The invention discloses a terahertz pure
silicon equiphase low-loss
waveguide based on a
bound state in a
continuous spectrum, and belongs to the technical field of terahertz on-
chip communication. The
waveguide comprises a conical gradual change input structure, a first straight
waveguide, an equiphase waveguide, a second straight waveguide and a conical gradual change output structure which are sequentially connected along a transmission direction, the equiphase waveguide is of a one-dimensional
photonic crystal structure formed by arranging a plurality of periodic unit structures, each unit is a cuboid made of a high-resistance
silicon material, and symmetrical elliptic cylindrical grooves are formed in the upper surface and the lower surface of each unit. Energy band degeneracy of monopole and
dipole modes is realized through points in a Brillouin region, a Dirac cone is formed, a near-zero
effective refractive index is obtained at a central working frequency, and equiphase transmission is realized; and meanwhile, a
bound state mechanism in a
continuous spectrum is utilized to greatly improve quality factors and suppress
radiation loss. The waveguide supports flexible adjustment of the working frequency through geometric dimension equal-proportion scaling, covers the
frequency band of 0.1-10 THz, and can be designed to be of a bent structure. According to the invention, an all-
silicon process is adopted, the structure is compact, the loss is low, and the device is suitable for high-fidelity
signal transmission and
processing in a terahertz integrated
system.