46 results about "CHOLINE HYDROXIDE" patented technology

A new remover chemistry based on a choline compound, such as choline hydroxide, is provided in order to address problems related to removal of residues, modified photoresists, photoresists, and polymers such as organic anti-reflective coatings and gap-fill and sacrificial polymers from surfaces involved in dual damascene structures without damaging the dielectrics and substrates involved therein. An etch stop inorganic layer at the bottom of a dual damascene structure may or may not be used to cover the underlying interconnect of copper. If not used, a process step of removing that protective layer can be avoided through a timed etch of the via in trench-first dual damascene processes.

The present invention is a method of cleaning to removal residue in semiconductor manufacturing processing, comprising contacting a surface to be cleaned with an aqueous formulation having a polymer selected from the group consisting of acrylamido-methyl-propane sulfonate) polymers, acrylic acid-2-acrylamido-2-methylpropane sulfonic acid copolymer and mixtures thereof and a quaternary ammonium hydroxide having greater than 4 carbon atoms or choline hydroxide with a non-acetylinic surfactant.The present invention is also a post-CMP cleaning formulation having the components set forth in the method above.

A continuous process for the production of choline hydroxide includes reacting ethylene oxide, trimethylamine, and water in a reaction zone to form a reaction mixture and extracting heat from the reaction mixture. Subsequently, phase separation of the reaction mixture is induced to obtain a choline hydroxide phase and an organic liquid phase comprising trimethylamine. A choline hydroxide solution (e.g., at a concentration of about 40% to 50% by weight, based on total weight of the choline hydroxide solution) is obtained from the choline hydroxide phase.

New stabilizers for solutions of choline hydroxide and related quaternary trialkylalkanolamines are disclosed. The stabilizers are alkyl hydroxylamines, hydrazines, hydrazides, or derivates thereof, including compounds containing more than one such functionality. The new stabilizers are effective at concentrations less than about 1000 ppm, and choline hydroxide solutions stabilized with the compounds described herein typically have Gardner Color change less than about 2.0 after six months at reasonable temperatures.

A method for the stabilization of an aqueous choline hydroxide solution includes, optionally adding a first stabilizer of a dithionite salt and / or a dialkylhydroxylamine to an aqueous solution containing reactants that will produce an aqueous choline hydroxide solution; and after the aqueous choline hydroxide solution is formed, adding a second stabilizer which comprises a dialkylhydroxylamine to the aqueous choline hydroxide solution. The stabilized choline hydroxide solution may include choline hydroxide, water, and a dialkylhydroxylamine and optionally a dithionite salt as a stabilizer present in an amount of from about 50 ppm to less than about 5000 ppm by weight relative to the total weight of the stabilized choline hydroxide solution.

A method for the stabilization of an aqueous choline hydroxide solution includes, optionally adding a first stabilizer of a dithionite salt and / or a dialkylhydroxylamine to an aqueous solution containing reactants that will produce an aqueous choline hydroxide solution; and after the aqueous choline hydroxide solution is formed, adding a second stabilizer which comprises a dialkylhydroxylamine to the aqueous choline hydroxide solution. The stabilized choline hydroxide solution may include choline hydroxide, water, and a dialkylhydroxylamine and optionally a dithionite salt as a stabilizer present in an amount of from about 50 ppm to less than about 5000 ppm by weight relative to the total weight of the stabilized choline hydroxide solution.

The present invention, in a preferred embodiment, is a photoresist stripper formulation, comprising: Hydroxylamine ; Water; a solvent selected from the group consisting of dimethylsulfoxide; N-methylpyrrrolidine; dimethylacetamide; dipropylene glycol monomethyl ether; monoethanolamine and mixtures thereof; a base selected from the group consisting of choline hydroxide, monoethanolamine, tetramethylammonium hydroxide; aminoethylethanolamine and mixtures thereof; a metal corrosion inhibitor selected from the group consisting of catechol, gallic acid, lactic acid, benzotriazole and mixtures thereof; and a bath life extending agent selected from the group consisting of glycerine, propylene glycol and mixtures thereof. The present invention is also a method for using formulations as exemplified in the preferred embodiment.

Disclosed is a process for the production of choline hydroxide includes reacting at a temperature above 30.0° C. ethylene oxide, trimethylamine, and water in the presence of an aqueous medium in such amounts as to form a diluted choline hydroxide solution having a choline hydroxide concentration of less than 40 wt % and removing at least a portion of the aqueous medium from the diluted choline hydroxide solution to form a concentrated aqueous choline hydroxide solution having a choline hydroxide concentration which is at least 1.05 times the choline hydroxide concentration of the diluted choline hydroxide solution. The process allows for large scale, continuous production of concentrated aqueous choline hydroxide solutions of good quality under economically advantaged consumption factors for ethylene oxide.

The invention discloses a flame-retardant polylactic acid composite material and a preparation method thereof, belonging to the field of flame-retardant materials. The preparation method of phytic acid choline flame retardant is: prepare the filtrate of choline hydroxide with choline chloride and sodium hydroxide; add phytic acid solution to the filtrate, remove the solvent after reaction, and dry to obtain phytic acid choline flame retardant agent. The preparation method of the flame-retardant thermoplastic starch: 100 parts of starch, 15-40 parts of glycerin, 5-80 parts of phytic acid choline flame retardant, and 0-20 parts of water are prepared by melting and blending at a processing temperature of 130-150°C. The preparation method of the flame-retardant polylactic acid composite material is: 100 parts by weight of polylactic acid and 5-50 parts by weight of thermoplastic flame-retardant starch are melted and blended. Both the flame retardant and the polylactic acid composite material prepared by the present invention are of biological origin, green and environmentally friendly, and the flame retardant effect of the composite material is obvious, which effectively expands the application range of various additives and materials. At the same time, the preparation method of the present invention is simple and easy. Mass production.

The invention relates to an IWR / CDO co-crystallized zeolite molecular sieve synthesis method, wherein a mixture is subjected to hydrothermal crystallization for 30-300 h at a temperature of 100-200 DEG C according to a ratio of an organic templating agent choline hydroxide to YO2 to X2O3 to H2O of 0.15-0.95:1:0-0.08:2-28 to obtain a porous IWR / CDO co-crystallized zeolite molecular sieve material,wherein Y is at least a skeleton tetravalent element, and X is at least a trivalent skeleton element. According to the present invention, the IWR / CDO co-crystallized zeolite molecular sieve is synthesized with the inexpensive organic templating agent, the relative ratio of the two molecular sieves is adjusted within a range of 1-99%, and the synthesis method is simple and easy to perform, and is suitable for promotion.

The invention relates to a synthesis method of an ITQ-24 zeolite molecular sieve, and mainly solves the problems of complicated preparation and high cost of organic template agents used for synthesizing an ITQ-24 zeolite molecular sieve and an unstable structure of the obtained ITQ-24 zeolite molecular sieve in the prior art. According to the invention, choline hydroxide which is low in price andcan be obtained from market sale is used as an organic template agent; a mixture is composed according to the following relationships: choline hydroxide / YO2=0.1-1.0, X2O3 / YO2=0-0.1, and H2O / YO2=1-30;hydrothermal crystallization is carried out on the mixture at 100-200 DEG C for 24-350 hours to obtain the porous crystalline zeolite molecular sieve material ITQ-24, wherein Y is at least one quadrivalent element, and X is at least one trivalent element. According to the invention, the cheap organic template agent is used, so that the synthesis cost is greatly reduced; the structure of the synthesized ITQ-24 molecular sieve is stable; and the method has a wide synthesis range, simple and feasible operation and convenient promotion.