The invention belongs to the technical field of photoetching machines, and particularly relates to a stepping type high-precision photoetching 
machine which comprises a 
workbench, a 
laser device, a 
light beam corrector, an energy controller, an energy 
detector, a 
light beam shape controller and the like. The 
laser, the 
light beam corrector, the energy controller and the console are arranged outside the closed frame; a 
shock absorber is arranged at the bottom of the closed frame; and the energy controller, the light 
beam shape controller, the light shielding device, the energy 
detector and theenergy controller are located on a same horizontal line and are sequentially arranged from left to right. According to the invention, the 
temperature difference among an objective lens, a 
mask plate and a 
mask table is adjusted in time through a 
temperature control device; 
frequency conversion is carried out on the 
signal in the closed frame through a 
tuner; the objective lens is locked or loosened through a 
regulator, so that the objective lens can be adjusted, the objective lens is prevented from expanding or contracting under the 
irradiation of 
laser beams, etched patterns can be accurate,and the effects of rapid 
frequency conversion and accurate 
etching can be achieved.