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43results about How to "Reduce space charge effects" patented technology

Projection electron beam apparatus and defect inspection system using the apparatus

A sample is evaluated at a high throughput by reducing axial chromatic aberration and increasing the transmittance of secondary electrons. Electron beams emitted from an electron gun 1 are irradiated onto a sample 7 through a primary electro-optical system, and electrons consequently emitted from the sample are detected by a detector 12 through a secondary electro-optical system. A Wien filter 8 comprising a multi-pole lens for correcting axial chromatic aberration is disposed between a magnification lens 10 in the secondary electro-optical system and a beam separator 5 for separating a primary electron beam and a secondary electron beam, for correcting axial chromatic aberration caused by an objective lens 14 which comprises an electromagnetic lens having a magnetic gap defined on a sample side.
Owner:KK TOSHIBA

Two-dimensional quadrupole ion trap operated as a mass spectrometer

A three section linear or two-dimensional (2D) quadrupole ion trap as a high performance mass spectrometer is described. Mass analysis is performed by ejecting ions radically out a slot formed in one of the rods using the mass selective instability mode of operation. The slot geometry is optimized to yield high ejection efficiencies. Resolution can be controlled by using appropriate end section potentials to control the axial spread of the ion cloud. Multiple detectors can be used for enhancing sensitivity and for enabling enhanced ion analysis techniques in the ion trap.
Owner:THERMO FINNIGAN

Ion transfer from multipole ion guides into multipole ion guides and ion traps

A multipole ion guide is configured to improve the transmission efficiency of ions which traverse the length of one ion guide and enter either another multipole ion guide such as a quadrupole mass analyzer or a three dimensional ion trap. The ion transfer multipole ion guide radial dimensions are reduced such that the pole assembly and an appropriately shaped exit lens can be positioned within a portion of the internal space defined by the larger radius second multipole ion guide poles. Ions exiting the first ion guide of reduced size find themselves inside the second ion guide close to the centerline. In this manner ions can be efficiently transferred from one ion guide to another, even for those ions with low kinetic energies. In a second embodiment of the invention, the exit region of a multipole ion guide is configured such that the multipole ion guide poles can be extended into a counterbore of a three dimensional ion trap end cap electrode. With this configuration, ions (including those with low kinetic energies) can be transferred into a three dimensional ion trap with increased trapping efficiency.
Owner:PERKINELMER HEALTH SCIENCES INC

System for and method of gas cluster ion beam processing

System and method of gas-cluster ion beam processing is realized by incorporating improved beam and workpiece neutralizing components. Larger GCIB current transport is enabled by low energy electron neutralization of space charge of the GCIB. The larger currents transport greater quantities of gas in the GCIB. A vented faraday cup beam measurement system maintains beam dosimetry accuracy despite the high gas transport load.
Owner:TEL EPION

Chemical noise reduction for mass spectrometry

In various aspects, the present teachings provide systems and methods for reducing chemical noise in a mass spectrometry instrument that use a neutral chemical reagent and one or more mass filters to reduce interfering chemical background ion signals that are generated by ionization sources of mass spectrometers. In various embodiments, the neutral chemical reagent belongs to the class of organic chemical species containing a disulfide functionality.
Owner:DH TECH DEVMENT PTE +1

Projection electron beam apparatus and defect inspection system using the apparatus

A sample is evaluated at a high throughput by reducing axial chromatic aberration and increasing the transmittance of secondary electrons. Electron beams emitted from an electron gun 1 are irradiated onto a sample 7 through a primary electro-optical system, and electrons consequently emitted from the sample are detected by a detector 12 through a secondary electro-optical system. A Wien filter 8 comprising a multi-pole lens for correcting axial chromatic aberration is disposed between a magnification lens 10 in the secondary electro-optical system and a beam separator 5 for separating a primary electron beam and a secondary electron beam, for correcting axial chromatic aberration caused by an objective lens 14 which comprises an electromagnetic lens having a magnetic gap defined on a sample side.
Owner:KIOXIA CORP

Method and apparatus for selective filtering of ions

An adjustable, low mass-to-charge (m / z) filter is disclosed employing electrospray ionization to block ions associated with unwanted low m / z species from entering the mass spectrometer and contributing their space charge to down-stream ion accumulation steps. The low-mass filter is made by using an adjustable potential energy barrier from the conductance limiting terminal electrode of an electrodynamic ion funnel, which prohibits species with higher ion mobilities from being transmitted. The filter provides a linear voltage adjustment of low-mass filtering from m / z values from about 50 to about 500. Mass filtering above m / z 500 can also be performed; however, higher m / z species are attenuated. The mass filter was evaluated with a liquid chromatography-mass spectrometry analysis of an albumin tryptic digest and resulted in the ability to block low-mass, “background” ions which account for 40-70% of the total ion current from the ESI source during peak elution.
Owner:BATTELLE MEMORIAL INST

Multireflection Time-Of-Flight Mass Spectrometer

The present invention provides a method of reflecting ions in a multireflection time of flight mass spectrometer comprising providing an ion mirror having a plurality of electrodes, the ion mirror having a cross section with a first, minor axis (Y) and a second, major axis (X) each perpendicular to a longitudinal axis (Z) of the ion mirror which lies generally in the direction of time of flight separation of the ions in the mirror; guiding ions towards the ion mirror; applying a voltage to the electrodes so as to create an electric field which: (a) causes the mean trajectory of the ions to intersect a plane of symmetry of the ion mirror which contains the longitudinal (Z) and major axes (X) of the mirror; (b) causes the ions to reflect in the ion mirror; and (c) causes the ions to exit the ion mirror in a direction such that the mean trajectory of ions passing through the ion mirror has a component of movement in a direction (Y) perpendicular to and diverging from the said plane of symmetry thereof.
Owner:THERMO FISHER SCI BREMEN

Mass spectrometer

An improved FT-ICR Mass Spectrometer has an ion source 10 which generates ions that are transmitted through a series of multipoles 20 to an ion trap 30. Ions are ejected from the trap 30, through a series of lens and multipolar ion guide stages 40–90, and into a measurement cell 100 via an exit / gate lens 110. The measurement cell is mounted in a vacuum chamber 240 and this assembly is slideably moveable into a bore of a superconducting magnet 400 which provides the magnetic filed to cause cyclotron motion of the generated ions in the cell 100. By minimising the distance between the source 10 and cell 100, and by careful alignment of the ion optics, the ions can travel at high energies right up to the front of the measurement cell 100. The cell 100 extends in the longitudinal direction of the magnet bore and is coaxial with that. The ratio of the sectional area of the magnet bore to the sectional area of the cell volume is small (less than 3). The magnet is asymmetric and is relatively short on the ion injection side. The cell 100 is supported from in front of the cell and electrical contact is from the rear thereof.
Owner:THERMO FINNIGAN

Vacuum arc thruster, multi-mode structure and multi-mode achieving manners

The invention discloses a vacuum arc thruster. The thruster comprises a cathode located in the center. An insulator II, a common anode, an insulator I and an outer ring cathode are concentrically arranged on the periphery of the cathode in sequence. According to a multi-mode structure of the vacuum arc thruster, a power source negative electrode is connected with an inductor L1 and an inductor L2 which are connected in parallel and controlled by a switch K1 and a switch K2 correspondingly; the other ends of the inductor L1 and the inductor L2 which are connected in parallel are connected with a solid-state switch K0, a switch K3, a switch K5, a switch K7 and a switch K8 correspondingly; the other end of the solid-state switch K0 is connected to the ground, the other end of the switch K3 and the other end of the switch K8 are connected with the cathode, and the other end of the switch K5 and the other end of the switch K7 are commonly connected with the outer ring cathode; and one end of a switch K4, one end of a switch K6 and one end of a switch K9 are commonly connected with the common anode, and the other end of the switch K4, the other end of the switch K6 and the other end of the switch K9 are commonly connected with a power source positive electrode. Six achieving manners are achieved for the multi-mode structure. The efficiency of the thruster is improved, the service life of the thruster is prolonged, and the vacuum arc thruster can adapt to different degrees of power and thrust.
Owner:LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH

Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systems

Ion implantation systems are provided, comprising a dispersion system located between an ion source and a mass analyzer, that operates to selectively pass an extracted ion beam from the ion source toward the mass analyzer or to direct a dispersed ion beam toward the mass analyzer, where the dispersed ion beam has fewer ions of an undesired mass range than the extracted ion beam.
Owner:AXCELIS TECHNOLOGIES

Method and apparatus for selective filtering of ions

An adjustable, low mass-to-charge (m / z) filter is disclosed employing electrospray ionization to block ions associated with unwanted low m / z species from entering the mass spectrometer and contributing their space charge to down-stream ion accumulation steps. The low-mass filter is made by using an adjustable potential energy barrier from the conductance limiting terminal electrode of an electrodynamic ion funnel, which prohibits species with higher ion mobilities from being transmitted. The filter provides a linear voltage adjustment of low-mass filtering from m / z values from about 50 to about 500. Mass filtering above m / z 500 can also be performed; however, higher m / z species are attenuated. The mass filter was evaluated with a liquid chromatography-mass spectrometry analysis of an albumin tryptic digest and resulted in the ability to block low-mass, “background” ions which account for 40-70% of the total ion current from the ESI source during peak elution.
Owner:BATTELLE MEMORIAL INST

Tricyclic vacuum arc thruster

The invention discloses a tricycle vacuum arc thruster. The thruster comprises a cylindrical cathode arranged in the center. An insulator II, a common anode, an insulator I and an outer ring cathode are sequentially and concentrically arranged on the periphery of the cylindrical cathode. The cylindrical cathode, the insulator II, the common anode, the insulator I and the outer ring cathode are sequentially arranged in a cylindrical cathode installation groove, an insulator II installation base, a common anode installation groove, an insulator I installation base and an outer ring cathode installation groove of an installation base. A cylindrical cathode binding post, a common anode binding post and an outer ring cathode binding post are sequentially arranged on the outer end face of the installation base from the center to the outer side. The cathode binding post and the outer ring cathode binding post are connected to the negative electrode of a power source, and the common anode binding post is connected to the positive electrode of the power source. The end face, located in the installation base, of the insulator I and the end face, located in the installation base, of the insulator II are plated with metal conductive films. The efficiency of the thruster is improved, and the service life of the thruster is prolonged.
Owner:LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH

Separating ions in an ion trap

A method is disclosed comprising: trapping ions in an ion trap (40); applying a first force on the ions within the ion trap in a first direction, said force having a magnitude that is dependent upon the value of a physicochemical property of the ions; applying a second force on these ions in the opposite direction so that the ions separate according to the physicochemical property value as a result of the first and second forces; and then pulsing or driving ions out of one or more regions of the ion trap.
Owner:MICROMASS UK LTD

Separation of ions according to ion mobility with enhanced resolving power for mass spectrometric analysis

The invention relates to a method for targeted analysis of ions according to mobility which uses a trapping ion mobility separator (TIMS) comprising a gas flow and an electric DC field barrier within an RF ion guide. The method comprises the steps of introducing ions into the trapping ion mobility separator, pushing the ions by the gas flow against the counteracting electric DC field barrier wherein the height of the electric DC field barrier and the velocity of the gas flow are set such that target ions are trapped near a plateau of the trapping ion mobility separator along which the effective force acting on the ions is substantially constant, and adjusting the height of the electric DC field barrier and / or the velocity of the gas flow in a single step such that the target ions pass the electric DC field barrier.
Owner:BRUKER SCI LLC

Device for producing an electron beam

A device for the production of an electron beam with high surface strengths. The device has a cathode component with a convex cathode face with a predetermined radius for extracting the electron beam in such an alignment that a magnetic field or the magnetic field lines thereof, for causing the extraction of the electron beam, is almost collinearly to the convex cathode face.
Owner:SIEMENS HEALTHCARE GMBH

Methods and systems for applying end cap DC bias in ion traps

A mass spectrometer for analyzing a sample utilizing an ion trap comprises an entrance end cap defining an entrance aperture configured to receive the sample entering the ion trap; a ring electrode defining a ring cavity configured to generate, based on a radio frequency (RF) voltage applied to the ring electrode, an electric field configured to trap the sample received through the entrance aperture; an exit end cap defining an exit aperture configured to receive sample ions exiting the ion trap; and an end cap controller configured to generate a bias control voltage for applying a DC bias potential to at least one of the entrance end or the exit end cap, wherein a value of the bias control voltage is based on an operational parameter of the mass spectrometer.
Owner:ASTROTECH TECH INC

Functional diaphragm coating material for protecting lithium metal negative electrode as well as preparation method and application thereof

The invention belongs to the technical field of electrochemical diaphragm materials, and particularly relates to a functional diaphragm coating material for protecting a lithium metal negative electrode as well as a preparation method and application thereof. The diaphragm coating material has a trihydroxy aldehyde-hydrazine-covalent organic framework. 2,4,6-trihydroxy-1,3,5-benzenetricarboxaldehyde and hydrazine hydrate are mixed, an organic mixed solvent is added, a high-temperature reaction is carried out in an inert gas environment, an obtained reaction product is washed and dried, and obtained red powder is the trihydroxy aldehyde-hydrazine-covalent organic framework coating material. The prepared trihydroxy aldehyde-hydrazine-covalent organic framework has abundant polar functional groups which are hydroxyl groups; the coating material is applied to protection of lithium metal, through the lithium affinity effect of polar groups, anions are fixed, dissociation of electrolyte saltis promoted, the migration number of lithium ions is increased, the concentration of the lithium ions near a lithium negative electrode is increased, the space charge effect of cations is reduced, growth of lithium ion tips is reduced, and the performance of lithium dendrites can be effectively inhibited.
Owner:SOUTH CHINA NORMAL UNIVERSITY

Cleaning method of wet-type electrostatic dust collector pole plate

The invention provides a cleaning method of a wet-type electrostatic dust collector pole plate. A normal pressure dripping spraying cleaning mode or constant pressure overflow spraying cleaning mode or other non-spraying cleaning modes are adopted, the surface tension of water is utilized for overcoming the influence of gravity on water flow, and therefore it is effectively ensured that the pole plate is cleaned completely and efficiently in real time. According to the structure, a water conveying pipe (1), a flow equalizing pipe (2) and the double-layer symmetric corrugated face pole plate (3) are included. Cleaning water is sprayed to the top end of the flow equalizing pipe (2) on the upper portion of the double-layer symmetric corrugated face pole plate (3) in a dripping or overflow spraying mode through the water conveying pipe (1), the flow equalizing pipe (2) equalizes water drops to the two surfaces of the double-layer symmetric corrugated face pole plate (3), a continuous and uniform cleaning water film is used for continuously taking away pollutants collected on the surfaces of the dust collection pole plate, and cleaning of the pole plate is achieved. The characteristics that normal pressure dripping (overflow) spraying, no spraying dead angle, flow distribution balance, the uniform pole plate water film, complete cleaning and the like are adopted, and the cleaning method is small in space-charge effect, stable in electric field operation and efficient, saves energy, and can greatly heighten the pole plate, save floor space and save investment.
Owner:ENELCO ENVIRONMENTAL TECH ANHUI

Circuit and method for measuring operational amplification bias current and shielding control unit

The invention discloses a circuit and method for measuring operational amplification bias current and a shielding control unit. The circuit includes an inverted input terminal control unit connected with an inverted input terminal of a to-be-tested operational amplifier; an in-phase input terminal control unit connected with an in-phase input terminal of the to-be-tested operational amplifier; a first auxiliary operation amplification unit whose inverted input terminal is connected with the output terminal of the to-be-tested operational amplifier and whose in-phase input terminal is in grounded connection; a second auxiliary operation amplification unit whose inverted input terminal is connected with the output terminal of the first auxiliary operation amplification unit and whose in-phase input terminal is in grounded connection and whose output terminal outputs electrical signals; a feedback resistor connected between the inverted-phase input terminal of the to-be-tested operationalamplifier and the output terminal of the second auxiliary operational amplification unit so as to form a negative feedback circuit. The invention solves problems of low precision and poor stability in measurement of input bias current of operational amplification device in the prior art; the measurement precision is accurate to picoamp level from nanoamp level and market demands are met.
Owner:北京励芯泰思特测试技术有限公司

Multi-electron-beam traveling wave tube with axisymmetric folded waveguide high-frequency slow wave structure

PendingCN113270304AEasy transferIncrease the axial componentTravelling-wave tubesWave structureElectrical conductor
The invention discloses a multi-electron-beam traveling wave tube of an axisymmetric folded waveguide high-frequency slow wave structure. The multi-electron-beam traveling wave tube comprises an axisymmetric folded waveguide module and a coaxial periodic magnet focusing system arranged on the axisymmetric folded waveguide module, the axisymmetric folded waveguide module comprises an inner conductor and an outer conductor, and the outer conductor is sleeved outside the inner conductor. Outer fins are arranged on the outer wall of the inner conductor, inner fins are arranged on the inner wall of the outer conductor, the outer fins and the inner fins are embedded in a staggered manner to form the axisymmetric folded waveguide structure, and the inner conductor and the outer conductor are each provided with a plurality of electron beam channels. Through multiple electron beams, the space charge effect can be reduced, the total current is increased, and the microwave output power is increased. According to the present invention, the working frequency is improved through a high-order electromagnetic wave mode in the axial symmetry folded waveguide in the circumferential direction; the coaxial periodic magnet focusing system is beneficial to improving the axial component of a magnetic field in an electron beam channel and reducing the radial component, so that the electron beams can be transmitted more easily.
Owner:深圳奥镨科技有限公司

Anisotropism focusing large-dynamic stripe image converter

The invention relates to an anisotropism focusing large-dynamic stripe image converter which comprises a photoelectric cathode, a pre-time focusing system, a space focusing system, a post-time focusing system, a scanning deflector, an electron multiplier and a fluorescent screen that are sequentially arranged in the transmitting direction of an electron beam, wherein the space focusing system is an electric quadrupole focusing lens; an anode hole for the electron beam to penetrate through is arranged on an anode, the photoelectric cathode is provided with a photoelectric transmitting material, a grid is provided with a rectangular grid hole for the electron beam to penetrate through; the photoelectric cathode is of a surface structure, the grid and the anode are rectangular grooves with three surfaces or five surfaces, and a first time focusing electrode, a first blanking electrode, a second blanking electrode and a second time focusing electrode are cylindrical lenses with rectangular frame structures or plate shaped electrode pair structures. The invention solves the technical problems of low gain and small dynamic range of the stripe image converter. According to the invention,the dynamic range of the stripe image converter is improved so that the electron beam realizes anisotropism focusing characteristics and the space charge effect is weakened.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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