The invention belongs to the technical field of lithography machines, in particular to a step-by-step high-precision lithography machine, which includes a workbench, a laser, a beam corrector, an energy controller, an energy detector, beam shape settings, etc.; a laser, a beam corrector The device, energy controller, and console are set outside the closed frame; the bottom of the closed frame is provided with a shock absorber; the energy detector, light shield, beam shape setting, energy controller, and beam corrector are located on the same horizontal line, and from left to The right is set in turn, etc.; the present invention adjusts the temperature difference between the objective lens, the reticle, and the mask table in time through the temperature control device; the frequency conversion of the signal in the closed frame is made through the tuner; Dead or loose, so that the objective lens can be adjusted, so as to prevent the expansion or contraction of the objective lens under the irradiation of the laser beam, so that the etched pattern can be achieved accurately, so that it can achieve a fast frequency conversion and precise etching Effect.