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251results about How to "Light intensity" patented technology

Shutter device for exposure subsystem of photoetching machine

InactiveCN102087476ARealize the photolithography processFast shutter speedPhotomechanical exposure apparatusMicrolithography exposure apparatusMotor driveControl theory
The technical problem to be solved by the invention is to provide a shutter device for an exposure subsystem of a photoetching machine. The shutter device comprises at least one shutter blade, a shutter controller, a position sensor, a bracket and a voice coil motor, wherein the shutter controller is used for controlling opening and closing of the shutter blade; the positioning sensor is coupled with the shutter controller and the shutter blade and provides movement position information of the shutter blade for the shutter controller; the bracket is positioned below the shutter controller and the position sensor and is used for supporting the voice coil motor and the position sensor; the voice coil motor is controlled by the shutter controller to move; the voice coil motor is positioned on the bracket, is coupled with the shutter controller and is controlled by the shutter controller to move; the voice coil motor drives the shutter blade to move so as to form the operation of opening and closing the shutter blade; and the thickness of the shutter blade is 0.5 to 2mm. The shutter device is suitable for a large-dose exposure device. Due to the adoption of the shutter device, a thin photoresist process and a thick photoresist process can be realized simultaneously and on the premise of guaranteeing the speed of a shutter, the service life of the shutter in the high temperature environment is prolonged.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Automobile crossbeam assembly hole visual on-line measurement system and method thereof

The invention provides an automobile crossbeam assembly hole visual on-line measurement system and a method thereof. The system comprises a main control platform, a servo motor, a servo motor encoder, a slide platform, a slide block, a horizontal slide rail, a fixed high and low frame, a camera and a measured crossbeam. A host is arranged on the main control platform. A motion control card and an image acquisition card are respectively inserted in PCI insertion slots of the host. The host is connected with the servo motor through the motion control card. The servo motor encoder is coaxially connected with the servo motor. The servo motor is fixed on the slide platform. The slide platform is matched and connected with the horizontal slide rail through the slide block. The horizontal slide rail is arranged on the high side of the fixed high and low frame. The host is connected with the camera through the image acquisition card. The camera is arranged on the slide platform through a Z type height adjustable bracket. The measured crossbeam is arranged on the low side of the fixed high and low frame. According to the invention, non-contact and full-automatic high speed on-line measurement is carried out on the hole diameter and the hole site size of an automobile crossbeam assembly hole; and the system and the method are especially suitable for the measurement of the crossbeam with nonuniform assembly hole distribution and without assembly holes in certain areas.
Owner:HUBEI UNIV OF TECH
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