The invention belongs to the technical field of photoetching machines, and particularly relates to a stepping type high-precision photoetching
machine which comprises a
workbench, a
laser device, a
light beam corrector, an energy controller, an energy
detector, a
light beam shape controller and the like. The
laser, the
light beam corrector, the energy controller and the console are arranged outside the closed frame; a
shock absorber is arranged at the bottom of the closed frame; and the energy controller, the light
beam shape controller, the light shielding device, the energy
detector and theenergy controller are located on a same horizontal line and are sequentially arranged from left to right. According to the invention, the
temperature difference among an objective lens, a
mask plate and a
mask table is adjusted in time through a
temperature control device;
frequency conversion is carried out on the
signal in the closed frame through a
tuner; the objective lens is locked or loosened through a
regulator, so that the objective lens can be adjusted, the objective lens is prevented from expanding or contracting under the
irradiation of
laser beams, etched patterns can be accurate,and the effects of rapid
frequency conversion and accurate
etching can be achieved.