30 results about "Ultra low expansion glass" patented technology

A reflective reticle substantially reduces or eliminates pattern distortion that results from the absorption of EUV radiation while maintaining a reticle thickness consistent with industry standards. The reflective reticle includes a layer of ultra-low expansion (ULE) glass and a substrate of Cordierite having a thermal conductivity substantially larger than that of ULE glass. An aluminum layer is disposed onto a first surface of the ULE glass and a second surface of the ULE glass is polished to be substantially flat and defect-free. The Cordierite substrate can be directly bonded to the aluminum layer using anodic bonding to form the reflective reticle. Alternatively, a first surface of an intermediate Zerodur layer can be bonded to the aluminum layer, and a second aluminum layer can be used to anodically bond the Cordierite substrate to a second surface of the Zerodur layer, thereby forming the reflective reticle.

A method for joining at least two members of a lithographic apparatus is disclosed. The method includes providing a first member, providing a second member, direct-bonding the first member and the second member to form a direct-bond, and anodically bonding the first member and the second member. At least one of the members includes ultra low expansion glass and / or ultra low expansion glass ceramics.

By measuring, for an ultra-low-expansion glass material, the frequency dependence of acoustic velocities and attenuation coefficients of bulk waves (longitudinal waves and shear waves), and the density, its fundamental acoustic properties are revealed, and a standard specimen for use in system calibration is prepared. By an absolute calibration method using the standard specimen, absolute values for both the LSAW and LSSCW velocities are obtained. Moreover, there are obtained relationships for the acoustic properties and the coefficient of thermal expansion to evaluate the coefficient of thermal expansion from the acoustic properties. In case there is a distribution of characteristics due to periodic striae, an accurate acoustic property distribution in the substrate can be ascertained and an evaluation performed, by selecting for the substrate a cutting angle with respect to the striae plane.

The method of making optical fluoride crystal components provide optical components with beneficial final polished transmission surfaces for transmitting below 200 nm wavelengths of light, such as produced by excimer lasers and utilized in optical lithography. The invention utilizes colloidal silica soot in the polishing of optical fluoride crystal surfaces. This colloidal silica soot is a byproduct of chemical vapor deposition processing of fused silica or ultra low expansion glasses. The colloidal silica byproduct is referred to as "soot". Retaining the same physical properties as the parent glass and having a spherical morphology, the colloidal silica soot is an ideal for final polishing applications of optical fluoride crystals, and particularly for optical fluoride crystals such as calcium fluoride which have high transmission levels to below 300 nm light such as produced by excimer lasers. The soot has a large particle size and spherical shape when compared to conventional colloidal or fumed silica.

A high temperature micro-glassblowing process and a novel inverted-wineglass architecture that provides self-aligned stem structures. The fabrication process involves the etching of a fused quartz substrate wafer. A TSG or fused quartz device layer is then bonded onto the fused quartz substrate, creating a trapped air pocket or cavity between the substrate and the TSG device layer. The substrate and TSG device layer 14 are then heated at an extremely high temperature of approximately 1700° C., forming an inverted wineglass structure. Finally, the glassblown structure is cut or etched from the substrate to create a three dimensional wineglass resonator micro-device. The inverted wineglass structure may be used as a high performance resonator for use as a key element in precision clock resonators, dynamic MEMS sensors, and MEMS inertial sensors.

Silica-titania glasses with small temperature variations in coefficient of thermal expansion over a wide range of zero-crossover temperatures and methods for making the glasses. The method includes a cooling protocol with controlled anneals over two different temperature regimes. A higher temperature controlled anneal may occur over a temperature interval from 750° C.-950° C. or a sub-interval thereof. A lower temperature controlled anneal may occur over a temperature interval from 650° C.-875° C. or a sub-interval thereof. The controlled anneals permit independent control over CTE slope and Tzc of silica-titania glasses. The independent control provides CTE slope and Tzc values for silica-titania glasses of fixed composition over ranges heretofore possible only through variations in composition.

The invention relates to an ultra-low-expansion glass-ceramic super-stable treatment method. The invention adopts an air-sealing low conductive high temperature dependent non-metallic box (1). The method comprises the following steps that: an ultra-low-expansion glass-ceramic machining part (2) to be treated is placed in a heat treatment furnace (3), the heat treatment furnace is heated from the room temperature to a temperature ranging from 360 DEG C to 420 DEG C at a rate of 3-5 DEG C / min according to the demand, the temperature is kept for 8-12 hours, then the temperature is reduced at a rate of 0.05-0.2DEG C / min; and when the temperature of the treatment furnace is reduced to 120+ / -20 DEG C, the treatment furnace control system is closed, and the treated machining part is placed in the furnace for 48 hours and then taken out. By adopting the ultra-low-expansion glass-ceramic super-stable treatment method, the internal stress existing in the machining part and the thermal deformation of the machining part can be effectively reduced so that the angle variation is less than 1 second of arc when the temperature changes from -50 DEG C to +100 DEG C; and the linear expansion coefficient of the glass-ceramic is ensured to be superior to 0.5*10<-7> / DEG C and the stabilization efficiency is increased.

Thickness and group index variations in test strip samples of ultra-low expansion glass are made by extracting the strip samples with front and back faces oriented at an acute skew angle to the axis of the boule. The strip samples are positioned the within an interferometric measurement cavity so that a set of subcavities formed by pairings of each of two reference surfaces together with each of the front and back faces of the strip sample which each subcavity having a different optical path length spacing. The skew angle is sized to avoid diffusion effects of striae present in the boule.

The invention provides an ultra-low expansion glass-ceramic for a laser gyroscope and a preparation method thereof, wherein the composition of the ultra-low-expansion glass-ceramic is: SiO2: 56-68%, Al2O3: 21-27%, Li2O: 2~4%, Na2O: 0~1%, K2O: 0~1%, MgO: 0~3%, ZnO: 0~1.5%, P2O5: 4.5~6.8%, TiO2: 1~2.5%, ZrO2: 1 ~2.5%, Sb2O3 / As2O3: 0.5~1.5%; its main crystal phase is β quartz solid solution, the crystal phase content is 70%~85%, the grain size is less than 50nm, and the order of magnitude of thermal expansion coefficient is 10-8. The preparation method includes batching, mixing, melting, homogenization, clarification, glass forming, annealing, and microcrystallization heat treatment; wherein the melting, homogenization, and clarification steps are all carried out at a temperature of 1570 ° C to 1590 ° C; the microcrystallization heat treatment process It is: under the condition that the nucleation rate is 1°C / min and the nucleation temperature is 650-750°C, keep warm for 6-10 hours and then heat up for crystallization, the crystallization rate is 1°C / min, and the crystallization temperature is 750-750°C 850°C, keep warm for 6-10 hours. The bending strength of this product is higher than 170MPa, and the processing roughness is better than that of the spectral transmittance in the 0.6-2μm band, reaching more than 90%; it has good hardness and anti-wear performance.

The invention provides a production line of an ultra-low-expansion microcrystalline glass. The production line of the ultra-low-expansion microcrystalline glass mainly comprises a melting furnace, a forming machine, an annealing furnace, a crystallizing furnace, a conveying device and a rail, wherein the melting furnace, the forming machine, the annealing furnace and the crystallizing furnace are sequentially distributed on one side of the rail; and the conveying device is arranged on the rail and can move among the melting furnace, the forming machine, the annealing furnace and the crystallizing furnace. By adopting the production line of the ultra-low-expansion microcrystalline glass, provided by the invention, high-quality and large-scale microcrystalline glass products can be produced; and the products are specifically suitable for being used for meeting the demand of laser navigation equipment.

A colored glass-ceramic with ultra-low expansion coefficient and high transparency. The basic components of the glass-ceramics are: 65-69% SiO2, 19-20% Al2O3, 3.1-4.2% Li2O, 3 ~4.5% B2O3, 0.1~0.4% Na2O, 0.1~0.4% K2O, 0.3~0.5% MgO, 0.6~1.4% BaO, 0.6~1.4% ZnO, 1.0~1.7% TiO2, 1.0~ 1.3% ZrO2, 0.4-0.8% P2O5, 0.3-0.8% F and 0.02-0.3% CeO2; when the weight of the basic components is 100%, add coloring not exceeding 4% of the total weight of the basic components agent. The colored glass-ceramic of the present invention has high transparency, ultra-low expansion coefficient and can produce products with large size or complex structure.