17 results about "Suspension plasma spray" patented technology

The invention relates to the field of suspension plasma spraying, in particular to a long-service-life suspension plasma spraying thermal barrier coating based on a platinum-aluminum coating and a preparation method of the long-service-life suspension plasma spraying thermal barrier coating. The preparation method comprises the following steps: preparing a vertical crack or columnar-like structure ceramic layer on the surface of a platinum modified aluminide bonding layer with lower roughness by using suspension slurry prepared from fully-stable tetragonal phase yttrium oxide stabilized zirconium oxide powder and adopting suspension plasma spraying suspension, so as to obtain a thermal barrier coating system with long service life. The problems that in the prior art, due to stress existing between a ceramic layer prepared through plasma spraying and a low-roughness platinum modified aluminide bonding layer, cracks are continuously formed and expanded at an interface, and the service life of a thermal barrier coating system is short are solved. The long-life thermal barrier coating system can be prepared on the platinum modified aluminide bonding layer through suspension plasma spraying.

The invention discloses a method for preparing a double-layer Y2O3 etching-resistant coating through atmosphere and suspension plasma spraying, and particularly relates to the technical field of coating preparation. The method comprises the following steps: carrying out sand blasting, high-pressure water washing, blow-drying and drying pretreatment on an aluminum-based sample; spraying high-purity Y2O3 powder on the surface of the sample by adopting an atmospheric plasma spraying technology to form an APS bottom layer; grinding the surface of the APS bottom layer; putting the ground sample into an annealing furnace for annealing; after the sample is cooled, the Y2O3 suspension is injected into high-energy plasma flame flow through plasma spraying equipment, the Y2O3 suspension is melted and then impacts the surface of the APS bottom layer, the SPS top layer is formed after cooling, and finally the double-layer high-density Y2O3 etching-resistant coating is obtained. Through the double-layer structure design of APS bottoming and SPS top layer, grinding and annealing processes are combined to eliminate interlayer stress, corrosion resistance and dimensional stability are both considered, the preparation cost is lower than that of a full SPS coating, and the method is suitable for surface protection of cavity parts of semiconductor etching equipment.

The invention relates to the field of high-temperature protective ceramic coatings for aero-engines, and particularly discloses an environmental barrier coating with a gradient structure and a long service life and a suspension plasma spraying preparation method thereof. The specific method comprises the following steps: by taking silicon powder as a raw material, preparing a bonding layer on a silicon carbide ceramic or SiCf / SiC ceramic-based composite material by utilizing an axial powder feeding three-electrode atmosphere plasma spraying system, preparing suspension liquid by taking rare earth silicate RE2Si2O7 and the like as raw materials, and respectively spraying a compact structure RE2Si2O7 middle layer and a columnar crystal-like structure RE2Si2O7 surface layer; and the prepared state coating is placed in Ar atmosphere and subjected to high-temperature annealing treatment, and the environment barrier coating with the high crystallinity and the gradient structure is obtained. The coating prepared by the invention has gradient transition structural characteristics, has excellent thermal shock resistance in actual tests, and has important application significance in prolonging the service life of silicon carbide ceramic or SiCf / SiC ceramic-based composite materials.

The invention discloses a method for preparing a high-density aluminum oxide coating by using a suspension plasma spraying technology, and relates to the technical field of suspension plasma spraying, and the method comprises the following steps: 1, carrying out sand blasting treatment on an upper electrode plate; sequentially carrying out high-pressure washing, compressed air blow-drying and drying operations; 2, the upper electrode plate is placed in a sulfuric acid solution to be subjected to hard anodic oxidation treatment; 3, a dry ice sand blasting process is adopted for pretreating the hole periphery area of the surface of the steel plate; step 4, injecting the aluminum oxide suspension into high-energy plasma flame flow through plasma spraying equipment; the aluminum oxide particles in the suspension are rapidly molten in the flame flow, then collide with the surface of the upper electrode plate at a high speed along with the plasma flow, and are rapidly cooled and solidified to form a layer of high-compactness aluminum oxide coating on the surface of the upper electrode plate. By optimizing the coating preparation process and parameters, the compactness and corrosion resistance of the coating are improved, the service life of equipment parts is prolonged, and the cost of a production enterprise is reduced.

The application discloses a high-temperature wear-resistant coating suspension, a high-temperature wear-resistant coating and a preparation method and application thereof. The high-temperature wear-resistant coating suspension comprises a solute, a solvent and a dispersant, and the solute comprises NiCr-Cr3C2 composite powder and BaF2 / CaF2 eutectic powder. The preparation method of the high-temperature wear-resistant coating comprises the following steps: adopting a suspension plasma spraying technology, spraying the high-temperature wear-resistant coating suspension, forming a NiCr-Cr3C2-BaF2 / CaF2 coating, and preparing the high-temperature wear-resistant coating. The application further provides a composite coating which comprises a metal transition layer and the high-temperature wear-resistant coating deposited on the surface of the metal transition layer. The suspension plasma spraying technology can form a suspension of fine particles in the spraying process, which helps to improve the melting degree of the particles, improve the coating density, and obtain a coating with a dense structure by controlling the suspension system and the spraying process.

A substrate configured to withstand a high electrical voltage. The substrate comprises a functional electrical layer formed on the substrate using either atmospheric plasma spray (APS) suspension plasma spray (SPS). A high strength dielectric material is coated onto the functional electrical layer using SPS. A clamping layer is coated on the high strength dielectric material using either APS or SPS.

The application belongs to the technical field of suspension plasma spraying, and particularly relates to a feeding device for preparing a columnar crystal microstructure coating by suspension plasma spraying, which solves the technical defects of a conventional two-fluid atomizer, such as too large radial distance between the nozzle end and the center of the plasma jet or difficulty in assembling with the plasma torch, and comprises a two-fluid atomizing nozzle, a stirring device, a peristaltic pump, an air compressor and a clamping tool. The air cap extends with a neck part connected in the middle. The stirring device is connected to the peristaltic pump through a liquid pipe. The peristaltic pump is connected to the liquid inlet of the two-fluid atomizing nozzle through a liquid pipe. The air compressor is connected to the air inlet of the two-fluid atomizing nozzle through an air pipe. The clamping tool is used for fixing and mounting the air cap to the front end of the plasma torch. The neck outlet of the air cap is located at the front end of the plasma torch. The elongated neck of the air cap and the special clamping tool can make the suspension liquid after sufficient atomization treatment be more concentratedly sent into the plasma jet.

The present application relates to the technical field of high-temperature protective coating, and discloses a preparation method of a vertical crack-free environmental barrier coating based on suspension plasma spraying, which comprises the following steps: constructing a substrate material, respectively constructing a deposition temperature-based environmental barrier coating quenching stress analysis model, a thermal mismatch stress analysis model and a thermal gradient stress analysis model during the environmental barrier coating coating process by using suspension plasma spraying, determining a target function of the stress level of the environmental barrier coating by summing up the output values of the three analysis models, and obtaining the optimal control value of the deposition temperature in the plasma spraying process by optimizing the target function, so as to reduce the stress level in the environmental barrier coating. The method can avoid the generation of vertical cracks in the environmental barrier coating and improve the performance of the environmental barrier coating.

The invention relates to the technical field of high-temperature protective coatings, and discloses a preparation method of a vertical-crack-free environmental barrier coating based on suspension plasma spraying. The method comprises the following steps: respectively constructing an environmental barrier coating quenching stress analysis model, a thermal mismatch stress analysis model and a thermal gradient stress analysis model based on a deposition temperature in the process of coating the environmental barrier coating by adopting suspension plasma spraying on a base material; and determining an objective function of the stress level of the environmental barrier coating according to the sum of the output values of the three analysis models, and optimizing the objective function to obtain an optimal control value of the deposition temperature in the plasma spraying process so as to reduce the stress level in the environmental barrier coating. According to the method, vertical cracks can be prevented from being generated in the environmental barrier coating, and the performance of the environmental barrier coating is improved.

The application relates to the technical field of spraying equipment, in particular to a micro-nano material suspension plasma spraying device, which comprises a fixing frame, a plasma spraying gun and a spraying gun, connecting plates and a workbench are arranged on the fixing frame in an up-down distribution, the plasma spraying gun and the spraying gun are respectively arranged on the connecting plates, one side of the plasma spraying gun is connected with a plasma generator, one side of the spraying gun is connected with a liquid storage tank, a controller is arranged on the side wall of the fixing frame, one side below the connecting plate is further connected with an L-shaped support, a spherical spraying guide is arranged in the middle of the support, a connecting seat connected with the plasma spraying gun is arranged outside the spraying guide, and a connecting port connected with the spraying gun and a cavity are further arranged in the spraying guide. Compared with the prior art, the application effectively solves the problem that the spraying range cannot be adjusted due to the limitation of the size of the spraying gun outlet, and improves the adjustability of the spraying device.

A blast nozzle for a thermal spray assembly is provided. The blast nozzle may be a single nozzle or a plurality of blast nozzles arranged symmetrically around the thermal spray axis. The fluid axis from the blast nozzle (or nozzles) is angled with respect to the surface of the substrate to be coated. The angle may be between 0 and 90 degrees, and typically between 40 and 50 degrees, and more typically at about 45 degrees. The fluid from the blast nozzle (or nozzles) is propelled toward the substrate along with a fluid axis that converges with the plasma axis at a convergence point, which may be above the substrate (the near side of the substrate), at the substrate, or below the substrate (the far side of the substrate).

The present application relates to the technical field of thermal barrier coating surface corrosion and protection, in particular to a kind of anti-CMAS infiltration biomimetic thermal barrier coating and preparation method.The anti-CMAS infiltration biomimetic thermal barrier coating, from substrate, inside to outside, in turn includes: metal bonding layer, inner ceramic layer and micro-nano structure outer ceramic layer;The micro-nano structure outer ceramic layer is NdYbZr2O7.The present application adopts suspension plasma spraying technology to prepare micro-nano structure outer ceramic layer on the surface of inner ceramic layer.The present application selects new NdYbZr2O7 material as outer ceramic layer material, and simultaneously based on suspension plasma spraying technology, from material component optimization and structure control two aspects, realizes the CMAS protection effect of active / passive combination, improves the anti-CMAS infiltration and corrosion performance of coating.

This invention discloses a dense, wear-resistant alumina coating produced by suspension plasma spraying, its preparation method, and its application. The preparation method includes: pretreating the substrate; applying an alumina suspension to the substrate surface using axial suspension plasma spraying technology to obtain a dense, wear-resistant alumina coating; wherein the process parameters for the axial suspension plasma spraying technology include: a spray gun power of 125-150 kW, a spraying distance of 50-150 mm, a liquid delivery rate of 30-120 ml / min, and a substrate surface temperature of 300-600 °C during spraying. The method provided by this invention features simple operation, short production cycle, controllable coating thickness, and high production efficiency. Simultaneously, the prepared alumina coating retains the chemical composition of the sprayed alumina and has advantages such as larger coating size, denser coating structure, higher bonding strength, higher hardness, lower wear rate, and applicability to more substrate types.

The invention relates to the field of bonding layers of thermal / environmental barrier coatings, in particular to a layered hafnium silicate bonding layer which is low in annealing temperature, good in high-temperature phase stability, good in oxidation resistance and matched with the thermal expansion coefficient of a silicon carbide ceramic-based composite material and a preparation method of the layered hafnium silicate bonding layer. The preparation method comprises the following steps: by taking hafnium oxide and silicon oxide as raw materials, firstly preparing hafnium silicate raw material powder through a solid-phase reaction method, then preparing hafnium silicate suspension liquid through a ball milling process, and then carrying out plasma spraying on the suspension liquid, thereby preparing the hafnium silicate bonding layer. Compared with a traditional silicon bonding layer, the novel bonding layer has the advantages that the service temperature is higher, the coating cannot be oxidized to generate thermal growth oxide, and the thermal expansion coefficient of the novel bonding layer is matched with that of a silicon-based ceramic composite material. The novel bonding layer has the remarkable characteristic that the coating also has a unique uniform layered microstructure. The preparation process is simple, the operability is high, the coating performance is good, and the industrial production prospect is wide.

A substrate configured to withstand a high electrical voltage. The substrate comprises a functional electrical layer formed on the substrate using either atmospheric plasma spray (APS) suspension plasma spray (SPS). A high strength dielectric material is coated onto the functional electrical layer using SPS. A clamping layer is coated on the high strength dielectric material using either APS or SPS.

The present invention discloses a method for preparing an etch-resistant ceramic coating material, by introducing elements such as Al, Sc, Yb, La, and forming an entropy-stabilized material with yttrium oxide, optimizing its chemical composition and crystal structure, thereby preparing a coating with high density, high bonding strength and excellent etch-resistant performance. By adopting an improved spray granulation process, a powder with controllable particle size and a narrow distribution range is prepared, and combined with suspension plasma spraying technology, the uniformity, density and low surface roughness of the coating are achieved. The coating material of the present invention has high-temperature stability, chemical inertness and excellent etch-resistant performance in extreme working environments, and can meet the long-term stable operation requirements of high-end precision equipment such as semiconductor manufacturing and photolithography equipment, and provide a reliable protection solution for these devices. Therefore, the present invention not only promotes the application progress of yttrium oxide materials in the field of etch-resistant coatings, but also effectively improves the performance and reliability of coatings in related fields.

The present application relates to the technical field of ceramic coating preparation, and discloses an etching-resistant ceramic coating and a preparation method thereof. The method comprises the following steps: preparing a multicomponent composite ceramic powder based on yttrium oxide and yttrium fluoride and containing zirconium oxide and aluminum oxide according to phase equilibrium design; performing spray granulation treatment on the powder to obtain spherical feed powder with good fluidity; and preparing the feed powder into a coating by using a plasma spraying process. In the spray granulation step, the ceramic powder is mixed with deionized water, a dispersant and a binder to form a slurry, and the required powder is obtained through centrifugal spray drying and heat treatment. The spraying can be performed by using a supersonic atmospheric plasma spraying process or a suspension plasma spraying process. The present application stabilizes the phase composition of the coating material through phase equilibrium design, and obtains an etching-resistant ceramic coating which is phase-stable, dense and has high bonding strength by combining optimized granulation and spraying processes, and the coating is suitable for protection of semiconductor processing equipment.