Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

31results about How to "Improve data retention characteristics" patented technology

Nanocrystalline floating gate structure non-volatility memory cell and its manufacture method

The invention relates to the micro-electronics technical field, and discloses a non-volatile storage unit of a nanocrystal floating gate structure, which comprises a silicon substrate, a source conduction region 6, a drain conduction region 7, a tunneling dielectric layer 2, a nanocrystal charge storage layer 3, a control gate dielectric layer 4 and a gate material layer 5, wherein the source conduction region 6 and the drain conduction region 7 which are heavily doped are arranged on two ends of the silicon substrate 1, the tunneling dielectric layer 2 is covered on a current carrier channel between the source conduction region 6 and the drain conduction region 7, the nanocrystal charge storage layer is covered on the tunneling dielectric layer, the control gate dielectric layer 4 is covered on the nanocrystal charge storage layer, and the gate material layer 5 is covered on the control gate dielectric layer. The invention simultaneously discloses a process for preparing the non-volatile storage unit of a nanocrystal floating gate structure. The non-volatile storage unit of a nanocrystal floating gate structure increases programming/erasing speed of the non-volatile storage unit of a floating gate structure, effective storage capacity, data retention, programming/erasing durability and the like, and the process for preparing the non-volatile storage unit of a nanocrystal floating gate structure simplifies manufacturing technique, increases manufacturing efficiency and reduces manufacturing cost based on the conventional CMOS technique.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

High-reliability split-gate nonvolatile memory structure with high-speed low-voltage operation function

The invention discloses a high-reliability split-gate nonvolatile memory structure with a high-speed low-voltage operation function, which is characterized in that the structure comprises a selection transistor and a memory transistor, the selection transistor and the memory transistor share a substrate region and a source / drain doped region, the memory transistor is provided with a stack structure and information is stored in a charge storage layer below a grid region. By adopting a dual-layer or multilayer substrate made of stress silicon / germanium-silicon and by comprehensively utilizing high collision ionization rate brought by primary collision ionization of the channels of the stress silicon, high collision ionization rate brought by the introduction of a SixGel-x layer and wider transverse electron distribution produced resultantly, the programming efficiency of a split-gate structure can be greatly improved, the programming voltage is reduced, the data hold characteristic of adevice is improved and the high-reliability operation of the device is facilitated. Since the charge-trap-type split-gate memory preparation process disclosed by the invention is compatible with the traditional silicon planar complementary metal oxide semiconductor (CMOS) process, the wide application is facilitated.
Owner:宁夏储芯科技有限公司

Nanocrystal nonvolatile memory based on strained silicon and manufacturing method of memory

The invention relates to a nanocrystal nonvolatile memory based on strained silicon in the technical fields of nano electronic components and nano processing. The nanocrystal nonvolatile memory based on strained silicon comprises a silicon substrate, a GeSi gradually-doped buffer layer, a Gel-xSix relieving layer, a strained silicon layer, lightly-doped drain electrodes, a source conduction region, a drain conduction region, a tunneling dielectric layer, a nanocrystal charge storage layer, a control grid dielectric layer and a grid electrode material layer, wherein the GeSi gradually-doped buffer layer, the Gel-xSix relieving layer and the strained silicon layer are deposited on the silicon substrate; the lightly-doped drain electrodes, the source conduction region and the drain conduction region are arranged at two sides in the silicon substrate; the tunneling dielectric layer covers a current carrier channel arranged between the source conduction region and the drain conduction region; the nanocrystal charge storage layer covers the tunneling dielectric layer; the control grid dielectric layer covers the tunneling dielectric layer; and the grid electrode material layer covers the control grid dielectric layer. According to the invention, the mobility is increased by utilizing the strained silicon, thereby increasing the reading current, and simplifying a peripheral circuit; the nanocrystal nonvolatile memory based on strained silicon adopts the nanocrystal as a floating grid material, so that the performance of a storage device is improved, and particularly, the storage performance, such as storage windows, programming/erasing speed, data retention characteristic and the like, is improved comprehensively.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Nonvolatile three-dimensional semiconductor memory device and preparing method

The invention relates to the technical field of microelectronics, and discloses a nonvolatile three-dimensional semiconductor memory device and a preparing method. The three-dimensional semiconductor memory device comprises bit lines made of strip-shaped connecting materials which are isolated by a plurality of insulating layers; each strip-shaped connecting bit line is provided with two surface zones along the side direction; word lines made of connecting materials are arranged in the direction orthogonal with the connecting bit lines; and storage materials are placed in the middle of a cross-shaped overlapping zone which is then used as an electric charge capturing stack zone or a resistance changing function zone. High-dielectric-constant materials can be used in a function zone of the three-dimensional semiconductor memory device, and high-work function materials such as metal nitride are used in a gate electrode. Therefore, according to the preparing method of the three-dimensional semiconductor memory device, partitioning zones arranged between the word lines are introduced first, then storage function layer materials and gate materials are deposited in a back-gate technology, a technology is simplified, material pollution is avoided, and meanwhile performance of the device is improved.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Floating gates of EEPROM (electrically erasable programmable read-only memory) and manufacturing method thereof

The invention discloses a manufacturing method of floating gates of an EEPROM (electrically erasable programmable read-only memory). The method comprises the following steps: 1. etching a polysilicon layer on the surface of a silicon wafer to form floating gates, wherein the side walls of the floating gates have angle of inclination being 70-80 degrees; and the silicon wafer is characterized in that gate oxide layers and tunnelling oxide layers have been formed on the silicon substrate; isolation structures have existed in the silicon substrate; and the polysilicon layer has been deposited onthe surface of the silicon substrate; 2. growing silicon oxide layers on the surfaces of the floating gates by adopting the thermal oxide growth process; and 3. depositing a silicon nitride layer anda silicon oxide layer on the surface of the silicon wafer in sequence, wherein the silicon oxide layers, the silicon nitride layers and the silicon oxide layers on the floating gates form ONO (oxide-nitride-oxide) layers. The topography of the floating gates after etching becomes oblique through improvement and the upper angles of the floating gates are chamfered through the thermal oxide growth process, thus improving the data retention of the EEPROM.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Method of manufacturing flash memory

The invention discloses a method of manufacturing a flash memory. The method comprises the steps of etching an active region and an isolation region on a semiconductor substrate which is stacked by a substrate, a sacrificial layer and a mask layer in sequence, forming a lining layer on the substrate after the etching of the mask layer and the sacrificial layer to obtain a semiconductor structure of a smooth corner; forming an insulation layer on the semiconductor structure of the smooth corner; forming an isolation oxide layer on the insulation layer to fill the isolation region; removing the isolation oxide layer and the insulation layer partially until the isolation oxide layer levels with the insulation layer and the mask layer; removing the mask layer located on the active region to expose the sacrificial layer and the partial insulation layer which are in contact with the mask layer; removing the exposed sacrificial layer and the partial insulation layer to expose the substrate of the active region; and forming a tunnel oxide layer and a floating gate layer on the exposed substrate of the active region. The invention can prevent the tunnel oxide layer and the floating gate layer from being influenced by the isolation oxide of the isolation region, thereby improving the data holding characteristics of the flash memory.
Owner:GIGADEVICE SEMICON SHANGHAI INC +1

NAND memory based on nanocrystalline and manufacturing method thereof

The invention relates to an NAND memory based on nanocrystalline and a manufacturing method of the NAND memory based on the nanocrystalline. The NAND memory comprises a nanocrystalline storage unit and a selective transistor. The nanocrystalline storage unit comprises a silicon base, a conduction source region and a conductive leakage area which are arranged at two sides of the silicon base, a tunneling medium layer covering on the charge carrier channel between the source conductive region and the conductive leakage area, a nanocrystalline charge storage layer covering on the tunneling medium layer, a control grid medium layer covering on the nanocrystalline charge storage layer, and a grid electrode material layer covering on the control grid medium layer. The transistor comprises a silicone base, a conductive source region and a conductive leakage region which are arranged at two sides of the silicone base, a medium layer covering on the charge carrier channel between the conductive source region and the conductive leakage region, and a grid electrode material layer covering on the medium layer. The NAND memory based on the nanocrystalline and the manufacturing method of the NAND memory based on the nanocrystalline can reduce the area of a chip in a large-scale mode, meanwhile can save one to two lines of photomask due to the fact that the source-drain junction in the middle part of a storage unit is removed, and preparation is made for the memory of next generation.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

High-reliability split-gate nonvolatile memory structure with high-speed low-voltage operation function

The invention discloses a high-reliability split-gate nonvolatile memory structure with a high-speed low-voltage operation function, which is characterized in that the structure comprises a selection transistor and a memory transistor, the selection transistor and the memory transistor share a substrate region and a source / drain doped region, the memory transistor is provided with a stack structure and information is stored in a charge storage layer below a grid region. By adopting a dual-layer or multilayer substrate made of stress silicon / germanium-silicon and by comprehensively utilizing high collision ionization rate brought by primary collision ionization of the channels of the stress silicon, high collision ionization rate brought by the introduction of a SixGel-x layer and wider transverse electron distribution produced resultantly, the programming efficiency of a split-gate structure can be greatly improved, the programming voltage is reduced, the data hold characteristic of adevice is improved and the high-reliability operation of the device is facilitated. Since the charge-trap-type split-gate memory preparation process disclosed by the invention is compatible with the traditional silicon planar complementary metal oxide semiconductor (CMOS) process, the wide application is facilitated.
Owner:宁夏储芯科技有限公司

Nonvolatile three-dimensional semiconductor memory device and preparing method

The invention relates to the technical field of microelectronics, and discloses a nonvolatile three-dimensional semiconductor memory device and a preparing method. The three-dimensional semiconductor memory device comprises bit lines made of strip-shaped connecting materials which are isolated by a plurality of insulating layers; each strip-shaped connecting bit line is provided with two surface zones along the side direction; word lines made of connecting materials are arranged in the direction orthogonal with the connecting bit lines; and storage materials are placed in the middle of a cross-shaped overlapping zone which is then used as an electric charge capturing stack zone or a resistance changing function zone. High-dielectric-constant materials can be used in a function zone of the three-dimensional semiconductor memory device, and high-work function materials such as metal nitride are used in a gate electrode. Therefore, according to the preparing method of the three-dimensional semiconductor memory device, partitioning zones arranged between the word lines are introduced first, then storage function layer materials and gate materials are deposited in a back-gate technology, a technology is simplified, material pollution is avoided, and meanwhile performance of the device is improved.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

A kind of manufacturing method of flash memory

The invention discloses a method for manufacturing a flash memory, which comprises etching an active region and an isolation region on a semiconductor substrate, wherein the semiconductor substrate is formed by stacking a substrate, a sacrificial layer and a mask layer in sequence, and the mask is etched back after the semiconductor substrate is sequentially stacked. A liner layer is formed on the substrate after the sacrificial layer is etched to obtain a semiconductor structure with rounded corners, an insulating layer is formed on the semiconductor structure with rounded corners, an isolation oxide layer is formed on the insulating layer to fill the isolation region, and part of Remove the isolation oxide layer and insulating layer until the isolation oxide layer and the insulating layer are flush with the mask layer, remove the mask layer located in the active area, expose the sacrificial layer and part of the insulating layer in contact with the mask layer, remove The exposed sacrificial layer and part of the insulating layer expose the substrate of the active region, and a tunnel oxide layer and a floating gate layer are sequentially formed on the exposed substrate of the active region. The present invention can prevent the isolation oxide of the isolation region from affecting the tunnel oxide and the pad layer, thereby improving the data retention characteristics of the flash memory.
Owner:GIGADEVICE SEMICON SHANGHAI INC +1

Floating gates of EEPROM (electrically erasable programmable read-only memory) and manufacturing method thereof

The invention discloses a manufacturing method of floating gates of an EEPROM (electrically erasable programmable read-only memory). The method comprises the following steps: 1. etching a polysilicon layer on the surface of a silicon wafer to form floating gates, wherein the side walls of the floating gates have angle of inclination being 70-80 degrees; and the silicon wafer is characterized in that gate oxide layers and tunnelling oxide layers have been formed on the silicon substrate; isolation structures have existed in the silicon substrate; and the polysilicon layer has been deposited on the surface of the silicon substrate; 2. growing silicon oxide layers on the surfaces of the floating gates by adopting the thermal oxide growth process; and 3. depositing a silicon nitride layer and a silicon oxide layer on the surface of the silicon wafer in sequence, wherein the silicon oxide layers, the silicon nitride layers and the silicon oxide layers on the floating gates form ONO (oxide-nitride-oxide) layers. The topography of the floating gates after etching becomes oblique through improvement and the upper angles of the floating gates are chamfered through the thermal oxide growth process, thus improving the data retention of the EEPROM.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products