An 
inspection method for detecting a defect in a 
test object. A particulate is generated, then the generated particulate is introduced into a 
test object. Subsequently, light having high 
directivity is emitted such that the light passes in the vicinity of the 
test object to irradiate the particulate discharged from the test object, thereby making the particulate visible. An inspection apparatus for detecting a defect in a test object, including a particulate generating means for generating a particulate, a particulate introducing means for introducing the particulate into a test object, and a light emitting means for emitting light with high 
directivity that passes in the vicinity of the test object and irradiates the particulate discharged from the test object thereby to visualize the particulate. The 
inspection method and apparatus detect a defect of a test object with high sensitivity, permit easier identification and recording of the location of a defect, and shorten an 
inspection time and the time required for the pre-treatment and post-treatment before and after an inspection, or obviate the need for the pre-treatment and post-treatment.