This invention discloses a
laser-direct-write magnetic thin-film encapsulation method for
chip-based inductive elements, relating to the field of
integrated circuit packaging technology. The method involves uniformly mixing
magnetic nanoparticles with a curable
adhesive to form a magnetic
slurry, which is then uniformly coated onto a
chip containing an inductive element. A
laser is used to directionally irradiate the magnetic
slurry above the inductive element, causing it to solidify and form a
magnetic thin film that adheres tightly to the
chip. Uncured magnetic
slurry on the chip is then cleaned away, resulting in an inductive element encapsulated with the
magnetic thin film. This method solidifies the magnetic film within a designated area of the chip's inductive element, avoiding direct contact with the element's surface. This prevents chip interface damage and
device failure, as well as issues such as secondary
diffusion failure of
active devices due to excessive temperature. It is fully compatible with standard
semiconductor processes, facilitating commercial applications. The encapsulation process is simple, efficient, and flexible.