An
optical path device, an optical detection method and a detection device, the
optical path device comprising a side incidence
optical path assembly and a lens
assembly, the side incidence optical path
assembly comprising a detection
light source and an expander mirror set, the detection
light source providing an incident
light beam, the expander mirror set being configured to spread and shape the incident
light beam in a first direction to form parallel first
direction detection light beams and to spread and shape the incident
light beam in a second direction to form non-parallel second
direction detection light beams; the first
direction detection light beams exiting the lens assembly to form a
light spot on a surface to be detected of an object to be detected; the second direction detection light beams non-parallelly entering a surface of the lens assembly and having a
beam size, the second direction detection light beams exiting the lens assembly to the surface to be detected and forming the
light spot. The present application provides a detection optical path avoiding a central aperture of the lens assembly, which can effectively reduce the risk of lens damage and achieve more reliable and efficient
wafer defect detection.