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Constant temperature liquid circulating device and method of controlling temperature in the device

To reduce the width of variations in temperature of circulating liquid due to a variation in a heat load of an external device to a low level to stabilize the performance of the external device in a constant temperature liquid circulating device. In a constant temperature liquid circulating device that connects a piping of circulating liquid in an external device between a discharge port and a return port of a conduit for delivering the circulating liquid at a constant temperature by a pump, a flow amount sensor and temperature sensors for detecting discharge temperature (T1) of the circulating liquid from the conduit and the return temperature (T2) of the circulating liquid are provided in the conduit, so that the flow amount and the temperature of the circulating liquid is controlled by a controller according to the heat load of the external device obtained on the basis of the outputs from the temperature sensors. The control is such that when the difference between the discharge temperature and the return temperature is smaller than the preset value, the temperature of the circulating liquid is controlled corresponding to the heat load, and when the temperature difference is larger than the preset value, the temperature of the circulating liquid is controlled corresponding to the heat load by increasing the flow amount of the circulating liquid to the piping of the external device in addition to the temperature control described above.
Owner:SMC CORP
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