The present invention relates to a SOG (Spin-On-Glass) dispensing
system and its controlling sequences and, more particularly, to a SOG dispensing
system allowing for
continuous production and its controlling sequences According to the present invention, a
buffer tank, whose wall is set a plurality of level sensors at different level heights, is connected between a source tank with a SOG
bottle inside and a
coating unit of prior art and then SOG is supplied for a time interval from the source tank into the
buffer tank by control signals from these level sensors. Besides, the
buffer tank is surrounded with a cooling unit to provide a low temperature enviroment allowing for prolonging
life time of SOG and preventing
organic solvent inside SOG from evaporating and then crystallizing to form
contamination particles at wall of the SOG dispensing
system. Thus, the
resultant SOG dispensing system, according to the present invention, can resolve a shortcoming of discontinuous production of prior art due to a need for changing the SOG
bottle, as well as another shortcoming of residue of the SOG
bottle, thereby considerably raising operating efficient of the dispensing system by reducing its
idle time and lowering fabrication cost by saving a SOG waste.