The invention provides a
solenoid valve and a
mass flow controller. The
solenoid valve includes a solenoid, a valve body
assembly, a valve core
assembly, a plug
assembly, and a
valve port component, wherein the valve core assembly, the plug assembly, and the
valve port component are stacked in sequence. Placed in the
accommodation chamber of the valve body assembly, the valve core assembly is movably arranged in the
accommodation chamber, the plug assembly includes a magnetic seat and a plug, the magnetic seat is fixedly arranged in the
accommodation chamber, and the plug is movably arranged In the mounting hole of the magnetic seat, the valve core assembly is in
point contact with the plug, and the end face of the
valve port part facing the plug assembly is provided with a valve port, and the plug is set opposite to the valve port; the electromagnetic part is used to magnetize the valve core assembly and the
magnet. seat, so that the magnetic seat attracts the valve core assembly to move, and then drives the plug to move, and adjusts the distance between the plug and the valve port. The
electromagnetic valve and the
mass flow controller provided by the present invention can improve the working reliability and reduce the difficulty of assembly, so as to improve the first-time assembly
pass rate, reduce the
processing difficulty of parts and components, reduce the
processing cost, and reduce their own volume.