The invention discloses a
tactile sensor based on TSV switching, and belongs to the technical field of tactile sensors, the
tactile sensor comprises three main body parts of an MEMS device, a TSV device and an ASIC device, and the
tactile sensor is realized through an MEMS-ASIC
wafer level integration method, the electrical intercommunication between the MEMS and the ASIC is realized through TSV switching, the
signal integrity is enhanced, the
electromagnetic interference is reduced, and the tactile sensor can be applied to the field of tactile sensors. And the reliability of the MEMS tactile sensor is improved. Transfer of part of the lead and the Pad is achieved through TSV switching,
signal output and reading of the MEMS tactile sensor are facilitated, meanwhile,
layout design is simplified, and process difficulty is lowered.