The application discloses a kind of digital
direct imaging device
exposure pattern position precision compensation method, it is related to
digital imaging technical field, after the technical problem that the
exposure pattern position precision each area is not consistent in prior art
processing is solved;The present application does not need to help complex tool,
exposure substrate is the material commonly used to generate
laser direct imaging device, calibration condition and process are very simple;The alignment camera of the digital
direct imaging device of the present application is a calibrated coordinate
system itself, and the accurate position of the mark pattern in the exposed pattern can be identified, and each position of the exposed pattern can be compensated using different compensation parameters;The present application has low compensation cost, and does not need additional cost to improve and optimize hardware
system by digital compensation method for
CAM pattern;Moreover, compensation is free and flexible, and the
CAM pattern is digitally compensated, and similar transformation, affine transformation and
perspective transformation can be used flexibly according to specific requirements for each subdivided area.