure of neovasculature leakage and lead to plaque stabilization and reduced adverse clinical outcomes. The present invention further provides light transmission devices and systems useful in carrying out the methods of the present invention.
Owner:LIGHT SCI ONCOLOGY

Optical power therapentic equipment with fluorescence diagnostic function and operation method

A photodynamic therapy device with the function of the fluorescence diagnosis comprises a host and an operating head which is connected with the host. The interior of the host comprises a core control module which controls the operating head. The interior of the operating head aggregates LED array treatment light source, LED array fluorescence excitation light source and an image acquisition module. The host is set into the treatment mode or the diagnosis mode through controlling the open and close of the LED array fluorescence excitation light source and the LED array treatment light source. The host analyzes a fluorescence image which is collected by the image collecting module and issues a cue signal or a control command after the comparison of the analytic data and the presetting data. The photodynamic therapy device has the diagnosis module and the treatment module which can realize the site confirmation of the light scope before the treatment and the individual design of the light dose, the real-time detection of the response in the treatment and the automatic adjustment, the follow-up assessment of the lethal effect and early detection of the residual tumor after the treatment. The photodynamic therapy device also provides an operation method of the photodynamic device with the function of the fluorescent diagnosis.
Owner:深圳市微创医学科技有限公司

Super-resolution imaging method and system by utilizing square lattice structure light illumination

The invention discloses a super-resolution imaging method and system by utilizing square lattice structure light illumination, and the method mainly comprises the following steps: forming a lattice structure light field on a sample plane, and carrying out the phase shift through controlling a light field modulation device; acquiring a fluorescence image illuminated by the lattice structure light;and utilizing a frequency domain reconstruction algorithm to obtain a super-resolution image. Compared with common striped structured light, the square lattice structure light has lower light dose under the same peak intensity, the phototoxicity of the system can be greatly reduced, living cells can be observed for a longer time, and in addition, only phase shift needs to be carried out on the illumination pattern in the imaging process without rotation, so that polarization control in the imaging process is simplified to a great extent, the complexity of the system can be reduced, and the construction cost of the system is effectively reduced.
Owner:XI AN JIAOTONG UNIV

System and method for administering light therapy to curved and large surfaces

A system and method are disclosed that use a flexible guide (flap) and a scanning method to control the delivery of light dose to a treatment area. This approach overcomes the non-reliable delivery of light dose with a flap that conforms to the target area. Dosimetry control can be improved through the use of a computer controlled motor to move the laser fibers at known speed over the target tissue. In some embodiments, treatment time is reduced and illumination of large surfaces is achieved by using multiple fibers to deliver the light simultaneously.
Owner:HEALTH RES INC

Homogeneous creatine kinase chemiluminiscence detection reagent and preparation method thereof

The invention discloses a homogeneous creatine kinase chemiluminiscence detection reagent and a preparation method thereof. The method comprises steps of adopting gold nanoparticles, adding a water-soluble photosensitizer into the gold nanoparticles and acquiring a nanogold-photosensitizer compound, coupling the nanogold-photosensitizer compound with a creatine kinase monoclonal antibody, and generating electrostatic adsorption between the two under the isoelectric point environment condition of the creatine kinase monoclonal antibody through the charge property of the nanogold particles, so that the creatine kinase monoclonal antibody is coupled to the surfaces of the nanogold particles. The homogeneous creatine kinase chemiluminiscence detection reagent is obtained according to the preparation method disclosed by the invention, the utilization rate of the photosensitizer is increased, the production process is simplified, the production cost is reduced, a sandwich method detection principle is adopted to detect a detected object in use, the effective light dose of irradiation is increased, more photosensitizers are activated, a stronger photosensitive effect is generated, the difference between the excitation light wavelength and the emission wavelength is increased, and the detection identification degree is improved.
Owner:ZHEJIANG ZOYUN BIOTECH

Method of timing laser beam pulses to regulate extreme ultraviolet light dosing

Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
Owner:ASML NETHERLANDS BV

System and method for administering light therapy to curved and large surfaces

A system and method are disclosed that use a flexible guide (flap) and a scanning method to control the delivery of light dose to a treatment area. This approach overcomes the non-reliable delivery of light dose with a flap that conforms to the target area. Dosimetry control can be improved through the use of a computer controlled motor to move the laser fibers at known speed over the target tissue. In some embodiments, treatment time is reduced and illumination of large surfaces is achieved by using multiple fibers to deliver the light simultaneously.
Owner:HEALTH RES INC

Therapy method based on photodynamic therapy system, and photodynamic therapy system

The invention discloses a therapy method based on a photodynamic therapy system, and the photodynamic therapy system. The method comprises the following steps of: obtaining a fluorescence image generated when a photosensitizer on a tissue to be treated is irradiated; calculating the fluorescence image according to a fluorescence image processing algorithm, and determining the overexposure area andthe underexposed area of the fluorescence image; analyzing the overexposure area and the underexposed area of the fluorescence image according to a pre-set convolutional neural network model, and determining excitation light doses required by various points of the fluorescence image; and performing therapy by generating the therapy light intensity according to the excitation light doses requiredby various points of the fluorescence image. By implementation of the therapy method based on the photodynamic therapy system, and the photodynamic therapy system in the invention, the fluorescence image, the overexposure area and the underexposed area of which are marked, can be input into the pre-set convolutional neural network model; the excitation light parameters required by various points of the best fluorescence image can be determined and obtained according to output of the pre-set convolutional neural network model; therefore, optimal imaging is obtained by the minimum exposure time;and fluorescent bleach due to the excessive exposure time of the photosensitizer is reduced.
Owner:深圳市光科健康科技有限公司

Controlling characteristics of photosynthetic organisims

A light dosing system for promoting preferred characteristics in plants, the light dosing system configured to direct light onto a target area upon which the plant resides, the light dosing system including one or more light emitters positioned above the target area, a means for controlling one or more characteristics of the light emitted by the light emitters, a conveyor configured to alter the relative positions of the light emitters and the target area, and a lighting controller configured to read a media having a predefined dosage regime stored thereon for promoting the preferred characteristics of the plant, characterized in that the lighting controller is configured to alter one or more characteristics of the light emitted by the, or each, of the one or more light emitters onto the target area in accordance with the predefined dosage regime.
Owner:BIOLUMIC

Implantable systems and methods for UV dose monitoring

An ultra violet (UV) light dose monitoring system may include an implantable microchip for injection below the surface of a person's skin. The microchip may include a solar cell, a data telemetry transmitter, and a first sensor cell that absorbs UV light that passes through the skin. The system may also include a remote reader. The remote reader may include a data telemetry receiver that receives the data from the microchip and a processor for controlling operation of the remote reader. The data telemetry transmitter may transmit data indicative of a UV light intensity for the UV light absorbed by the first sensor cell to the data telemetry receiver, and the processor may calculate a UV dose based on the data.
Owner:VERILY LIFE SCI LLC

Disinfecting conveyor system

A disinfecting conveyor system utilizes ultraviolet light to disinfect a product as it passes through an enclosure on a conveyor. A UV light sensor provides feedback to a control system that can change the amount of UV light exposure, speed of conveyor, and disinfection reaction. A UV light sensor may be a coupled to the conveyor and the UV light intensity and time of exposure within the enclosure may be used to calculate a UV light dose. A user of the system may input a required UV light dose or the type of product to be disinfected and the control system may automatically control the speed of the conveyor and / or the UV light intensity to provide the required UV dose. The system may utilize an air filtration and / or cooling system to provide a flow of clean and cool process air to the enclosure to maintain a temperature that is below a threshold temperature.
Owner:RADIANT IND SOLUTIONS LLC

Homogeneous method heart-type fatty acid binding protein chemiluminiscence detection reagent and preparation method thereof

The invention discloses a homogeneous method heart-type fatty acid binding protein chemiluminiscence detection reagent and a preparation method thereof. The method comprises steps of adopting gold nanoparticles, adding a water-soluble photosensitizer into the gold nanoparticles, acquiring a nanogold-photosensitizer compound, coupling the nanogold-photosensitizer compound with a heart-type fatty acid binding protein monoclonal antibody, generating electrostatic adsorption between the two under the isoelectric point environment condition of the heart-type fatty acid binding protein monoclonal antibody through the charge property of the gold nanoparticles, so that the heart-type fatty acid binding protein monoclonal antibody is coupled to the surfaces of the gold nanoparticles. The homogeneous method heart-type fatty acid binding protein chemiluminiscence detection reagent is obtained according to the preparation method disclosed by the invention; the utilization rate of the photosensitizer is increased, the production process is simplified, the production cost is reduced, a sandwich method detection principle is adopted to detect a detected object in use, the effective light dose ofirradiation is increased, more photosensitizers are activated, a stronger photosensitive effect is generated, the difference between the excitation light wavelength and the emission wavelength is increased, and the detection identification degree is improved.
Owner:ZHEJIANG ZOYUN BIOTECH

Guided photodynamic therapy

A photodynamic therapy (PDT) system includes an elongated interventional device with a bundle of optical fibers forming respective light exit ports which can be individually accessed. The bundle has an optical shape sensing fiber arranged for sensing position and orientation of the light exit ports. A processor is configured to generate a light dose signal to allow generation of light outputs to the optical fibers. The light dose signal is generated in response to the determined position and orientation of the light exit ports, and three-dimensional body anatomy image information obtained by a first image modality. The processor is also configured to take image information regarding distribution of a photo sensitizer in the body tissue as input, as well as take into account image information regarding a concentration of oxygen in the body tissue.
Owner:KONINK PHILIPS ELECTRONICS NV

Thin film transistors with self aligned light dosed resource structure and their manufacture

In the thin film transistor, an active layer includes a channel region, a first doped region, and second doped region. Insulation layer of grid pole formed on the active layer includes at least a central region, a shelter region and an extended region. The central region covers the channel region. The shelter region positioned at periphery of the central region covers first doped region. The extended region is positioned at periphery of the shelter region covers second doped region. A grid layer is formed on grid insulation layer. The grid layer covering the central region exposes the shelter region and the extended region. Thickness of the shelter region of grid insulation layer is thicker than thickness of the extended region of grid insulation layer.
Owner:TPO DISPLAY

Invisible eyeshade

The invention discloses an invisible eyeshade. The invisible eyeshade comprises an eyeshade body and a handle, the eyeshade body and the handle are of an integrated structure made of opaque materials,the eyeshade body is of a curved surface structure capable of being attached to eyeballs, the handle is of an arc-shaped structure and connected to the middle of the eyeshade body, the outer surfaceof the eyeshade body is a reflective surface, and the inner surface and the outer surface of the eyeshade body are both high-finish curved surfaces. According to the present invention, the overall design of the eyeshade is invisible, and the design effectively avoids the influence of the original method (sunglasses and eyeshades) on the light absorption of eyelids and surrounding skin; and the outer side mirror reflective design not only effectively shields the light that enters the eyeball, but also reflects the light so that the eyelid area is irradiated again, which is beneficial to receivea larger light dose.
Owner:上海芬森医疗科技有限公司

Super-resolution imaging method and system using square lattice structured light illumination

The invention discloses a super-resolution imaging method and system using square lattice structure light illumination, which mainly includes the following steps: forming a lattice structure light field on a sample plane, and controlling the light field modulation device to perform phase shift; acquiring the lattice structure Fluorescence images illuminated by structured light; super-resolution images are obtained by using frequency domain reconstruction algorithm; compared with ordinary striped structured light, square lattice structured light has a lower light dose at the same peak intensity, which can greatly reduce the system's Phototoxicity enables longer observation of living cells. In addition, only phase shifting of the illumination pattern is required during imaging, and no rotation is required, which greatly simplifies polarization control during imaging, thus reducing system overhead. complexity, and effectively reduce the construction cost of the system.
Owner:XI AN JIAOTONG UNIV

Homogeneous method troponin chemiluminescence detection reagent and preparation method thereof

The invention discloses a homogeneous method troponin chemiluminiscence detection reagent and a preparation method thereof. The method comprises steps of adopting gold nanoparticles, adding a water-soluble photosensitizer into the gold nanoparticles, acquiring a nanogold-photosensitizer compound, coupling the nanogold-photosensitizer compound with a troponin I monoclonal antibody, generating electrostatic adsorption between the two under the isoelectric point environment condition of the troponin I monoclonal antibody through the charge property of the gold nanoparticles, so that the troponinI monoclonal antibody is coupled to the surfaces of the gold nanoparticles. The troponin chemiluminiscence detection reagent obtained by the preparation method disclosed by the invention is a homogeneous method troponin chemiluminiscence detection reagent; the utilization rate of the photosensitizer is increased, the production process is simplified, the production cost is reduced, a sandwich method detection principle is adopted to detect a detected object in use, the effective light dose of irradiation is increased, more photosensitizers are activated, a stronger photosensitive effect is generated, the difference between the excitation light wavelength and the emission wavelength is increased, and the detection identification degree is improved.
Owner:ZHEJIANG ZOYUN BIOTECH

Control method for light therapy device

A control method for a light therapy device, including steps of: set a light dose range (1-4J / cm2) required by an illuminated portion under a skin surface; calculate an appropriate intensity range outputted by a light source based on the set light dose, an illuminated time, and a proportion of light beam shape variation between the light source and the skin surface; build a corresponding relation between the appropriate intensity range and an ideal illumination range for the skin surface; measure an illumination of the skin surface, and monitor an output light intensity of the light source based on the illumination, ensuring that a light intensity outputted by the light source is a set ideal light intensity whereby, a light dose transmitted from the light therapy device to the illuminated portion could be kept in the set light dose by simply controlling the illumination to be within the set illumination range.
Owner:GCSOL TECH

Method of fabricating semiconductor transistor devices with asymmetric extension and/or halo implants

A method of fabricating semiconductor devices begins by providing or fabricating a device structure that includes a semiconductor material and a plurality of gate structures formed overlying the semiconductor material. The method continues by creating light dose extension implants in the semiconductor material by bombarding the device structure with ions at a non-tilted angle relative to an exposed surface of the semiconductor material. During this step, the plurality of gate structures are used as a first implantation mask. The method continues by forming a patterned mask overlying the semiconductor material, the patterned mask being arranged to protect shared drain regions of the semiconductor material and to leave shared source regions of the semiconductor material substantially exposed. Thereafter, the method creates heavy dose extension implants and / or halo implants in the semiconductor material by bombarding the device structure with ions at a tilted angle relative to the exposed surface of the semiconductor material, and toward the plurality of gate structures. During this step, the plurality of gate structures and the patterned mask are used as a second implantation mask.
Owner:ALSEPHINA INNOVATIONS INC
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