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Semiconductor device manufacturing method

A semiconductor device manufacturing method of the present invention is characterized by comprising, in this order: a MOS structure forming step of forming a gate electrode on a first major surface side of a semiconductor substrate with a gate insulating film interposed therebetween, and then forming an interlayer insulating film so as to cover the gate electrode; a metal layer forming step of forming, over the interlayer insulating film, a metal layer in a state of being connected to the gate electrode; an electron beam irradiating step of irradiating the semiconductor substrate with an electron beam in a state in which the metal layer is at ground potential, to thereby generate a lattice defect in the semiconductor substrate; a metal layer dividing step of dividing the metal layer into aplurality of electrodes; and an anneal processing step of heating the semiconductor substrate to repair the lattice defect in the semiconductor substrate. In a MOSFET according to the present invention, a parasitic internal diode recovery loss can be reduced compared with when the electron beam irradiating step is not implemented, and the semiconductor device manufacturing method provided makes it possible to manufacture a semiconductor device having a VTH characteristic comparable to that when the electron beam irradiating step is not implemented.
Owner:SHINDENGEN ELECTRIC MFG CO LTD
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