The utility model relates to the technical field of
gallium nitride single crystal growth, in particular to a large-size
gallium nitride single crystal HVPE growth reactor. The reactor comprises a furnace chamber and a furnace body; the furnace body comprises a furnace cover, a furnace
barrel, a furnace
chassis and a heater outside the furnace
barrel; a furnace chamber is formed among the furnace cover, the furnace
barrel and the furnace
chassis; a
gallium boat and a substrate support are sequentially arranged in the furnace chamber from top to bottom, the upper end of the gallium boat is connected with the furnace cover, the gallium boat is used for storing gallium and generating
gallium chloride, and the substrate support is connected with the furnace
chassis; a
tail gas pipeline is connected outside the furnace chassis; and an
ammonia gas inlet
pipe is arranged on the furnace cover. An isolation gas
pipe is arranged in the gallium boat, an upper cavity protection sleeve and a lower cavity protection sleeve are arranged on the inner wall of the furnace barrel, and protection gas is introduced between the upper cavity protection sleeve and the inner wall of the furnace barrel. Through the protection effect of gas purging outside the furnace chamber protection sleeve and the upper chamber protection sleeve, parasitic deposition of polycrystalline
gallium nitride on the inner wall of the furnace chamber is avoided, and the service life of the
gallium nitride single crystal HVPE growth reactor is prolonged.