The invention discloses a lighting
dose real-time controlling apparatus. The apparatus comprises orderly arranged components along an
optical axis, which are: a
light source, a
lighting system, a
mask bench, an object lens, and a workpiece bench. A
first light energy
detector and a second energy spot sensor are respectively arranged in the
lighting system and on the workpiece bench. The apparatus is characterized in that: a third
light energy detector is arranged in the light path between the
first light energy
detector and a second
light energy spot sensor. The third
light energy detector is used for measuring the lighting
dose in real time during
exposure. With the apparatus provided by the invention,
light intensity between the
first light energy detector and a second light energy spot sensor can be measured in real time during
exposure, such that a yield is not influenced. The third light energy detector is arranged between the first light energy detector and a second light energy spot sensor, such that an influence of varied
optics transmissivities between a first and a third light energy detectors is avoided. Therefore, a complicated transmissivity prediction model is not required. An accurate energy measured on a
silicon surface can be obtained through simple reforming.
Dose controlling can be carried out upon
exposure fields according to the measuring results, such that
dose accuracy can be improved.