The invention discloses a comprehensive two-dimensional vertical structure
metal-
semiconductor field effect transistor and a preparation method thereof. A source
electrode, a lower
isolation layer, a drain
electrode and an upper
isolation layer which are vertically stacked are formed on the surface of a substrate, an inclined side wall is formed, a channel covers the inclined side wall, a grid
electrode and the channel are self-aligned, and a semi-
metal grid electrode and a
semiconductor channel are in direct contact to form a Schottky junction; based on a comprehensive two-dimensional
material system, the Fermi pinning effect and
unintentional doping are effectively inhibited, and the performance of the device is optimized by optimizing the grid control capability and the
electric contact performance; a
gate dielectric layer is not arranged, so that the problems of
electrical performance deterioration and the like under a limit miniature scale are avoided; the integration density of the device is improved and the research and development and manufacturing cost is controlled while excellent performance is kept; the channel length and the contact length are synchronously and accurately reduced by utilizing a side wall vertical structure; the method is applied to the industrial application fields of next-generation
integrated circuit chips, high-density memories, flexible and wearable
electronics and the like which break through the
silicon-based physical limit.