A
metal semiconductor field effect transistor biosensor with an embedded
biomolecule detection cavity comprises a substrate, a buffer layer arranged above the substrate, a channel arranged above the buffer layer, a source region and a drain region respectively arranged on two sides above the channel, source
electrode metal arranged above the source region, drain
electrode metal arranged above the drain region, and a groove arranged in the middle of the channel, a
biomolecule detection cavity is arranged above one side, close to the drain
electrode, of the groove, and a grid electrode is arranged above one side, close to the source region, of the
biomolecule detection cavity; after biomolecules with different
dielectric constants enter the biomolecule detection cavity, the depletion layer
capacitance of the device is changed, so that the
electric field distribution and carrier concentration of a channel of the device are changed, the electrical characteristics of the device are changed, and the characteristics of the biomolecules are detected;
signal transduction is realized by directly contacting a depletion layer
capacitor of a channel, and the sensitivity and the stability are remarkably improved.