The application belongs to the field of ultra-high vacuum, and particularly relates to a new structure of a composite
ion pump, which comprises an
ion pump, a
flange adapter
welding part, an adapter cylinder, a connecting terminal, a lead wire, an insulating
ceramic tube, a connecting column and a NEG pump core, the
flange adapter
welding part comprises a
flange, an adapter and a two-core NEG
electrode plug, the
ion pump adopts an
SKY20L pump, the pump port is replaced by the flange adapter
welding part, the NEG pump core adopts a SaesD400 pump core, the two-
core plug in the flange adapter welding part is pressed together with the lead wire through the connecting terminal, the insulating
ceramic tube passes through the two lead wires and plays an insulating role, the connecting column connects the lead wire and the two plugs of the NEG pump core and is fixed through a countersunk screw, and the NEG
electrode plug is combined on the
ion pump port to integrate the NEG activation and the
ion pump pumping functions. The application solves the problem that a small pumping speed
ion pump is compact in space and inconvenient to increase pumping ports. The application has a simple structure and is convenient to install, and provides a new structure for optimization of the composite ion pump structure.