The invention discloses a method for reversibly adjusting Y2O3 surface atomic-scale mechanochemical removal behaviors, and belongs to the technical field of atomic-scale precision
material removal. Comprising the following steps: S1, performing
ultraviolet irradiation treatment on Y2O3 to obtain a
primary treatment sample; and S2, in an atmospheric environment, applying a certain load to the Al2O3 needle tip,
rubbing the surface of the primarily treated sample, and realizing a mechanochemical removal behavior in the
rubbing process. According to the method,
ultraviolet rays are utilized to irradiate the surface of Y2O3,
electron transition of the Y element in Y2O3 is promoted to form a color center, and the surface of Y2O3 has mechanochemical activity; then, in the atmospheric environment, a certain load is applied to the Al2O3 needle tip to rub the Y2O3 surface, a mechanochemical reaction can be generated on the friction interface, a Y-O-Al bond bridge is formed, and then the atomic-scale precision
material removal behavior is achieved. Due to the fact that the applied stress acts on the plane in a pure elastic deformation mode, the lower-layer plane cannot be damaged, and the integrity of the lower-layer
surface structure is guaranteed.