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102results about "Material removal/addition" patented technology

Method and system for manufacturing wafer-like slices from a substrate material

The present invention relates to a method and a system for manufacturing wafer-like slices from a body of a substrate material, especially for use in the manufacture of semiconductor devices.
The method comprises providing a slicing device with a cutting wire equipped on its surface with abrasive particles; providing an aqueous cooling and lubricating fluid, said fluid having an ionic strength corresponding to an electrical conductivity of about 30 μS/cm or less; cutting said body with said cutting wire into slices while dispensing said cooling and lubricating fluid into a kerf area where said cutting wire contacts and cuts said body, said cooling and lubricating fluid promoting removal of powdered substrate material from said kerf area resulting in spent fluid; and removing said spent fluid from said cutting device and recovering said powdered substrate material from said spent fluid.
The system comprises a slicing device provided with a cutting wire, said cutting wire being equipped on its surface with abrasive particles, said slicing device comprising a dispensing unit for delivering a cooling and lubricating fluid to a kerf area where said cutting wire contacts and cuts said body; wherein said fluid promotes removal of powdered substrate material from said kerf area resulting in spent cooling and lubricating fluid; a draining unit for removing said spent fluid from said slicing device; and a fluid reclamation device for treating said spent fluid, said reclamation device comprising a first filtering unit for separating and recovering said powdered substrate material from said spent fluid and providing a reusable fluid.
Owner:PALL CORP

Self-adoption multi-oil chamber constant static pressure system with big flow variation range

The invention relates to a self-adoption multi-oil chamber constant static pressure system with a big flow variation range. The self-adoption multi-oil chamber constant static pressure system with the big flow variation range is composed of a variable oil supply module and a quantitative oil supply module or a plurality of quantitative oil supply modules. The variable oil supply module and the quantitative oil supply module are composed of a variable frequency motor, a motor, a metering pump, a one-way valve and an oil filter. An overflow valve is arranged between the variable oil supply module, the quantitative oil supply modules and a multi-point gear oil distributor. A pressure gage and a pressure sensor are arranged between the multi-point gear oil distributor and a work table constant static pressure guide rail. A static pressure oil chamber of the constant static pressure guide rail is provided with a temperature sensor. The variable oil supply module provides minimum flow required by a work table static pressure system and a certain flow range. The flow of the quantitative oil supply module is fixed and the value of the flow of the quantitative oil supply module is no less than flow changing value of the variable oil supply module and is used for expanding the flow variation range of the variable oil supply module. Therefore load bearing and automatic adjustment of a lifting range of the work table when a temperature variation range is large are achieved and reliable and stable rotation precision of the work table is guaranteed.
Owner:WUHAN HEAVY MACHINE TOOL GRP

Method for recovering machining waste by input of energy and machining machine comprising a waste recovery system

The invention relates to implement the sealing, porosity and sweeping functions, combined. For this purpose, the present invention proposes to confine the waste and to suction the waste at the ejection head by means of a sufficiently flexible connection, such as to remain in contact with the machining area. According to an embodiment, a portable machining machine (1) operated by a pressurized jet (112) includes a waste recovery system (5), an injection head (11) which is provided with a nozzle (111) having an axis (A1) that is substantially perpendicular to the surface to be machined (4a) and which is driven by a digitally controlled two-axle guide system, the ejection head (11) being extended by an enclosure (12) to the surface area to be machined (4a). In addition, the enclosure (12) comprises a tubular portion (121) consisting of two walls (12a, 12b) which slide coaxially along the axis (A1) and a double-pivot articulation device (123). The enclosure (12) has a porous annular wall (124) in a plane substantially perpendicular to the axis (A1) of the nozzle (111), said annular wall (124) having sufficient resilience to keep the enclosure (12) in permanent sealing contact with the surface to be machined (4; 4a, 4b).
Owner:JEDO TECH
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