The application relates to the technical field of micro-
nano manufacturing and electrochemical additive manufacturing, and more particularly to a limited electrodeposition device,
system and method based on two-phase temperature regulation. The device comprises a platform, a
cathode substrate installed on the platform, a moving mechanism installed on the platform, a
nozzle installed on the moving end of the moving mechanism, a heating
assembly arranged on a liquid supply path of the
nozzle and a cooling
assembly installed on the platform; the heating
assembly is used for heating working liquid to be higher than
room temperature; a
water flow channel is arranged in the
nozzle; the surface of the
cathode substrate is covered with a
mask layer, and the cooling assembly is used for cooling the
mask layer to be below
room temperature; and the moving mechanism is used for driving the nozzle to move relative to the
cathode substrate. Through the
temperature gradient of the high-temperature working liquid and the low-temperature liquid
mask, a thermal Marangoni
convection is induced at the liquid-
liquid interface, the
convection can effectively update the concentration boundary layer, the high-concentration ions in the body are continuously sucked to the deposition interface, the
mass transfer
bottleneck at
room temperature is broken, and the
limiting current density and the
deposition rate are greatly improved.