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4results about How to "Improve defect detection performance" patented technology

An optical path device, an optical detection method, and a detection apparatus

An optical path device, an optical detection method and a detection device, the optical path device comprising a side incidence optical path assembly and a lens assembly, the side incidence optical path assembly comprising a detection light source and an expander mirror set, the detection light source providing an incident light beam, the expander mirror set being configured to spread and shape the incident light beam in a first direction to form parallel first direction detection light beams and to spread and shape the incident light beam in a second direction to form non-parallel second direction detection light beams; the first direction detection light beams exiting the lens assembly to form a light spot on a surface to be detected of an object to be detected; the second direction detection light beams non-parallelly entering a surface of the lens assembly and having a beam size, the second direction detection light beams exiting the lens assembly to the surface to be detected and forming the light spot. The present application provides a detection optical path avoiding a central aperture of the lens assembly, which can effectively reduce the risk of lens damage and achieve more reliable and efficient wafer defect detection.
Owner:SKYVERSE TECH CO LTD

AOI Imaging System Based on TDI Linear Scan Camera

PendingCN122093668AImprove defect detection performance
This disclosure provides an AOI imaging system based on a TDI line scan camera for image acquisition of a display panel under inspection, relating to the field of display manufacturing. The system includes a TDI line scan camera, an illumination system, and a control system. The TDI line scan camera includes a first TDI line scan acquisition channel and a second TDI line scan acquisition channel. The illumination system includes a first illumination optical path and a second illumination optical path with different illumination effects. The control system is configured to: respond to an image acquisition trigger signal received by the AOI imaging system, control the first TDI line scan acquisition channel and the second TDI line scan acquisition channel to periodically alternate exposure, while simultaneously controlling the first illumination optical path and the second illumination optical path to periodically alternate illumination; and the first illumination optical path is illuminated simultaneously with the exposure of the first TDI line scan acquisition channel, and the second illumination optical path is illuminated simultaneously with the exposure of the second TDI line scan acquisition channel, so as to achieve the output of two illumination effects of the display panel under inspection in a single scan.
Owner:CHENGDU CNS VISION TECH CO LTD

Automatic identification device for surface defects of panel glass

ActiveCN224216593UImprove defect detection performancePrecise positioning and stable scanningMaterial analysis by optical meansUltraviolet lightsFiber array
The utility model discloses an automatic identification device for panel glass surface defects, which comprises a detection platform, a light source system, an image acquisition module, an image processing unit and an adjustable mechanical support, the detection platform is provided with a three-dimensional adjusting seat, and the light source system comprises a multispectral light source assembly and a light path adjusting mechanism. The multispectral light source assembly integrates a visible light source, an infrared light source and an ultraviolet light source through an optical fiber array. Through fusion of multispectral light source integration, dynamic light path adjustment, precision mechanical positioning and edge computing technologies, an excitation-acquisition-processing full-link closed-loop system is constructed, and the bottlenecks of a traditional detection device in the aspects of multi-defect type adaptability, dynamic detection precision, environment anti-interference capability and the like are solved.
Owner:DONGGUAN MOORE INTELLIGENT TECHNOLOGY CO LTD