2results about How to "Reduce cleaning dead angle" patented technology

The utility model discloses a liquid mixing valve and semiconductor equipment, the liquid mixing valve comprises a liquid mixing pipeline, the liquid mixing pipeline is provided with a process port and a cleaning port, the cleaning port comprises a cleaning liquid input port and a plurality of discharge ports, and the discharge ports are distributed at two sides of the cleaning liquid input port along the length direction of the liquid mixing pipeline; the liquid mixing pipeline comprises a first edge tail end and a second edge tail end in the length direction; the discharge port comprises a first discharge port located at the tail end of the first edge; the second discharge port is located at the tail end of the second edge; the plurality of process pipelines are communicated with the liquid mixing pipeline through process ports and are used for providing or discharging process liquid; the cleaning liquid supply pipeline is communicated with the liquid mixing pipeline through a cleaning liquid input port; and the plurality of discharge pipelines are communicated with the liquid mixing pipeline through discharge ports and are used for discharging the process liquid and the cleaning liquid. By cleaning the liquid supply pipeline and the discharge pipeline, cleaning dead angles are reduced, the problem of solution residue of the liquid mixing valve is solved, the cleaning effect is improved, and the problem of excessive particles in the liquid mixing valve is solved.

The utility model discloses a stainless steel storage tank, including tank body and support mechanism, the tank body top is equipped with the feed inlet, is equipped with the discharge gate in the bottom, and the tank body below is fixed on the support mechanism, the tank body inside is equipped with the stirring shaft, is equipped with a plurality of stirring paddle on the stirring shaft, the stirring shaft upper half is the hollow structure, and the hollow structure penetrates the inside and outside of tank body, still include the spraying mechanism, and the spraying mechanism includes a spraying dish and sprays the pipe, and the spraying dish is installed on the stirring shaft, and is linked with the stirring shaft inside intercommunication, the spraying pipe is connected through a swivel joint and sprays the pipe with the spraying dish and is linked with the hollow structure in the stirring shaft inside intercommunication, be equipped with a plurality of groups different angle's spray orifice on the spraying dish, the utility model discloses utilize the stirring shaft to drive the rotation of spraying dish, make the water flow that spray orifice sprays can dynamic cover more area in the tank body interior, reduce the cleaning dead angle greatly, promote the thoroughness of cleaning.