The invention discloses a gate
structure based on an array p-GaN layer embedded MIS and a
semiconductor power device, the gate structure is arranged on the surface of an AlGaN barrier potential layer, and comprises a continuous p-GaN layer, a gate sinking
metal and an interval p-GaN layer which are sequentially arranged on the surface of the AlGaN barrier potential layer along the transverse direction; the continuous p-GaN layer is close to the source
electrode, and the interval p-GaN layer is close to the drain
electrode; wherein the interval p-GaN layer is divided into a plurality of segments at equal intervals along the longitudinal direction by the bulges on the surface of the gate sinking
metal; the
semiconductor power device comprises a substrate, a nucleating layer, an AlGaN
transition layer with gradually-changed Al components, a GaN buffer layer, an AlGaN back
barrier layer, a UID GaN layer and an AlGaN
barrier layer which are sequentially covered from top to bottom, and the gate structure is installed on the AlGaN
barrier layer. According to the gate structure, the dynamic
threshold voltage drift caused by the gate-drain
coupling barrier lowering effect is reduced, and the problem that the dynamic on-resistance is increased in the switching process caused by the back
gate effect is inhibited; the problem of
electric field concentration below the grid
electrode is optimized, the
voltage resistance of the device is improved, and the leakage current of the grid electrode is reduced.