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37results about How to "Fast frequency conversion" patented technology

Quick acquiring method for multi-frequency-point bioelectrical impedance

The invention discloses a quick acquiring method for multi-frequency-point bioelectrical impedance. A multi-frequency-point composite excitation source Vin is realized based on a DDS (direct digital synthesizer) principle by means of FPGA (field-programmable gate array) programming, the composite excitation source Vin is loaded onto reference resistance Rref and to-be-tested organism electric impedance Zx simultaneously, corresponding amplitudes Ampref and Ampx and phase angles Degref and Degx of the Vref and Vx on frequency points can be acquired accurately by reasonably selecting sampling frequency fs and points N of DFT (digital Fourier transform) and by only performing DFT on the Vref and Vx on the several needed frequency points, and further amplitudes of the to-be-tested organism electric impedance Zx on the frequency points are acquired. The quick acquiring method has the advantages of high impedance acquisition accuracy, small operation amount, high anti-jamming capability, short scanning time and the like.
Owner:HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI

Velocity transducer output signal analog device and method

The invention relates to velocity transducer output signal analog device and method, belonging to the technical field of electronics. Aiming at overcoming the defects of the prior art and in order to enlarge the application range of the velocity transducer output signal analog device, the technical scheme of the invention comprises the following steps of: firstly, receiving an external control command for formulating the signal characteristics to be output by the current velocity transducer by using a main processor module and an external communication interface module; then, generating the amplitude of the current output signal in real time by using a waveform generating module, and acquiring the analog quantity value of the amplitude of the output signal; subsequently, smooth filtering the waveform of the signal through a program controlled filtering module; and finally, amplifying the amplitude of the signal to be output by the current velocity transducer by using a power amplifying module. The technical scheme realizes the analog and the simulation of various velocity transducer output signals, and the invention has the characteristics of high frequency conversion velocity, easy realization, easy replication, low cost, high price-to-performance ratio and the like.
Owner:TRAFFIC CONTROL TECH CO LTD

Broadband low-noise frequency modulation signal source

The invention discloses a broadband low-noise frequency modulation signal source. A high-stability clock module has two clock signals as output, the first clock signal as output is directly connected with the reference clock end of a DDS module, and the second clock signal is connected with the input end of a power divider; the power divider divides the second clock signal into haves and respectively outputs the two haves through two output ends, wherein one half is output to a DDS configuration module; the DDS configuration module outputs a configuration signal to the DDS module, the DDS module, after receiving the configuration signal, generates a frequency modulation signal by use of a phase synthesis and table look-up method and outputs the frequency modulation signal through a waveform output end; the waveform output end is respectively connected with a first phase-locked loop circuit and a second phase-locked loop circuit through a low-noise amplifier; output of the first phase-locked loop circuit is taken as an emission local oscillator; and output of the second phase-locked loop circuit is taken as a receiving local oscillator. The signal source provided by the invention can meet the demands for high linearity and low phase noise of a broadband frequency modulation signal source.
Owner:北京理工雷科电子信息技术有限公司

High-reliability frequency source device

The invention discloses a high-reliability frequency source device, and aims to provide a frequency source device with high reliability, and good long-term and short-term stability. The equipment is implemented through the following technical scheme: two three-in-one antennas and signal amplifiers are adopted by a receiving switching unit and are connected in series to form a 2*3 signal switching matrix; the 2*3 signal switching matrix switches received satellite signals via multichannel receiver chips and a one-out-three switch; the one-out-three switch receives three paths of satellite second signals which can be of a same source or different sources; one path of the satellite second signals selected is fed into a one-to-three power divider; three paths of same-source satellite second signals obtained by power dividing are respectively transmitted to a locking unit so that the input same-source satellite second signals are locked and are respectively output to a signal processing unit A and a signal processing unit B; and the other path of satellite second signals passing through the one-to-three power divider is used for carrying out frequency correction disciplining on a rubidium clock; standard frequency signals are transmitted to a signal processing unit C via a rubidium clock phase locking unit; and thus, three standard frequency signals of the same source are formed and output.
Owner:10TH RES INST OF CETC

Multiplexing delay unit circuit

The invention discloses a multiplexing delay unit circuit, and aims to implement a delay unit circuit with multiplexing function, implement a loop oscillator of different delay unit stages with as low design overhead as possible and acquire multiple oscillator gains. The invention adopts the technical scheme that: the signal input end of a delay unit is connected with an analog switch circuit; and the analog switch circuit consists of a first analog switch K1 and a second analog switch K2, wherein the K1 is connected with a first input signal IN1 under the control of a first control signal C1, the K2 is connected with a second input signal IN2 under the control of a second control signal C2, and the other ends of the K1 and the K2 are connected with the signal input end of the delay unit. The multiplexing delay unit circuit can receive two paths of input; and an oscillator consisting of the multiplexing delay unit circuit can provide multiple gains, and the area and the power consumption overhead of the oscillator are greatly reduced compared with a conventional variable gain oscillator.
Owner:NAT UNIV OF DEFENSE TECH

Frequency shift keying modulation method with configurable carrier frequency and application structure thereof

The invention relates to a frequency shift keying modulation method with configurable carrier frequency and an application structure thereof. A single-chip microcomputer writes preset frequency control words in a frequency register group; a baseband signal controls a multiple-for-one data selector to output the corresponding carrier frequency control word signal to the input end of a synchronization register; according to the different numbers of terminals selected by the data selector controlled by the baseband signal, different carrier frequency numbers and frequency shift keying modulation can be realized. By adopting the method provided by the invention, the carrier frequency value is configurable and can be adjusted according to the specific circumstances of a channel so as to adapt to the character of the channel; and the method has the advantages of stable performance, high precision, fast frequency conversion speed, continuous phase output in the frequency shift and strong anti-interference capacity.
Owner:CHANGZHOU INST OF MECHATRONIC TECH

High-stability combined region time service frequency generation equipment

The invention discloses high-stability combined region time service frequency generation equipment and aims to provide time service frequency generation equipment with high reliability, high length stability and a wide application range. The invention adopts the technical scheme that a receiving switching unit inputs two paths of selected satellite second signals from different sources into a locking unit to carry out frequency locking, two paths of phase-locked standard frequency signals generated by the locking unit and are respectively output to a signal processing unit A and a signal processing unit B; one path of satellite second signal is also used for carrying out frequency correction on a rubidium clock connected in parallel between a three-selection two-open device and a first analog phase-locked loop PLL_A, and one path of standard frequency signal is generated and transmitted to a signal processing unit C; and the signal processing units carry out signal shaping, amplification, shunting and coding on three paths of standard frequency signals from different sources, the obtained signals are subjected to frequency division, output to a far-end time service unit and are converted into optical signals by an optical-electrical converter, and the optical signals are transmitted to an equipment machine room by one or multiple paths of optical fibers and then are converted into electric signals, and the electric signals are transmitted by an antenna so as to complete a clock time service of a receiving end.
Owner:10TH RES INST OF CETC

Method and device for deriving geodetic distance data

A method for extracting geodetic / geodesic distance / ranging information with a signal generator for generating at least two HF modulation frequencies in the MHz- up to the GHz-range requires a system with a system-input, an optical radiation source , at least one target object (3a, 3b) and a receiver (4'') with a system output and an analysis / evaluating electronics. Initially, the system is excited with at least two , especially synthetic, modulation frequencies, preferably a group of discrete modulation frequencies, by applying at least one excitation signal at the system input. At least one system response is picked up at the system output and distance / ranging information is derived from the signal shape of the system response by the analysis electronics. Independent claims are included for (a) a device for carrying out the method, for (b) a geodetic / geodesic measurement instrument, especially a theodolite, for (c) a scanner for three-dimensional image-scanning and for (d) use of the device.
Owner:LEICA GEOSYSTEMS AG

Digital signal generator

The invention discloses a digital signal generator which comprises a keyboard module, a control module, a frequency synthesis module, a low-pass filtering module and a signal output module. The keyboard module is used for selecting waveforms and frequency of output signals, the control module is connected with the keyboard module, the frequency synthesis module is connected with the control module, the low-pass filtering module is connected with the frequency synthesis module, the signal output module is connected with the low-pass filtering module, and the control module is further connected with a display module. The digital signal generator can realize outputting of various waveforms including sine waves, square waves and triangular waves, and is high in accuracy and stability in signal outputting, simple in structure, low in cost and capable of being applied to student laboratories.
Owner:DALIAN UNIV

Output device of different sources of frequencies

The invention discloses an output device of different sources of frequencies, and aims at providing the frequency source device of fast switching, high reliability and accuracy and high length stability. Two paths of satellite second signals, of different sources, are processed by a locking unit to generate two paths of phase-locked standard frequency signals, the two paths of standard frequency signals are output to an amplification output unit A and an amplification output unit B, one path of the signals is provided for a rubidium clock connected, in parallel, between a two-of-three switch and a first analog phase-locked loop PLL_A for frequency calibration, a rubidium clock clean up unit generates one path of standard frequency signals and transmits the path of signals to an amplification output unit c, two clean up oscillators in parallel connection lock signals of themselves in signals which take rubidium clock frequency signals as reference, output signals of the rubidium clock clean up is transmitted to the amplification output unit c, and thus, three paths of standard frequency signals of different sources are output.
Owner:10TH RES INST OF CETC

Automatic frequency conversion method and system for DDR memory controller

The invention discloses an automatic frequency conversion method for a DDR memory controller. A step S10, a DDR memory controller is initialized. A step S20, the DDR memory controller calculates the bandwidth utilization rate u_cal of the DDR SDRAM under the current frequency point Freq_cur in each frequency conversion time interval t_interface. A step S30, the DDR memory controller calculates a frequency conversion step length freq_step, a new value of a frequency conversion time interval t_interval and a new frequency point value Freq_new. A step S40, the DDR memory controller takes the highest frequency point Freq_max and the lowest frequency point Freq_min as an upper limit and a lower limit respectively to adjust the new frequency point value Freq_new. A step S50, the DDR memory controller initiates or does not initiate hardware frequency conversion on the DDR SDRAM according to the new frequency point value Freq_new, and updates the last frequency conversion state last_fc. A stepS60, the DDR memory controller updates the frequency conversion time interval t_interface as a new value, and returns to the step S20. The method provides a method for realizing automatic frequency conversion of the DDR SDRAM in a hardware form.
Owner:ASR MICROELECTRONICS CO LTD

Novel noise signal generator

ActiveCN102684606AWaveform is simple and convenientWaveform frequency is simple and convenientNoise generationAutomatic controlSignal processing circuits
The invention relates to a novel noise signal generator, which belongs to the technical field of a signal generator and aims at solving the technical problems to provide the novel noise signal generator with the advantages that conventional signals and noise signals can be generated, in addition, the frequency of output signals is stable, the range is wide, and the resolution is high. The novel noise signal generator has the technical scheme that the novel noise signal generator comprises a signal generating circuit and a signal processing circuit, wherein the signal output ends a1 and a2 of the signal generating circuit are respectively connected with the signal input ends b1 and b2 of the signal processing circuit, and the signal output ends of the signal processing circuit are c1 and c2. The novel noise signal generator is applied to the relevant fields of automatic control, scientific tests, electronic circuits and the like.
Owner:TAIYUAN UNIV OF TECH +2

Ultra-wideband sweep-frequency pulse power detecting device and method

The invention provides an ultra-wideband sweep-frequency pulse power detecting device and method. No requirement on the bandwidth in the pulse of the to-be-measured pulse signal is needed; and measurement of the radar signal pulse power in an ultra-wideband high-power range from an L waveband to an X waveband is realized. The invention provides a plan of frequency conversion of a C-band signal andan X-band signal by using a local oscillator source, so that the circuit devices are reduced and the costs are lowered; and simple and unified controlling of the local oscillator signal frequency isrealized. Besides, a main control unit is used for controlling the frequency of a local oscillator signal according to the central frequency of a detected signal and a C-band signal or the X-band signal can be mixed to be at an L band or S band in a narrow range of the local oscillator signal, so that the requirement on the local oscillator source is reduced, more types of local oscillator sourcesare provided, and the device cost is lowered.
Owner:BEIJING AEROSPACE MEASUREMENT & CONTROL TECH

A Broadband Low Noise FM Signal Source

The invention discloses a broadband low-noise frequency modulation signal source. A high-stability clock module has two clock signals as output, the first clock signal as output is directly connected with the reference clock end of a DDS module, and the second clock signal is connected with the input end of a power divider; the power divider divides the second clock signal into haves and respectively outputs the two haves through two output ends, wherein one half is output to a DDS configuration module; the DDS configuration module outputs a configuration signal to the DDS module, the DDS module, after receiving the configuration signal, generates a frequency modulation signal by use of a phase synthesis and table look-up method and outputs the frequency modulation signal through a waveform output end; the waveform output end is respectively connected with a first phase-locked loop circuit and a second phase-locked loop circuit through a low-noise amplifier; output of the first phase-locked loop circuit is taken as an emission local oscillator; and output of the second phase-locked loop circuit is taken as a receiving local oscillator. The signal source provided by the invention can meet the demands for high linearity and low phase noise of a broadband frequency modulation signal source.
Owner:北京理工雷科电子信息技术有限公司

Noise Waveform Signal Generator

The invention provides a noise waveform signal generating device and belongs to the technical field of signal generators. The invention aims to provide the noise waveform signal generating device which can generate conventional signals and noise signals and has output signals with stable stability, wide range and high resolution ratio. With the adoption of the technical scheme, the noise waveform signal generating device comprises a single chip microcomputer, a D / A (Digital / Analogue) conversion module and a signal processing module; a signal output end of the single chip microcomputer is connected with the D / A conversion module; a signal output end of the D / A conversion module is connected with signal input ends a1 and a2 of the signal processing module; and signal output ends of the signal processing module are b1 and b2; and the single chip microcomputer is further connected with a keyboard and a display screen. The noise waveform signal generating device is applied to relevant fields of automatic control, scientific tests, electronic circuits and the like.
Owner:TAIYUAN UNIV OF TECH +2

High reliability frequency source equipment

The invention discloses a high-reliability frequency source device, and aims to provide a frequency source device with high reliability, and good long-term and short-term stability. The equipment is implemented through the following technical scheme: two three-in-one antennas and signal amplifiers are adopted by a receiving switching unit and are connected in series to form a 2*3 signal switching matrix; the 2*3 signal switching matrix switches received satellite signals via multichannel receiver chips and a one-out-three switch; the one-out-three switch receives three paths of satellite second signals which can be of a same source or different sources; one path of the satellite second signals selected is fed into a one-to-three power divider; three paths of same-source satellite second signals obtained by power dividing are respectively transmitted to a locking unit so that the input same-source satellite second signals are locked and are respectively output to a signal processing unit A and a signal processing unit B; and the other path of satellite second signals passing through the one-to-three power divider is used for carrying out frequency correction disciplining on a rubidium clock; standard frequency signals are transmitted to a signal processing unit C via a rubidium clock phase locking unit; and thus, three standard frequency signals of the same source are formed and output.
Owner:10TH RES INST OF CETC

A method and system for parallel transmission of multi-channel carrier optical signals

The invention discloses a method and a system of parallel emission of multichannel carrier light signals. The system drives a direct numerical frequency synthesizer chip to generate a square signal through intellectualized control of a control terminal, wherein frequency and phase positions of the square signal are continuous and controllable, and the system outputs the square signal to control a light emitting diode (LED) to flicker in fixed frequency. During the working process of the LED, an LED drive module and an optical feedback module act together and enable the LED to output carrier light signals which are stable in power in long power mode, the optical feedback module feeds received LED power instability fluctuation back by using a photovoltaic conversion diode and restrains power fluctuation by being combined with the LED drive module, and furthermore the multichannel carrier light signals which are controllable in frequency and phase position are generated by arranging a multichannel square signal generator and an LED module in parallel. The whole system is intelligent and controllable, high in integration level, low in power consumption, stable and reliable in work, and wide in application scope, can be extended in multiple channels, and is an integrated carrier light generating system.
Owner:INST OF AUTOMATION CHINESE ACAD OF SCI

High Stability Combination Area Timing Frequency Generation Equipment

The invention discloses high-stability combined region time service frequency generation equipment and aims to provide time service frequency generation equipment with high reliability, high length stability and a wide application range. The invention adopts the technical scheme that a receiving switching unit inputs two paths of selected satellite second signals from different sources into a locking unit to carry out frequency locking, two paths of phase-locked standard frequency signals generated by the locking unit and are respectively output to a signal processing unit A and a signal processing unit B; one path of satellite second signal is also used for carrying out frequency correction on a rubidium clock connected in parallel between a three-selection two-open device and a first analog phase-locked loop PLL_A, and one path of standard frequency signal is generated and transmitted to a signal processing unit C; and the signal processing units carry out signal shaping, amplification, shunting and coding on three paths of standard frequency signals from different sources, the obtained signals are subjected to frequency division, output to a far-end time service unit and are converted into optical signals by an optical-electrical converter, and the optical signals are transmitted to an equipment machine room by one or multiple paths of optical fibers and then are converted into electric signals, and the electric signals are transmitted by an antenna so as to complete a clock time service of a receiving end.
Owner:10TH RES INST OF CETC

A method for fast acquisition of multi-frequency point bioelectrical impedance

The invention discloses a quick acquiring method for multi-frequency-point bioelectrical impedance. A multi-frequency-point composite excitation source Vin is realized based on a DDS (direct digital synthesizer) principle by means of FPGA (field-programmable gate array) programming, the composite excitation source Vin is loaded onto reference resistance Rref and to-be-tested organism electric impedance Zx simultaneously, corresponding amplitudes Ampref and Ampx and phase angles Degref and Degx of the Vref and Vx on frequency points can be acquired accurately by reasonably selecting sampling frequency fs and points N of DFT (digital Fourier transform) and by only performing DFT on the Vref and Vx on the several needed frequency points, and further amplitudes of the to-be-tested organism electric impedance Zx on the frequency points are acquired. The quick acquiring method has the advantages of high impedance acquisition accuracy, small operation amount, high anti-jamming capability, short scanning time and the like.
Owner:HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI

An ultra-wideband frequency sweep pulse power detection device and method

The invention provides an ultra-wideband sweep-frequency pulse power detecting device and method. No requirement on the bandwidth in the pulse of the to-be-measured pulse signal is needed; and measurement of the radar signal pulse power in an ultra-wideband high-power range from an L waveband to an X waveband is realized. The invention provides a plan of frequency conversion of a C-band signal andan X-band signal by using a local oscillator source, so that the circuit devices are reduced and the costs are lowered; and simple and unified controlling of the local oscillator signal frequency isrealized. Besides, a main control unit is used for controlling the frequency of a local oscillator signal according to the central frequency of a detected signal and a C-band signal or the X-band signal can be mixed to be at an L band or S band in a narrow range of the local oscillator signal, so that the requirement on the local oscillator source is reduced, more types of local oscillator sourcesare provided, and the device cost is lowered.
Owner:BEIJING AEROSPACE MEASUREMENT & CONTROL TECH

Frequency synthesizer and method for receiving ultra-short wave and microwave frequency band wireless signals

InactiveCN110399008AReal-time monitoring of internal temperatureIncrease loadHardware monitoringTransmissionAnti jammingRandom frequency hopping
The invention discloses a frequency synthesizer for receiving ultra-short wave and microwave frequency band wireless signals. The frequency synthesizer comprises a frequency synthesizer body and a DDSunit. The DDS unit comprises a DDS chip, and the output end of the DDS chip is electrically connected with the input end of a phase accumulator through a wire. The invention relates to the technicalfield of frequency synthesizers and discloses a frequency synthesizer and a method for receiving ultra-short wave and microwave frequency band wireless signals. According to the invention, the frequency synthesizer designed by matching a field programmable gate array (FPGA) technology with a direct digital frequency synthesis (DDS) technology is adopted. The required frequency control word can bequickly obtained. The overall performance of the synthesizer is greatly improved. Pseudo-random numbers are generated through the FPGA main control module. The random frequency hopping of the frequency synthesizer can be accurately achieved. The frequency synthesizer has the advantages of being high in frequency conversion speed, high in frequency resolution, high in anti-jamming capability and the like. Meanwhile, the output frequency range of the frequency synthesizer is greatly widened, and the use requirements of actual users can be met.
Owner:WUHAN XINCHENGXIN TECH CO LTD

Amplitude-controllable RF transmission source system

The invention relates to an amplitude-controllable RF transmission source system comprising a direct digital frequency synthesizer, an RF amplifier, a digitally controlled attenuator and a video follower which are in signal connection successively, wherein the direct digital frequency synthesizer and the digitally controlled attenuator are both connected with a microcontroller; and the direct digital frequency synthesizer is also connected to an constant-temperature crystal oscillator. The amplitude-controllable RF transmission source system ensures the stability and accuracy of RF signal output by the constant-temperature crystal oscillator, can realize the advantages of fast frequency conversion, high resolution, high spectrum purity and a wide frequency output range by using the directdigital frequency synthesizer, reduces temperature drift, and achieves a wide frequency output range, amplitude-adjustable frequency, and high-precision and high-stability RF signal output.
Owner:成都意科科技有限责任公司

S-band segmented multi-ary chirp modulation wireless communication system and communication method thereof

InactiveCN105656494BEnhanced ability to resist spot frequency interferenceFast frequency conversionTransmissionLocal oscillator signalFrequency spectrum
The present invention relates to a kind of S-band segmented multi-ary system chirp modulation wireless communication system, comprising a transmitter and a receiver, and the receiver receives a transmission signal from the transmitter; the transmitter includes an FPGA, a system clock, a high-speed DDS unit, a radio frequency Local oscillator unit, mixer, power amplifier, antenna; FPGA drives high-speed DDS unit to generate chirp coded signal, RF local oscillator unit generates local oscillator signal, chirp coded signal and local oscillator signal are mixed by mixer, and mixed Frequency processing moves the spectrum of the chirp coded signal to the 2-4GHz frequency band, and sends it to the power amplifier for amplification after frequency mixing processing, and the amplified signal is transmitted by the antenna; FPGA, according to the user-defined data requirements, performs coding and selects the transmission bandwidth and frequency band interval; user-defined data includes digital system, encoding bandwidth, encoding segmentation interval and transmitting frequency band; system clock provides clock frequency for high-speed DDS unit and FPGA.
Owner:嘉兴国电通新能源科技有限公司 +1

Acousto-optic driver base on direct digital synthesis technology

The present invention relates to an acousto-optic driver based on the technology of Direct Digital Synthesis (DDS), and consists of a frequency synthesizer (1), a logic controller (2), a reference clock (3), a radio frequency control and amplification device (4), and a power management module (5). The logic controller is connected with the frequency synthesizer; under the control of the logic controller, the frequency synthesizer can transmit waveforms of frequency and amplitude, and provide the display state of liquid crystal display; the reference clock is connected with the frequency synthesizer, and is used for providing signals of the reference clock for the frequency synthesizer; the radio frequency control and amplification device is connected with the frequency synthesizer, and isused for amplifying and transmitting the high-frequency signals generated by the frequency synthesizer; the power management module is connected with the power supply with each device. The acousto-optic driver has the advantages of wide driving frequency band, high frequency accuracy, high resolution, and excellent frequency stability, and is suitable for various acousto-optic devices and ultrasonic devices of high-frequency and radio-frequency bands.
Owner:ZHEJIANG UNIV

Anti-interference vehicle-mounted communication system and method

InactiveCN110971253AReduce the probability of being disturbedFast frequency conversionTransmissionConvertersTransceiver
The invention discloses an anti-interference vehicle-mounted communication system. The system comprises a central processor, a communication module, a positioning module, a signal transceiver, a signal converter, a timing module, a frequency conversion module, an alarm module and a power supply module. The central processor, the communication module, the positioning module, the signal transceiver,the signal converter, the timing module, the frequency conversion module, the alarm module and the power supply module are all arranged in the communication host. According to the present invention,the structure is reasonable, and by arranging the timing module and the frequency conversion module, the automatic frequency changing and switching are achieved after the timing is performed, such that the interference probability is substantially reduced.
Owner:HUNAN TECHN COLLEGE OF RAILWAY HIGH SPEED

Stepping type high-precision photoetching machine

The invention belongs to the technical field of photoetching machines, and particularly relates to a stepping type high-precision photoetching machine which comprises a workbench, a laser device, a light beam corrector, an energy controller, an energy detector, a light beam shape controller and the like. The laser, the light beam corrector, the energy controller and the console are arranged outside the closed frame; a shock absorber is arranged at the bottom of the closed frame; and the energy controller, the light beam shape controller, the light shielding device, the energy detector and theenergy controller are located on a same horizontal line and are sequentially arranged from left to right. According to the invention, the temperature difference among an objective lens, a mask plate and a mask table is adjusted in time through a temperature control device; frequency conversion is carried out on the signal in the closed frame through a tuner; the objective lens is locked or loosened through a regulator, so that the objective lens can be adjusted, the objective lens is prevented from expanding or contracting under the irradiation of laser beams, etched patterns can be accurate,and the effects of rapid frequency conversion and accurate etching can be achieved.
Owner:福建安芯半导体科技有限公司

A stepping high-precision photolithography machine

The invention belongs to the technical field of lithography machines, in particular to a step-by-step high-precision lithography machine, which includes a workbench, a laser, a beam corrector, an energy controller, an energy detector, beam shape settings, etc.; a laser, a beam corrector The device, energy controller, and console are set outside the closed frame; the bottom of the closed frame is provided with a shock absorber; the energy detector, light shield, beam shape setting, energy controller, and beam corrector are located on the same horizontal line, and from left to The right is set in turn, etc.; the present invention adjusts the temperature difference between the objective lens, the reticle, and the mask table in time through the temperature control device; the frequency conversion of the signal in the closed frame is made through the tuner; Dead or loose, so that the objective lens can be adjusted, so as to prevent the expansion or contraction of the objective lens under the irradiation of the laser beam, so that the etched pattern can be achieved accurately, so that it can achieve a fast frequency conversion and precise etching Effect.
Owner:福建安芯半导体科技有限公司
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