1 results about "Gadolinium oxysulfide" patented technology

This invention relates to a method for fabricating a gadolinium oxysulfate X-ray scintillation screen based on a silicon microchannel array, as well as the X-ray scintillation screen and its applications, belonging to the field of X-ray imaging technology. It primarily addresses the technical problem of low resolution in existing X-ray scintillation screens. This invention fabricates a tetragonal silicon microchannel structure through photolithography, photoelectrochemical etching, and back-side thinning processes, fundamentally avoiding the problem of microchannel misalignment. The use of ALD tungsten film deposition and pulse electroplating for silver film deposition effectively reduces X-ray crosstalk. Furthermore, the good chemical compatibility between tungsten and silver ensures uniform silver film deposition without microchannel blockage, and the silver film possesses high reflectivity. Vacuum infusion is used to completely fill the microchannels with fluorescent material, avoiding the presence of air or other substances with significantly different refractive indices from the fluorescent material within the channels, and also solving the scattering and reflection problems caused by gaps between particles, effectively improving detection efficiency.