The invention relates to the field of capacitive vacuum gauges, and discloses a capacitive
ceramic base vacuum gauge with a micro-structured support, which comprises a main body, a
metal film is transversely and horizontally arranged in the middle of the inner side of the main body, and a
ceramic substrate is arranged on the inner side of the main body corresponding to the upper end of the
metal film. A space formed by the upper end of the
metal film and the inner side of the body is a vacuum cavity, a vacuumizing connector is arranged at the middle end of the top of the body, a space formed by the lower end of the metal film and the inner side of the body is a medium cavity, a positive
electrode connecting ring is arranged on one side of the upper end of the body, and a positive
electrode conductive
assembly is arranged on the inner side of the positive
electrode connecting ring. According to the invention, through the
annular array design of the micro support columns, precise support of the metal film is realized, excessive deformation damage of the metal film is effectively avoided, diaphragm vibration is inhibited,
signal instability is reduced, and measurement stability is significantly improved; the buffer pad design of the metal film and the
ceramic substrate further absorbs external vibration and pressure
impact, reduces the loss of parts, and prolongs the service life of equipment.