The invention discloses a resistance correction structure and method of a thin film temperature sensor, and relates to the technical field of temperature sensors, the resistance correction structure comprises a plurality of resistance correction units connected in series, and each resistance correction unit comprises a plurality of resistance correction resistors connected in parallel and a bypass wire which is connected in parallel with the resistance correction resistors and can be broken by
laser. And the resistance correction resistance value of the resistance correction unit is the resistance value difference of the bypass wire in the open-circuit state and the closed-circuit state. All the units have different preset resistance values, and the minimum resistance value is smaller than or equal to the required resistance correction precision. By combining the resistance correction units with different resistance values, adjustment of any resistance value can be realized within a
target range. During resistance calibration, the current resistance value of the sensor is measured firstly, the resistance value needing to be adjusted is calculated, and then the corresponding bypass wire is selectively broken through
laser. The non-
ablation mode that the bypass wire is broken through
laser is adopted, the problems that a
heat affected zone and precision are limited in traditional
laser trimming are solved, and the method has the advantages of being high in precision, simple in process, good in reliability, low in cost and the like.