The present application relates to a kind of
zirconium oxide humidity sensor low pressure compensation method, the method includes the following steps, step 1: first need to the current calibration of sensor, ensure the consistency of sensor, the current of sensor in different states is measured and calibrated to target current;Step 2: measure current pressure or
user input current pressure P, standard
atmospheric pressure atm is calculated to obtain
oxygen vector [K,B];Step 3: the coherence of
humidity and
oxygen is analyzed using PLSR
algorithm, and the
principal component regression of PLSR
algorithm is obtained to exist interference parameter, and more parameter is used to fit PLS model coefficient [A,B,C,D,E] with pressure;Step 4:
oxygen concentration and
humidity are calculated by the vector obtained in step 2 and 3;Step 5: in different pressure environment, the same coefficient can also be measured accurately oxygen concentration and humidity;Step 6: when sensor batch changes, only current calibration is needed, and the vector of step 2,3 is also applicable.