The present application mainly relates to the technical field of near-
infrared spectroscopy. In order to solve the problem that the conventional
wavelength calibration method of MEMS Fabry-Perot cavity
chip has low precision, and it is usually necessary to repeatedly calibrate a single
wavelength to ensure the
measurement precision, which is time-consuming and laborious, the present application provides an accurate
wavelength calibration method based on MEMS Fabry-Perot cavity, first, the wavelength of each wavelength point is calculated according to the
wavelength range and the number of wavelength points of the MEMS Fabry-Perot cavity
chip, the wavelength point to be calibrated is determined, the wavelength point λ m is set, a
large range of
voltage intervals is scanned, and the corresponding calibration
voltage v1 is roughly obtained λ m , then the fine scanning
voltage range is selected according to the calibration voltage v1, the voltage interval is narrowed to obtain the calibration voltage v2, the calibration voltage v2 is fixed, a
small range of wavelength intervals is scanned, and the corresponding calibration wavelength λ p of v2 is calculated and obtained, and finally the voltage v2 is fine-tuned to obtain the voltage corresponding to the wavelength point λ m . The method described in the present application is mainly suitable for
wavelength calibration of a miniature near-
infrared spectroscopy system.