2results about How to "Reduce position changes" patented technology

The application discloses a chuck assembly and a semiconductor device, relates to the technical field of semiconductor devices, and comprises a chuck and one or more shaft cylinders, wherein the last shaft cylinder of the plurality of shaft cylinders or one shaft cylinder is connected with the chuck, the inside of each shaft cylinder is provided with a central hole, the central hole is provided with a balance mass and an elastic damping piece, and the elastic damping piece is sleeved with the balance mass to form a balance mass-spring-damping system. The chuck assembly is sleeved with the balance mass through the elastic damping piece to form the balance mass-spring-damping system, the balance mass-spring-damping system generates reverse vibration matched with the vibration of the chuck, micro-vibration generated between the disc surface of the chuck and the contact surface of the substrate is inhibited, generation of friction particles is reduced, stability and cleanliness of a core area of a process environment are improved, process quality of a deposited film is improved, and the needs of high-end processes for extremely low defect rate and ultra-high uniformity of the deposited film are met.

This utility model relates to the field of construction engineering technology. It discloses a dust suppression device for construction projects. By setting up a dust suppression device and an auxiliary mechanism, the dust suppression device is used to reduce dust in the environment, and the auxiliary mechanism is used to increase the dust suppression area. This solves the problem that there is no effective device to increase the dust suppression area during construction projects. This deficiency leads to dust filling the indoor construction site, which not only affects the quality of the surrounding environment but also poses a serious threat to the health of construction workers. Traditional dust suppression methods, such as watering and simple spraying equipment, can reduce dust to a certain extent, but their coverage is limited and cannot meet the needs of large-area construction areas. Due to the lack of a device specifically designed to expand the dust suppression area, a large amount of dust is inevitably generated during indoor construction. These dust particles remain suspended in the air for a long time, reducing air quality.