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100 results about "Metal semiconductor field effect transistors" patented technology

Methods of fabricating silicon carbide metal-semiconductor field effect transistors

SiC MESFETs are disclosed which utilize a semi-insulating SiC substrate which substantially free of deep-level dopants. Utilization of the semi-insulating substrate may reduce back-gating effects in the MESFETs. Also provided are SiC MESFETs with a two recess gate structure. MESFETS with a selectively doped p-type buffer layer are also provided. Utilization of such a buffer layer may reduce output conductance by a factor of 3 and produce a 3 db increase in power gain over SiC MESFETs with conventional p-type buffer layers. A ground contact may also be provided to the p-type buffer layer and the p-type buffer layer may be made of two p-type layers with the layer formed on the substrate having a higher dopant concentration. SiC MESFETs according to embodiments of the present invention may also utilize chromium as a Schottky gate material. Furthermore, an oxide-nitride-oxide (ONO) passivation layer may be utilized to reduce surface effects in SiC MESFETs. Also, source and drain ohmic contacts may be formed directly on the n-type channel layer, thus, the n+ regions need not be fabricated and the steps associated with such fabrication may be eliminated from the fabrication process. Methods of fabricating such SiC MESFETs and gate structures for SiC FETs as well as passivation layers are also disclosed.
Owner:CREE INC

Beta irradiation detector based on silicon carbide junction field-effect transistor (JFET)

The invention discloses a beta ray irradiation detector based on a silicon carbide metal-semiconductor field effect transistor structure, which is used for mainly solving the problems of poor irradiation resistance and low energy conversion efficiency of an existing beta irradiation detector. The detector comprises an n-type substrate (8), a p-type buffer layer (7), an n-type channel (6) with the concentration of 3.5*10<17>cm<-3> to 4*10<17>cm<-3>, an n-type buffer layer (5) and an ohmic contact layer (4) from top to bottom, wherein a source and a drain (2) are deposited on the ohmic contact layer; a semitransparent Schottky contact layer (1) is deposited on the n-type buffer layer; the Schottky contact layer is formed by high barrier Schottky metals of Au, Ti and Pt, and is embedded in the n-type buffer layer (5) with the depth of 0.06-0.08 mu m; and a surface area except a grid electrode as well as the source and drain is covered with a SiO2 passivation layer (3). The beta ray irradiation detector has the characteristics of strong resistance to radiation, high energy conversion efficiency and high detection efficiency, and can be applied to detecting beta rays in nuclear energy.
Owner:陕西半导体先导技术中心有限公司

4H-SiC metal semiconductor field-effect transistor

The invention discloses a 4H-SiC metal semiconductor field-effect transistor. The 4H-SiC metal semiconductor field-effect transistor mainly solves the problems that in the prior art, output current of a drain electrode is unstable, and breakdown voltage is low. The 4H-SiC metal semiconductor field-effect transistor structurally comprises a 4H-SiC semi-insulating substrate (1), a P-type buffer layer (2) and an N-type channel layer (3) from bottom to top, wherein a source electrode cap layer (5) and a drain electrode cap layer (6) are arranged on the surface of the N-type channel layer (3), a source electrode (10) and a drain electrode (11) are arranged on the surface of the source electrode cap layer (5) and the surface of the drain electrode cap layer (6) respectively, a gate electrode (4) is formed on one side of the portion, close to the source electrode cap layer (5), of the top of the N-type channel layer (3), a sunken gate source drift region (9) is formed between the gate electrode (4) and the source electrode cap layer (5), a sunken gate drain drift region (7) is formed between the gate electrode (4) and the drain electrode cap layer (6), and transverse PN junctions (8) are arranged on the surface of the sunken gate drain drift region (7). The 4H-SiC metal semiconductor field-effect transistor has the advantages that the breakdown voltage is high, and the output current of the drain electrode is stable.
Owner:XIDIAN UNIV

Clamp used for SiC MESFET (Metal Semiconductor Field Effect Transistor) direct current test

The invention discloses a clamp used for a SiC MESFET (Metal Semiconductor Field Effect Transistor) direct current test, belonging to the field of field effect transistor tests. The clamp comprises a PCB (Printed Circuit Board) distributed with a filter circuit and a metal board carrying the PCB, wherein the metal board is provided with a groove for fixing a SiC MESFET device to be tested, the PCB is provided with a through hole corresponding to the groove, the filter circuit includes a grid filter circuit and a drain filter circuit, the output ends of the grid filter circuit and the grain filter circuit are respectively connected with a grid transmission wire and a drain transmission wire through offset lines, one ends of the grid transmission wire and the drain transmission wire are respectively provided with a contact respectively connected with a grid electrode and a drain electrode of the SiC MESFET device to be tested, and the other ends of the grid transmission wire and the drain transmission wire are respectively provided with a self-excitation prevention module. The clamp can eliminate self-excitation of the device by the self-excitation prevention modules, improve device test efficiency and accumulate valuable data for the representation of device characteristics.
Owner:THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP

4H-SiC metal semiconductor field effect transistor with slope-shaped grid and manufacturing method

The invention discloses a 4H-SiC metal semiconductor field effect transistor with a slope-shaped grid. The 4H-SiC metal semiconductor field effect transistor comprises a 4H-SiC semi-insulating substrate, a P-type buffer layer and an N-type channel layer from bottom to top, a source electrode cap layer and a drain electrode cap layer are arranged on the surface of the N-type channel layer, a source electrode and a drain electrode are arranged on the surface of the source electrode cap layer and the surface of the drain electrode cap layer respectively, a slope-shaped groove inclined towards one side of the source electrode cap layer is formed in the upper end face of the N-type channel layer, the slope-shaped grid is arranged is arranged in the slope-shaped groove, the lower end face of the slope-shaped grid is matched with the slope-shaped groove, the upper end face of the slope-shaped grid is parallel to the upper end face of the N-type channel layer, and the distance between the slope-shaped grid and the source electrode cap layer is smaller than that between the slope-shaped grid and the drain electrode cap layer. The field effect transistor has the advantages of being high in drain electrode output current and excellent in frequency property.
Owner:XIDIAN UNIV

4H-SiC metal semiconductor field effect transistor with step buffer layer structure

The invention discloses a 4H-SiC metal semiconductor field effect transistor with a step buffer layer structure. The 4H-SiC metal semiconductor field effect transistor comprises a 4H-SiC semi-insulating substrate, a P-type buffer layer and an N-type channel layer from the bottom to the top. The two sides of the N-type channel layer are respectively provided with a source electrode cap layer and a drain electrode cap layer. The surface of the source electrode cap layer and the drain electrode cap layer is respectively provided with a source electrode and a drain electrode. A gate electrode is formed on one side which is arranged above the N-type channel layer and close to the source electrode cap layer. A concave gate source drift region is formed between the gate electrode and the source electrode cap layer. A concave gate drain drift region is formed between the gate electrode and the drain electrode cap layer. The position, which is arranged on the upper end surface of the P-type buffer layer and close to the source electrode cap layer, is provided with a groove. One side, which is arranged in the groove and close to the drain electrode cap layer, is provided with two steps. The 4H-SiC metal semiconductor field effect transistor with the step buffer layer structure has advantages of being stable in breakdown voltage and high in output drain electrode current.
Owner:XIDIAN UNIV

Metal-semiconductor field-effect transistor with gate lower buffer layer structure and manufacturing method

The invention relates to a metal-semiconductor field effect transistor with an under-grid buffer layer structure and a manufacturing method; the transistor comprises a semi-insulating substrate, a buffer layer, a channel layer, an under-grid buffer layer, a source electrode cap layer, a drain electrode cap layer, a source electrode, a drain electrode and a grid electrode, wherein the under-grid buffer layer, the source electrode cap layer and the drain electrode cap layer are sequentially formed on the channel layer; the under-grid buffer layer forms a raised platform on the channel layer; and the grid electrode is formed on the raised platform. The manufacturing method of the transistor comprises the following steps of: sequentially growing a P type buffer layer, an N type channel layer and an N type under-grid buffer layer on the semi-insulating substrate; carrying out high concentration N type ion implantation on regions of both ends of the under-grid buffer layer corresponding to the source electrode and the drain electrode to form a source electrode cap layer and a drain electrode cap layer; etching a part of the under-grid buffer layer which is positioned between a grid source and a grid drain; and manufacturing the source electrode and the drain electrode on the source electrode cap layer and the drain electrode cap layer, and manufacturing the grid electrode on the under-grid buffer layer. The transistor of the invention can increase the power density and frequency response of a microwave power amplifier circuit and a microwave power amplifier system; and the manufacturing process is simple.
Owner:XIDIAN UNIV

Metal semiconductor field effect light emitting transistor and preparing method thereof

The invention discloses a metal semiconductor field effect transistor and the fabrication method thereof. The metal semiconductor field effect transistor comprises a substrate, a buffer layer which is arranged on the substrate, a first n type heavily doped layer above the buffer layer, a multi-quantum well layer and a p type layer which are sequentially arranged on the n type layer, a second n type heavily doped layer above the buffer layer, a source electrode which is in Ohmic contact with the second n type heavily doped layer, and a drain electrode which is in Ohmic contact with the p type layer. The first n type heavily doped layer is not connected with the second n type heavily doped layer. The metal semiconductor field effect transistor is characterized in that a slightly doped n type layer is arranged between the buffer layer and first and second n type heavily doped layers, and a SiO2 layer connected with the slightly doped n type layer is embedded between the substrate and the buffer layer. The metal semiconductor field effect transistor further comprises a gate electrode which is in Schottky contact with the SiO2 layer. The metal semiconductor field effect transistor reduces etching damages, thus improving the performance of the components.
Owner:SOUTH CHINA NORMAL UNIVERSITY
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